Polymerization of para-xylylene derivatives (parylene polymerization). I. Deposition kinetics for parylene N and parylene C

Kinetic aspects of parylene N [unsubstituted poly(para-xylylene)] and Parylene C [monochlorosubstituted poly(para-xylylene)] were studied. The conversion of starting material (dimer of either p-xylylene or chloro-para-xylylene) to polymer is quantitative (ca. 100%). Consequently, the total polymer formed in a closed system is directly proportional to the amount of dimer charged. However, the percentage of the total amount of polymer formed which deposits on substrate surfaces, placed in the deposition chamber, as well as the polymer film growth rate are dependent on operational factors such as the temperature of the substrate, sublimation of dimer temperature, flow pattern of the reactive species, etc. Parylene C, being a heavier and more polar molecule, has the tendency to deposit easily in the deposition chamber compared to the deposition of Parylene N. Parylene C also has a higher ceiling temperature for deposition than Parylene N. This situation has been investigated from the viewpoint of excess thermal energy which hinders polymer formation (deposition) due to the exceedingly high entropy change necessary for polymer deposition to occur. The addition of a cool (i.e., room temperature) inert gas was shown to increase the deposition of Parylene N on substrate surfaces placed in the deposition chamber. The deposition increase and acceleration of deposition (film growth) rate were found to be related to the size and molecular weight of the inert gas pressure maintained in the system. The accelerating effect is explained by the increase in third-body collisions to dissipate the excess thermal energy of the reactive species.     

Polymerization of para-xylylene derivatives. V. Effects of the sublimation rate of di-p-xylylene on the crystallinity of parylene C deposited at different temperatures

Poly(chloro-p-xylylene) was synthesized in a manner similar to poly(p-xylylene) using Gorham's method at various cryogenic temperatures. The effect of the sublimation rate of dimer on the kinetics of deposition, crystallinity, and crystalline structure was studied. Increasing the sublimation rate of the dimer increases the deposition rate similar to that of poly(p-xylylene). However, an increase in crystallinity, in contrast to Parylene N, is observed, although, in general, Parylene C has lower crystallinity relative to Parylene N. No polymorphism is observed either by decreasing the deposition temperature or by increasing the sublimation rate of the dimer. Solution annealing and isothermal annealing both bring about crystallization without any structural transformation. Solution annealing removes the oligomers and dimers, but no crystalline oligomers are ever detected under the scanning electron microscope (SEM). The surface topology of films synthesized from ambient temperature to ?40°C is very similar to Parylene N. At lower temperatures, in the region ?50 to ?60°C, a rod-type morphology is observed similar to Parylene N. The surface topology of samples synthesized at ?196°C is totally different from that of Parylene N. All low temperature synthesized samples are amorphous.     

Polymerization of para-xylylene derivatives. VI. morphology of parylene N and parylene C films investigated by gas transport characteristics

Polychloro-p-xylylene (Parylene C) and poly-p-xylylene (Parylene N) films were synthesized in vacuum with and without the presence of 42 mtorr of argon at various deposition temperatures and three different dimer sublimation rates. Depending on the synthesis conditions, the morphology of the films can vary from a homogeneous (nonporous) structure to a heterogeneous (porous) structure. The transport coefficients of the gases He, O₂, N₂, and CO₂ through these films were measured at 25°C. The transport coefficients for both types of films vary with the deposition temperature and the dimer sublimation rate. The variation, however, cannot be solely explained by the change of crystallinity. Anomalous transport behavior is observed in the homogeneous, as-synthesized polymers of relatively high crystalline content (above 20–30%). In many cases the permeabilities and diffusivities increase despite an increase in crystallinity. The effects of crystallization induced by isothermal and solvent annealing on the transport coefficients of polymers of Parylene C are different from those of Parylene N synthesized with or without argon. The mean pore size and effective porosity of the porous films were calculated from gas permeation data. For Parylene C and Parylene N porous films synthesized without argon, increasing the dimer sublimation rate or decreasing the deposition temperature increases the mean pore size but decreases the effective porosity. For Parylene N porous films synthesized in the presence of argon, increasing the dimer sublimation rate or decreasing the deposition temperature results in a decrease in the mean pore size but an increase in the effective porosity. Overall, no appreciable change in transport coefficients is observed upon addition of an inert gas.     

