Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)

A novel foaming process-chemical foaming process (CFP)-using foaming agents to fabricate wafer-level micro glass cavities including channels and bubbles was investigated. The process consists of the following steps sequentially: (1) shallow cavities were fabricated by a wet etching on a silicon wafer; (2) powders of a proper foaming agent were placed in a silicon cavity, named 'mother cavity', on the etched silicon surface; (3) the silicon cavities were sealed with a glass wafer by anodic bonding; (4) the bonded wafers were heated to above the softening point of the glass, and baked for several minutes, when the gas released by the decomposition of the foaming agent in the 'mother cavity' went into the other sealed interconnected silicon cavities to foam the softened glass into cylindrical channels named 'daughter channels', or spherical bubbles named 'son bubbles'. Results showed that wafer-level micro glass cavities with smooth wall surfaces were achieved successfully without contamination by the CFP. A model for the CFP was proposed to predict the final shape of the glass cavity. Experimental results corresponded with model predictions. The CFP provides a low-cost avenue to preparation of micro glass cavities of high quality for applications such as micro-reactors, micro total analysis systems (μTAS), analytical and bio-analytical applications, and MEMS packaging.     

AFM-based nanotribological and electrical characterization of ultrathin wear-resistant ionic liquid films

Ionic liquids (ILs) are considered as lubricants for micro/nanoelectromechanical systems (MEMS/NEMS) due to their excellent thermal and electrical conductivity. So far, only macroscale friction and wear tests have been conducted on these materials. Evaluating the nanoscale tribological performance of ILs when applied as a few nanometers-thick film on a substrate is a crucial step to understand how these novel materials can efficiently lubricate MEMS/NEMS devices. To this end, the adhesion, friction and wear properties of two ionic liquids, 1-butyl-3-methylimidazolium hexafluorophosphate (BMIM-PF6) and 1-butyl-3-methylimidazolium octyl sulfate (BMIM-OctSO4), applied on Si(100), are investigated for the first time using atomic force microscopy (AFM). Data is compared to the perfluoropolyether lubricant Z-TETRAOL, which has high thermal stability and extremely low vapor pressure. Wear at ultralow loads was simulated and the lubricant removal mechanism was investigated using AFM-based surface potential and contact resistance techniques. Thermally treated coatings containing a mobile lubricant fraction (i.e., partially bonded) were better able to protect the Si substrate from wear compared to the fully bonded coatings, and this enhanced protection is attributed to lubricant replenishment.     

Multi-layer microfluidic glass chips for microanalytical applications

A new, versatile architecture is presented for microfluidic devices made entirely from glass, for use with reagents which would prove highly corrosive for silicon. Chips consist of three layers of glass wafers bonded together by fusion bonding. On the inside wafer faces a network of microfluidic channels is created by photolithography and wet chemical etching. Low dead-volume fluidic connections between the layers are fabricated by spark-assisted etching (SAE), a computer numerical controlled (CNC)-like machining technique new to microfluidic system fabrication. This method is also used to form a vertical, long path-length, optical cuvette through the middle wafer for optical absorbance detection of low-concentration compounds. Advantages of this technique compared with other, more standard, methods are discussed. When the new glass-based device for flow-injection analysis of ammonia was compared with our first-generation chips based on silicon micromachining, concentration sensitivity was higher, because of the longer path-length of the optical cuvette. The dependence of dispersion on velocity profile and on channel cross-sectional geometry is discussed. The rapid implementation of the devices for an organic synthesis reaction, the Wittig reaction, is also briefly described.     

Low Temperature Bonding of Ceramics by Sol-Gel Processing

Sol-gel bonds were produced between smooth, clean silicon or polycrystalline alumina substrates by spin-coating solutions containing partially hydrolysed silicon alkoxides onto both substrates. The two coated substrates were assembled and the resulting sandwich was fired at temperatures ranging from 300 to 600°C. The influence of the sol-gel chemistry on the film microstructure and interfacial fracture energy was investigated using a wide range of techniques, including ellipsometry, FTIR, TG-DTA, rheology, TEM and micro-indentation. For silicon wafers, an optimum water-alkoxide molar ratio of 10 and hydrolysis water pH of 2 were found. Such conditions led to relatively dense films (>90%), resulting in bonds with significantly higher fracture energy (3.5 J/m²) than those obtained using classical water bonding (typically 1.5 J/m²). Aging of the coating solution was found to decrease the bond strength. Poly-crystalline alumina substrates were similarly bonded at 600°C; the optimised silica sol-gel chemistry yielded interfaces with fracture energy of 4 J/m².     