Polymerization of para-xylylene derivatives (parylene polymerization). IV. Effects of the sublimation rate of di-p-xylylene on the morphology and crystallinity of parylene N deposited at different temperatures

The effect of the sublimation rate of di-p-xylylene on the crystallinity and morphology of Parylene N deposited on stainless steel was studied as a function of substrate temperature. For a given rate of dimer sublimation, the deposition rate increases with decreasing substrate temperature. Increasing the sublimation rate of the dimer increases the deposition rate 10-fold, decreases the crystallinity, and shifts the appearance of the hexagonal β structure towards higher substrate temperature for samples synthesized from room temperature (RT) to ?60°C. Solution annealing resulting from solvent extraction, and isothermal annealing, increase the crystallinity of the polymers and result in structures containing both α and β polymorphs. The surface topology, as revealed by scanning electron microscopy (SEM), for polymers synthesized from RT to ?40°C shows a globular structure, whereas low temperature samples exhibit a rod-type morphology. For higher sublimation rates of the dimer, SEM micrographs show that oligomeric species start appearing on the polymer films after a period of 4–5 days. Solvent extraction removes the oligomeric crystals, and GPC analysis of the resulting extract indicates that most of the oligomers range in molecular weight from 100 to 900. The cross-sectional morphology for fractured low temperature samples, however, reveals different morphologies as polymerization proceeds. It is postulated that in the temperature range ?50 to ?78°C, both surface condensation and surface adsorption of monomer occurs, leading to different morphologies and lower crystallinity. The polymer synthesized at liquid nitrogen temperature shows the presence of voids along with different morphologies. X-ray diffractograms of polymers synthesized at liquid nitrogen reveal a considerable amount of amorphous phase in the films. Hence, it is inferred that, although the liquid nitrogen polymerization is a solid state polymerization of the crystalline monomer, it does not lead to 100% crystalline material, and the reasons for this are discussed.     

Tensile film stress of parylene deposited on liquid

We found that liquid droplets encapsulated by Parylene deposited directly on a liquid surface deformed toward spherical shapes during Parylene deposition. This deformation suggested that the film stress was tensile. We calculated the film stress of such Parylene films by studying the surface mean curvature of the droplet shape and found the film stress measured about 0.7-0.9 MPa tensile. This film stress is of opposite type to that of as-deposited Parylene films deposited on solid substrates, which was compressive. This difference might indicate a profound change of the Parylene polymer due to the use of liquid surface as deposition substrate. The tensile film stress and its effect on the droplet shape also have implications in the fabrication and operation of Parylene microdevices that have encapsulated liquid structures such as microlens or micropumps.     

Polymerization of para-xylylene derivatives (parylene polymerization). III. Heat effects during deposition of parylene N at different temperatures

Thermal effects accompanying the vacuum deposition of poly-para-xylene (Parylene N) at different temperatures have been studied by following the changes in the temperature of the substrate. Similarly to the case of polychloro-para-xylylene (Parylene C), two distinct exothermic effects were observed; one discrete, resulting in sharp exothermic spikes and the other continuous, resulting in the shift of the baseline. The spike effect, attributed to the solid-state polymerization of para-xylylene, is observed at the low-temperature range, the upper limit of which moves higher for higher deposition rates. The shift of a baseline as a function of deposition temperature exhibits two maxima, one independent of deposition rate and the second moving toward higher temperatures (that is, toward the first maximum) for higher deposition rates. First maximum falls at about ? 72°C and is attributed to the melting point of para-xylylene crystals. X-ray diffraction studies of polymer samples have shown that the existence of the second maximum is always followed by the appearance of an additional crystalline phase in the respective range of deposition temperatures. When the deposition rate is high enough, the second maximum merges with the first one, or virtually disappears. Under such conditions the new crystalline phase is no more detectable. It is postulated that the evolution of the additional amount of heat resulting in the appearance of the second maximum is due to the cyclization reaction and the formation of cyclic oligomers. This reaction very likely requires a particular spatial arrangement of monomer molecules and, therefore, it is suggested to take place in certain domains of the crystalline lattice.     

Cation exchange membranes by pre-irradiation grafting of styrene into FEP films. I. Influence of synthesis conditions

Gamma radiation-induced grafting of styrene into FEP films was investigated by the pre-irradiation method. The degree of grafting was found to be strongly dependent on the synthesis conditions, such as radiation dose, monomer concentration, crosslinker, temperature, and film thickness. The order of dependence of the rate of grafting on pre-irradiation dose and monomer concentration was found to be 0.64 and 1.90, respectively. The activation energy for the grafting in the temperature range of 50–80°C was determined to be 27.9 kJ/mol. A negative first order dependence of grafting on film thickness was observed. The results suggest that the initial grafting takes place at the film surface and proceeds to the middle by progressive diffusion of monomer through the polystyrene grafted layers. © 1994 John Wiley & Sons, Inc.     

IR spectra of photopolymerized C60 films. Experimental and density functional theory study

IR spectra of photopolymerized fullerene films obtained by simultaneous deposition and UV irradiation were measured in the range of 1500-450 cm(-1). The degree of the polymerization of the C60 films was estimated to be about 95%. To assist the assignment of the experimental IR spectra of the films, quantum chemical calculations of the equilibrium structures of the C60 dimers and trimers were performed at the DFT(B3LYP)/3-21G level of theory. Next, IR frequencies and intensities for those structures were calculated. For the five-trimer structures found in the calculations, the relative stabilities were determined at the B3LYP/4-31G and B3LYP/6-31G levels and used to select the lowest-energy trimers, which are Trimer A (angle between monomer centers is 90 degrees ) and Trimer B (angle between monomer centers is 120 degrees). Next, the IR spectra of the polymerized fullerene films were compared with the calculated frequencies of the lowest-energy dimer and the two lowest-energy trimers. On the basis of this analysis and on the comparison of the film spectra with the IR spectra of the C60 dimer and trimer spectra obtained by other methods, it was shown that the main components of the films are C60 dimers and the orthorhombic (O) polymer phase. The tetragonal (T) and rhombohedral (R) polymers, as well as small amounts of monomers, were also found. Although vibrational frequencies of different C60 phases are similar in most cases, we found several unique spectral features of the C60 dimer and other polymers that may be used to determine the composition of the polymerized C60 film.     

Four-center type photopolymerization in the crystalline state. VI. Kinetic and structural study of the polymerization of p-phenylenediacrylic acid diethyl ester

The effect of temperature on the four-center type photopolymerization has been investigated for p-phenylenediacrylic acid diethyl ester over a wide temperature range including crystal transition point (56°C) and melting point (96°C) of monomer. With the elevation of temperature between ?50 and 15°C, the polymerization rate in the initial stage increased and the degree of polymerization decreased monotonously, while the rate in the later stage decreased above ?25°C. With irradiation at above 25°C, the monomer crystals became sticky, and the polymerization was suppressed at the stage of oligomerization with low conversion. This tendency was enhanced above the crystal transition point, giving mainly dimer in low yield. Above the melting point, only radical polymerization occurred with the aid of oxygen. The steric configuration of the products in the crystalline state was 1,3-trans with respect to the cyclobutane ring. Peaks in NMR spectra of all products were assigned to the protons involved in four compounds up to tetramer. Various results obtained have been interpreted in terms of the change, as a function of temperature, from a topochemical polymerization which proceeds under a control of the monomer lattice to a photoinitiated vinyl-type polymerization in the disordered state. It is concluded that a rigid crystal lattice is indispensable for the four-center type photopolymerization to proceed smoothly.     