Influence of substrate chemistry and the network homogeneity of ultra‐thin cross‐linked polymer films cured at their surface on the main relaxations temperatures probing by microthermal analysis

Thin 200‐nm epoxy–amine mixtures were cured on silicon wafers with different surface chemistry to quantify the effect of the chemistry on the glass transition temperature evolution in ultra‐thin thermosetting films. Two surface treatments were investigated: the first one only consisted in the activation of the silanols groups at the silicon surface, whereas the second one consisted in the grafting 3‐aminopropyltrimethoxysilane (APTMS) monolayer on the silicon wafers. The epoxy films were deposited on these chemistry modified wafers by spin coating a toluene solution of DGEBA–amine mixture at stoichiometric ratio. The same cure processing was used for both samples. Thin films were analysed not only using microthermal and thermomechanical analysis to determine the relaxation transitions temperatures of these films but also using FTIR in infrared reflection absorption spectroscopy mode to determine the curing rate of these networks. It was found that all these thin films showed two different glass transitions, the first one at 96 °C and was independent of the surface treatments, whereas the second one increasing from 142 °C for the oxidised wafers surface to 167 °C for the aminosilane grafted on the silicon wafer. The substrate chemistry extent on the film network structure, the interfacial bonds and interactions are discussed. This work also illustrates the interest in using microthermal analysis to obtain relevant temperature glass transition of thin film at sub‐micrometre scale, strongly dependant of local structure and chemistry composition. Copyright © 2009 John Wiley & Sons, Ltd.     

Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force-distance curve measurements

The work presents a comprehensive package of novel nanoscale characterization techniques to study dielectric charging in electrostatic nano- and microelectromechanical systems (NEMS and MEMS). The proposed assessment methodologies are based on the force-distance curve (FDC) measurements performed using an atomic force microscope (AFM) to measure, for the first time, the induced surface potential and adhesive force over charged dielectric films. They were employed to study plasma enhanced chemical vapor deposition (PECVD) silicon nitride films for application in electrostatic capacitive RF MEMS switches. Three different techniques were introduced including the application of FDC measurements to study charging in bare SiN(x) films, metal-insulator-metal (MIM) capacitors, and MEMS switches. The results from the three methods were correlated and compared with the published data from other characterization techniques, mainly charge/discharge current transient (C/DCT) and Kelvin probe force microscopy (KPFM). The unique advantages of the proposed FDC-based characterization techniques are twofold. First, they can measure the multiphysics coupling between the dielectric charging phenomenon and tribological issues at the interface between the switch bridge and the dielectric surface. Second, the FDC-based techniques can measure larger levels of induced surface potential over charged dielectric films which results from the high electric field normally used to actuate MEMS switches. Based on the proposed FDC techniques, the influence of several parameters on dielectric charging/discharging processes was investigated: the dielectric film thickness, deposition conditions, substrate, and electrical stress conditions.     

Monolayer-derivative functionalization of non-oxidized silicon surfaces

This article describes a variety of monolayers anchored directly onto silicon surfaces without an oxide interlayer, their formation mechanisms, their technological applications, and our personal views on the future prospects for this field. The chemical modification of non-oxidized silicon surfaces utilizing monolayers was first reported in 1993. The basic finding that a non-oxidized silicon surface could be neutralized with alkyl chains through direct covalent linkage, i.e., silicon-carbon, has offered chemical scientists ease of handling even in an ambient environment and, thus, research has been predictably focused on forming anti-stiction coating films for nano- and micro-electromechanical systems (NEMS/MEMS). Such surface reforming has also been achieved by using other monolayers, which form interfacial bonds, e.g., silicon-nitrogen and silicon-oxygen. The resultant monolayer surfaces are useful for silicon-based applications including molecular electron transfer films, monolayer templates, molecular insulators, capsulators, and bioderivatives. Such monolayers are applicable not only for surface modification, but also for manipulating individual nanomaterials. By modifying the terminal groups of monolayers with nanomaterials including nanocrystals and biomolecules, the nanomaterials can remarkably be immobilized directly onto non-oxidized silicon surfaces based on the formation mechanisms of the monolayer. Such immobilizations will revolutionize the analysis of the specific features and capabilities of individual nanomaterials. Furthermore, the path will be opened for the development of more advanced monolayer-derived chip technology. To achieve this goal, it is extremely important to thoroughly understand the functionalization processes on silicon, since the resultant internal structures and properties of monolayer-derivative silicon may strongly depend on their course of formation.     