Kinetic study of preirradiation grafting of acrylic acid onto poly(tetrafluoroethylene–perfluorovinyl ether) copolymer

A kinetic study has been made on the preirradiation grafting of acrylic acid (AAc) onto poly(tetrafluoroethylene–perfluorovinyl ether) (PFA) film. The effect of grafting conditions was investigated. The dependences of the grafting rate on preirradiation dose and monomer concentration was found to be of the order of 0.5 and 1.3, respectively. The final degree of grafting was found to increase with dose and monomer concentration. However, it decreases as the grafting temperature increase. The overall activation energy for the graft polymerization was calculated from Arrhenius plots to be 5.6 kcal/mol. The activation energy for this grafting system was found to be independent of preirradiation dose used in the range from 10 to 100 kGy. The relationship between the grafting rate and film thickness gave a negative first-order dependence. The results suggest that the grafting proceeds by radical mechanism with bimolecular termination of growing chain radicals. It was reasonable concluded that this grafting proceeds from the surface to the center of film with progressive monomer diffusion through the grafted layer which swells in the monomer solution.     

Investigation of intermolecular interactions in perylene films on Au(111) by infrared spectroscopy

Intermolecular interactions in crystalline perylene films on Au(111) have been investigated by Fourier transform infrared spectroscopy. Dimer modes of vibrations are observed in the crystalline film, in contrast to the monomer modes found for isolated perylene molecules. These dimers are formed via hydrogen bonding in the sandwich herringbone structure of the crystalline α-phase. Davydov splitting of both the monomer and the dimer modes is observed due to resonance dynamic intermolecular interaction. The splitting of monomer modes into three distinct vibrations and the occurrence of the dimer modes confirm that the film crystallizes in the α phase, which is in line with the x-ray diffraction results. The frequency shift and band broadening at elevated temperature have been attributed to the cubic and quartic anharmonic interactions.     

Plasma polymerization. VI. An ESCA investigation of the RF plasma polymerization of perfluoro-2-butyl tetrahydrofuran

Perfluoro-2-butyl tetrahydrofuran was polymerized by an RF glow discharge technique and detailed ESCA studies were made of the resultant films. The rate of film deposition was sensitively dependent on the W/FM parameter and the site of deposition. The ESCA data show that the molecular rearrangement accompanying plasma polymerization and the oxygen functionality is at a significantly lower level than the starting material. Under appropriate conditions plasma polymerization produces material with a C:F stoichiometry of 1:2, although the ESCA data show that the polymer is drastically different from PTFE. ESCA studies are also reported on thin films of the monomer studied at low temperature.     

Polymerization of para-xylylene derivatives (parylene polymerization). II. Heat effects during deposition of parylene C at different temperatures

Thermal effects accompanying vacuum deposition of poly(chloro-para-xylylene) in the temperature range between ?196 and 0°C have been studied using two separate methods. One is based on the recording of the rate of evaporation of liquid nitrogen and it is used for the deposition at ?196°C, and the second involves the recording of changes in the substrate temperature and is used for the deposition in the range of ?162 to 0°C. These methods enable us to observe two distinct effects: fast (discrete), resulting in the appearance of sharp, exothermic spikes; and slow (continuous), resulting in the shift of the baseline. The shift of the baseline exhibits a well-defined maximum at about ?65°C and this temperature is attributed to the melting point of the monomer. The fast process always occurs below this temperature and is explained as a solid state, chain addition polymerization. The quantification of the heat effect at ?196°C strongly suggests that the quinonoid form of the monomer participates in the propagation step of this chain reaction. The fast (solid state) and the continuous modes of polymerization may occur simultaneously in the range of about ?140 and ?65°C. The frequency of the initiation which is the formation of dimer radical seems to control the occurrence of these two modes of polymerization.     

Characterization of N-cyclohexylmethacrylamide LB thin films for room temperature vapor sensor application

This study reports the synthesis, characterization and gas sensing applications of N-cyclohexylmethacrylamide (NCMA) monomer material using FT-IR, ¹H and ¹³C NMR, UV-visible spectroscopy, Quartz Crystal Microbalance (QCM) and Langmuir-Blodgett (LB) thin film deposition techniques. The thin film deposition conditions of NCMA monomer material, which are prepared by LB film technique, are characterized by UV-visible spectroscopy and QCM system. The sensing behaviors of the LB film with respect to volatile organic compounds (VOCs) at room temperature are investigated. Surface pressure change as a function of surface area of NCMA molecule at the water surface shows a well-organized and stable monolayer at 18 mN m^?1 surface pressure value for LB film deposition. Transfer ratio values are found to be ≥ 0.94 for quartz glass and ≥ 0.93 for quartz crystal substrate. The typical frequency shift per layer is obtained 20.10 Hz/layer and the deposited mass onto a quartz crystal is calculated as 824.62 ng/layer. The sensing responses of the LB films against chloroform, dichloromethane, acetone, toluene, benzene and ethanol are measured by QCM system. The sensitivities of the NCMA LB film sensor are determined between 0.085 and 0.029 Hz ppm^?1. Sensitivities with detection limits are between 35.29 and 100.33 ppm against organic vapors. These results can be concluded that the monomer LB film sample is found to be significantly more sensitive to chloroform and dichloromethane vapors than others organic vapors used in this work. This material may find potential applications in the development of room temperature organic vapor sensing.     

Dimerization of formic acid--an example of a "noncovalent" reaction mechanism

The pulse deposition technique allows selectively the isolation of monomeric or dimeric formic acid in argon matrices at 7 K. Warming of matrices containing the monomer M from 7 K to 40 K results in the decrease of M and formation of a dimer B. This dimer is also labile, and further warming finally produces a second dimer A. By comparison with density functional theory (DFT) calculations and gas phase IR spectra taken from the literature, the latter dimer A was identified as the C2h-symmetrical cyclic dimer. The unstable dimer B was identified as the acyclic Cs-symmetrical dimer. An activation energy of 2.3 kcal mol(-1) was calculated for the B --> A rearrangement at the B3LYP/ 6-311 ++ G(d,p) level of theory, which is in qualitative agreement with the experimental finding of a slow thermal reaction under the conditions of matrix isolation.     

Electrochemical nucleation of gold nanoparticles in a polymer film at a liquid-liquid interface

Simultaneous nucleation of gold nanoparticles and polymerization of tyramine has been carried out at an immiscible electrolyte interface. By transferring the gold ion of tetraoctylammoniumtetracloroaurate (TOAAuCl(4)) from the organic to the aqueous phase, a fast homogeneous electron transfer from the tyramine monomer reduces the gold ion. Electropolymerization then proceeds, and gold nanoparticles form. The newly formed nanoparticles act as nucleation sites for the deposition of the oligomers/polymer (and possibly vice versa). This results in gold nanoparticles stabilized in a polytyramine matrix. The size of the nanoparticles is controlled by the concentration of oligomers/polymer in solution. The polymer nanoparticle composite film was analyzed with TEM, XPS, and AFM.     