Integrated liquid chromatography-heated nebulizer microchip for mass spectrometry

A new integrated microchip for liquid chromatography-mass spectrometry (LC-MS) is presented. The chip is made from bonded silicon and glass wafers with structures for a packed LC column channel, a micropillar frit, a channel for optional optical detection, and a heated vaporizer section etched in silicon and platinum heater elements on the glass cover. LC eluent is vaporized and mixed with nebulizer gas in the vaporizer section and the vapor is sprayed out from the chip. Nonpolar and polar analytes can be efficiently ionized in the gas phase by atmospheric pressure photoionization (APPI) as demonstrated with polycyclic aromatic hydrocarbons (PAHs) and selective androgen receptor modulators (SARMs). This is not achievable with present LC-MS chips, since they are based on electrospray ionization, which is not able to ionize nonpolar compounds efficiently. The preliminary quantitative performance of the new chip was evaluated in terms of limit of detection (down to 5 ng mL⁻¹), linearity (r > 0.999), and repeatability of signal response (RSD = 2.6-4.0%) and retention time (RSD = 0.3-0.5%) using APPI for ionization and PAHs as standard compounds. Determination of fluorescent compounds is demonstrated by using laser-induced fluorescence (LIF) for detection in the optical detection channel before the vaporizer section.     

Low Temperature Bonding of Ceramics by Sol-Gel Processing

Silicon, sapphire and polycrystalline wafers have been bonded using a sol-gel process involving spin-coating solutions containing partially hydrolysed silicon or modified aluminium alkoxides. The two coated-substrates were assembled and the resulting sandwich was fired at temperatures ranging from 60 to 600°C. The sol-gel coatings were characterised using ellipsometry and AFM, while the corresponding bonded specimens were investigated using cross-sectional TEM. Their mechanical properties were characterised using both micro-indentation and tensile testing.Bond strengths of 0.8 MPa were achieved at 60°C between silicon wafers using a methacrylate/alumina hybrid system. The strength was increased to 1.3 MPa by using a nano-particulate sol, produced by hydrolysis of Al(O^sC₄H₉)₃ modified with ethylacetoacetate, and firing at 600°C. However, significantly lower bond strengths were achieved with sapphire and polycrystalline alumina substrates (0.4 and 0.1 MPa, respectively). The effect of precursor chemistry on the bonds produced is discussed.     

Functionalized imidazolium wear‐resistant ionic liquid ultrathin films for MEMS/NEMS applications

As a kind of new material, ionic liquids (ILs) are considered a new type of lubricant for micro/nanoelectromechanical system (M/NEMS) due to their excellent thermal and electrical conductivity. However, so far, only a few reports have investigated the friction and wear of thin films of these materials at the micro scale. Evaluating the nanoscale tribological performance of ILs when applied as films of a few nanometers thickness on a substrate is a critical step for their application in M/NEMS devices. To achieve this purpose, IL thin films with four kinds of anions were synthesized and prepared on single‐crystal silicon wafers by the dip‐coating method. Film thickness was determined by the ellipsometric method. Their surface morphologies were observed by means of atomic force microscopy (AFM). The nano and micro tribological properties of the IL films were investigated by a friction force microscope (FFM)with a spherical probe and a UMT‐2MT tribotester, respectively. The corresponding morphologies of the wear tracks of the IL films were examined using a three‐dimensional non‐contact interferometric microscope. The impact of temperature on the adhesion behavior was studied, as well as the effect of sliding frequency and load on the friction coefficient, load bearing capacity and anti‐wear durability. It was found that friction, adhesion and durability of IL films were strongly dependent on their anionic molecular structures, wettability and ambient environment. Copyright © 2010 John Wiley & Sons, Ltd.     

Gluing Langmuir-Blodgett monolayers onto hydrocarbon surfaces

This paper describes a new approach for modifying hydrophobic surfaces that is based on the use of ionically cross-linked (i.e., "glued") Langmuir-Blodgett monolayers. Specifically, this work shows how monolayers of 5,11,17,23,29,35-hexa(trimethylammonium methyl)-37,38,39,40,41,42-hexakis-n-hexadecyloxy-calix[6]arene (1a), which have been ionically cross-linked with poly(4-styrene-sulfonate) (PSS, MW 30,000-50,000), can be deposited onto silylated silicon wafers with their polar headgroups extending outward into air. This work also demonstrates the feasibility of using glued monolayers of 1a as "anchors" for attaching alternating layers of poly(diallyldimethylammonium) [PDADMA] and PSS ions onto these same hydrocarbon surfaces.     