Initiated chemical vapor deposition of trivinyltrimethylcyclotrisiloxane for biomaterial coatings

Organosilicon polymers show great utility as both biocompatible and electrically insulating materials. In this work, thin films of a novel organosilicon polymer are synthesized by initiated chemical vapor deposition utilizing trivinyltrimethylcyclotrisiloxane as a monomer and tert-butyl peroxide as a free-radical-generating initiator. Use of an initiator allows for the formation of polymer films at filament temperatures as low as 250 degrees C, significantly lower than those required to thermally polymerize the monomer species. The mild reaction conditions allow for the retention of all siloxane ring moieties within the resulting polymer. Films deposited at filament temperatures of 600 degrees C or higher exhibit damage to this moiety. The all-dry deposition process generates a highly cross-linked matrix material in which over 95% of the vinyl moieties present on the monomer units have been reacted out to form linear polymerized hydrocarbon chains. While each hydrocarbon backbone chain averages 8.9 monomer units in length, as evaluated by X-ray photoelectron spectroscopy analysis, each monomer unit is involved in three independent chains, resulting in polymer films of such high molecular weight that they are completely insoluble. Kinetic analysis of the deposition process indicates that the film formation rate is limited by the adsorption of reactive species to the deposition substrate, with an apparent activation energy of -23.2 kJ/mol with respect to the substrate temperature. These results are consistent with a surface growth mechanism, ideal for the coating of nonuniform or high aspect ratio substrates.     

A novel dimeric discotic liquid crystal based on anthraquinone

A novel dimer based on the disc-like anthraquinone core-bis[1-(4-nitrobenzyloxy)-2,3,6,7-tetrapentyloxy-9,10-anthraquinon-5-oxy]do and its corresponding monomer 1-hexyloxy5-(4-nitrobenzyloxy)-2,3,6,7-tetrapentyloxy-9,10-anthraquinone, have been synthesized and characterized. X-ray diffraction studies show that this novel dimer exhibits a hexagonal columnar phase (Col_h) with correlation among the molecular cores along the column. The Col_h phase of the dimer exists over a very wide temperature range, extending from 176°C down to at least 60°C (the lowest temperature reached in DSC), whereas the monomer exhibits a Col_h phase at high temperature and a three-dimensionally ordered columnar phase (Col_x) at low temperature.     

Membranes obtained by preirradiation grafting of acrylic acid onto poly(tetrafluoroethylene–perfluorovinyl ether)

Some properties of the membranes obtained by preirradiation grafting of acrylic acid onto poly(tetrafluoroethylene-perfluorovinyl ether) copolymer (PFA) films have been investigated. The dimensional change caused by grafting and swelling behavior, water uptake, electrical conductivity, and mechanical properties of the grafted films were found to increase as the grafting proceeds. The influence of the preparation conditions (such as preirradiation dose, monomer concentration, grafting temperature, and film thickness) on those properties was studied. These properties were found to be dependent mainly on the degree of grafting regardless of grafting conditions, except at higher monomer concentration (>40 wt %). The electric conductivity and mechanical properties for the membranes obtained at higher AAc concentrations were lower than those obtained at lower ones. Analysis by x-ray microscopy of the grafted films revealed that the grafting begins at the part close to the film surface and proceeds into the central part with progressive diffusion of monomer to give finally homogeneous distribution of the electrolytes in the whole bulk of the polymer. The membranes show good electrochemical and mechanical properties which make them acceptable for practical use as cation-exchange membranes.     

A novel dimeric discotic liquid crystal based on anthraquinone

A novel dimer based on the disc-like anthraquinone core-bis[1-(4-nitrobenzyloxy)-2,3,6,7-tetrapentyloxy-9,10-anthraquinon-5-oxy]do and its corresponding monomer 1-hexyloxy5-(4-nitrobenzyloxy)-2,3,6,7-tetrapentyloxy-9,10-anthraquinone, have been synthesized and characterized. X-ray diffraction studies show that this novel dimer exhibits a hexagonal columnar phase (Col_h) with correlation among the molecular cores along the column. The Col_h phase of the dimer exists over a very wide temperature range, extending from 176°C down to at least 60°C (the lowest temperature reached in DSC), whereas the monomer exhibits a Col_h phase at high temperature and a three-dimensionally ordered columnar phase (Col_x) at low temperature.