Polymer microfabrication methods for microfluidic analytical applications

A growing number of microsystem technology (MST) applications, particularly in the field of microfluidics with its applications in the life sciences, have a need for novel fabrication methods which account for substrates other than silicon or glass. We present in this paper an overview of existing polymer microfabrication technologies for microfluidic applications, namely replication methods such as hot embossing, injection molding and casting, and the technologies necessary to fabricate the molding masters. In addition, techniques such as laser ablation and layering techniques are examined. Methods for bonding and dicing of polymer materials, which are necessary for complete systems, are evaluated.     

Characterization of silicon wafers through deposition of self-assembled monolayers

AFM imaging of the adsorption of self-assembled octadecylsiloxane (ODS) monolayers has been utilized for probing surface properties of silicon wafers. It has been found that both growth rate of the organic films and island size of sub-monolayer films are influenced by the doping level of the wafers as well as by the surface finishing step during wafer production. Generally, higher doping levels led to lower adsorption rates and smaller islands. Variation of the sample pretreatment used for surface finishing of similarly doped wafers led only to significant changes of the island size, but not of the surface coverage. The results presented open up a valuable perspective for characterizing the surface homogeneity of silicon wafers which is an important parameter for monitoring-wafers in semiconductor industry. Received: 26 June 2000 / Revised: 26 July 2000 / Accepted: 1 August 2000     

Characterization of silicon wafers through deposition of self-assembled monolayers

AFM imaging of the adsorption of self-assembled octadecylsiloxane (ODS) monolayers has been utilized for probing surface properties of silicon wafers. It has been found that both growth rate of the organic films and island size of sub-monolayer films are influenced by the doping level of the wafers as well as by the surface finishing step during wafer production. Generally, higher doping levels led to lower adsorption rates and smaller islands. Variation of the sample pretreatment used for surface finishing of similarly doped wafers led only to significant changes of the island size, but not of the surface coverage. The results presented open up a valuable perspective for characterizing the surface homogeneity of silicon wafers which is an important parameter for monitoring-wafers in semiconductor industry. Received: 26 June 2000 / Revised: 26 July 2000 / Accepted: 1 August 2000     

Synthesis of dendron-protected porphyrin wires and preparation of a one-dimensional assembly of gold nanoparticles chemically linked to the pi-conjugated wires

A one-dimensional assembly of gold nanoparticles chemically bonded to pi-conjugated porphyrin polymers was prepared on a chemically modified glass surface and on an undoped naturally oxidized silicon surface by the following methods: pi-conjugated porphyrin polymers were prepared by oxidative coupling of 5,15-diethynyl-10,20-bis-((4-dendron)phenyl) porphyrin (6), and its homologues (larger than 40-mer) were collected by analytical gel permeation chromatography (GPC). The porphyrin polymers (>40-mer) were deposited using the Langmuir-Blodgett (LB) method on substrate surfaces, which were then soaked in a solution of gold nanoparticles (2.7 +/- 0.8 nm) protected with t-dodecanethiol and 4-pyridineethanethiol. The topographical images of the surface observed by tapping mode atomic force microscopy (AFM) showed that the polymers could be dispersed on both substrates, with a height of 2.8 +/- 0.5 nm on the modified glass and 3.1 +/- 0.5 nm on silicon. The height clearly increased after soaking in the gold nanoparticle solution, to 5.3 +/- 0.5 nm on glass and 5.4 +/- 0.7 nm on silicon. The differences in height (2.5 nm on glass and 2.3 nm on silicon) corresponded to the diameter of the gold nanoparticles bonded to the porphyrin polymers. The distance between gold nanoparticles observed in scanning electron microscopic images was ca. 5 nm, indicating that they were bonded at every four or five porphyrin units.     

Active particle control through silicon using conventional optical trapping techniques

Functional integration of optical trapping techniques with silicon surfaces and environments can be realized with minimal modification of conventional optical trapping instruments offering a method to manipulate, track and position cells or non-biological particles over silicon substrates. This technique supports control and measurement advances including the optical control of silicon-based microfluidic devices and precision single molecule measurement of biological interactions at the semiconductor interface. Using a trapping laser in the near infra-red and a reflective imaging arrangement enables object control and measurement capabilities comparable to trapping through a classical glass substrate. The transmission efficiency of the silicon substrate affords the only reduction in trap stiffness. We implement conventional trap calibration, positioning, and object tracking over silicon surfaces. We demonstrate control of multiple objects including cells and complex non-spherical objects on silicon wafers and fabricated surfaces.     

Glass microfabricated nebulizer chip for mass spectrometry

A microfluidic nebulizer chip for mass spectrometry is presented. It is an all-glass device which consists of fusion bonded Pyrex wafers with embedded flow channels and a nozzle at the chip edge. A platinum heater is located on the wafer backside. Fabrication of the chip is detailed, especially glass deep etching, wafer bonding, and metal patterning. Various process combinations of bonding and metallization have been considered (anodic bonding vs. fusion bonding; heater inside/outside channel; metallization before/after bonding; platinum lift-off vs. etching). The chip vaporizes the liquid sample (0.1-10 microL min(-1)) and mixes it with a nebulizer gas (ca. 100 sccm N2). Operating temperatures can go up to 500 degrees C ensuring efficient vaporization. Thermal insulation of the glass ensures low temperatures at the far end of the chip, enabling easy interconnections.     

Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry

A miniaturized nebulizer chip for capillary liquid chromatography-atmospheric pressure chemical ionization-mass spectrometry (capillary LC-microchip APCI-MS) is presented. The APCI chip consists of two wafers, a silicon wafer and a Pyrex glass wafer. The silicon wafer has a DRIE etched through-wafer nebulizer gas inlet, an edge capillary insertion channel, a stopper, a vaporizer channel and a nozzle. The platinum heater electrode and pads for electrical connection were patterned on to the Pyrex glass wafer. The two wafers were joined by anodic bonding, creating a microchip version of an APCI-source. The sample inlet capillary from an LC column is directly connected to the vaporizer channel of the APCI chip. The etched nozzle in the microchip forms a narrow sample plume, which is ionized by an external corona needle, and the formed ions are analyzed by a mass spectrometer. The nebulizer chip enables for the first time the use of low flow rate separation techniques with APCI-MS. The performance of capillary LC-microchip APCI-MS was tested with selected neurosteroids. The capillary LC-microchip APCI-MS provides quantitative repeatability and good linearity. The limits of detection (LOD) with a signal-to-noise ratio (S/N) of 3 in MS/MS mode for the selected neurosteroids were 20-1000 fmol (10-500 nmol l(-1)). LODs (S/N = 3) with commercial macro APCI with the same compounds using the same MS were about 10 times higher. Fast heat transfer allows the use of the optimized temperature for each compound during an LC run. The microchip APCI-source provides a convenient and easy method to combine capillary LC to any API-MS equipped with an APCI source. The advantages and potentials of the microchip APCI also make it a very attractive interface in microfluidic APCI-MS.     

One-step coating of fluoro-containing silica nanoparticles for universal generation of surface superhydrophobicity

Stable superhydrophobic surfaces with water contact angles over 170 degrees and sliding angles below 7 degrees were produced by simply coating a particulate silica sol solution of co-hydrolysed TEOS/fluorinated alkyl silane with NH(3).H(2)O on various substrates, including textile fabrics (e.g. polyester, wool and cotton), electrospun nanofibre mats, filter papers, glass slides, and silicon wafers.     

Automated MEMS-based Drosophila embryo injection system for high-throughput RNAi screens

We have developed an automated system based on microelectromechanical systems (MEMS) injectors for reliable mass-injection of Drosophila embryos. Targeted applications are high-throughput RNA interference (RNAi) screens. Our injection needles are made of silicon nitride. The liquid to be injected is stored in an integrated 500 nl reservoir, and an externally applied air pressure pulse precisely controls the injected volume. A steady-state water flow rate per applied pressure of 1.2 nl s(-1) bar(-1) was measured for a needle with channel width, height and length of 6.1 microm, 2.3 microm and 350 microm, respectively. A typical volume of 60 pl per embryo can be reliably and rapidly delivered within tens of milliseconds. Theoretical predictions of flow rates match measured values within +/-10%. Embryos are attached to a glass slide surface and covered with oil. Packages with the injector chip and the embryo slide are mounted on motorized xyz-stages. Two cameras allow the user to quickly align the needle tip to alignment marks on the glass slide. Our system then automatically screens the glass slide for embryos and reliably detects and injects more than 98% of all embryos. Survival rates after deionized (DI) water injection of 80% and higher were achieved. A first RNAi experiment was successfully performed with double-stranded RNA (dsRNA) corresponding to the segment polarity gene armadillo at a concentration of 0.01 microM. Almost 80% of the injected embryos expressed an expected strong loss-of-function phenotype. Our system can replace current manual injection technologies and will support systematic identification of Drosophila gene functions.