Shifted-phase calibration for a 3-D shape measurement system based on orthogonal composite grating projection

This paper proposes a novel method for reducing measurement error caused by spectrum overlapping in orthogonal-composite-grating-based 3-D measurement method. For 3-D measurement systems based on orthogonal composite grating projection, spectrum overlapping causes phase of each deformed phase-shifting fringe changed differently, which violates the principle that the shifted phases between adjacent deformed fringes must be equivalent to 2π/3, and therefore results in phase measurement error. The proposed shifted-phase calibration method is based on that phase variation of each deformed fringe is independent of height and reflectivity of the measured object. Three composite gratings are projected on the reference plane, and each carrier channel includes three phase-shifting gratings needed in phase measuring profilometry (PMP). Because the adjacent phase-shifting fringes demodulated from the same carrier channel have the phase difference of 2π/3, we can respectively calculate the reference plane's phases of three carrier channels by the phase algorithm of PMP method, and the shifted phases between them are obtained. When an object is measured, the shifted phases between deformed phase-shifting fringes can be calibrated. A new 3-D measurement mathematical model is set to reconstruct object. Our experiments prove that the proposed method can effectively restrain the effect of spectrum overlapping and improve measurement accuracy almost one times.     

Phase deviation analysis and phase retrieval for partial intensity saturation in phase-shifting projected fringe profilometry

Intensity saturation may take place as a sinusoidal fringe pattern is projected onto an object which has a relative high reflective index on some regions of the surface. If a phase-shifting method is used, the illuming light intensities at the same point of the object may have different values for each projected phase-shifting fringe pattern. Therefore, when the intensity at a point of the object exceeds the saturation level for a certain phase step of projected fringe pattern, other intensities obtained at the same point with different phase steps of projected fringe patterns do not exceed the saturation level. This kind of saturation is defined as partial intensity saturation. In the case of partial intensity saturation, a relative larger phase error is introduced when a conventional phase reconstruction algorithm is used in the phase-shifting projected fringe profilometry (PSPFP). To get rid of such disadvantage, an improved algorithm for phase reconstruction is proposed in this paper. By using the new algorithm, the effect of partial intensity saturation for the phase reconstruction can be decreased greatly and a good quality of reconstructed phase map can be obtained. Phase deviation of the reconstructed phase is also analyzed. Finally, an experimental result with PSPFP is presented to validate the feasibility of the proposed algorithm.     

相移相位测量的全息再现算法及测量误差分析

用全息原理和方法研究相移相位测量,得到了N步整周期相移再现物光波复振幅同步叠加函数(N步相移函数),同时提出一种新的相移相位测量误差分析和最大误差估计方法。N步相移干涉图是以理想平行光为参考光的无衍射同轴全息图,将其与对应的相移参考光相乘后求和得到N步相移函数;在理想情况下,这是一种复振幅分离、测量和物光波复振幅函数同步叠加方法,存在误差时计算出的相位是最小二乘方法的最佳期望结果。利用N步相移函数得到的N 1步相移函数,说明非理想N步相移函数是理想N步相移函数与误差函数之和,可以把相位型误差转化为与振幅和强度相对误差同等的误差来对待,降低了相位测量中误差估计的难度,给出了N步相移算法最大误差的估计方法和公式。     

相位拼接技术在数字全息中的应用

在确保较高分辩率的前提下,提出了一种相位拼接技术以解决数字全息技术中扩大测量面积的瓶颈问题.在全息数字图记录过程中,确保相邻子孔径间具有重叠区域|拼接中采用相关算法确定重叠区域,并利用再现像重叠区域具有相同信息的特点使用最小二乘方法消除由于孔径的移动所产生的倾斜误差| 相关计算和最小二乘反复迭代把相邻再现像精确统一到一个坐标系下,从而实现测量面积的扩展.以平面物体的测量为例建立了数字全息相位拼接技术的理论模型,完成了对相位物体的2×2拼接模拟,并在对标准相位板2×2的拼接实验中获得了较好的拼接效果.     

结构光测量中的高精度相位误差补偿算法

在模拟分析投影仪伽马非线性对相位误差影响的基础上,提出一种直接分析投影光栅特征并建立相位误差查找表的算法.对相位误差进行补偿.该算法通过分析一组投射到标准白色平板上的光栅图像,确定光栅相位值与相位误差的对应关系,并量化存储在一个查找表中,测量过程中使用查找表对相位误差进行补偿.实验结果表明.该方法可大大降低由投影仪伽马非线性引起的相位误差,系统测量精度达到0.043 mm,比误差补偿前提高了5.6倍.     

一种适用于大测绘带合成孔径声呐的运动补偿方法

当合成孔径声呐测绘带较大时,运动误差的空变效应严重,经典的相位中心重叠算法难以适用。为此,提出了一种适用于大测绘带合成孔径声呐的运动补偿方法。首先使用混合调制的拉格朗日时延估计算法对前后两帧回波的时延进行估计,之后使用线性回归方法拟合出运动误差,最后利用运动误差的估计值对回波进行逐点精确补偿。仿真数据的结果表明,该算法能够获得比相位中心重叠算法更好的运动估计结果,运动补偿后成像分辨率接近理论分辨率。使用该算法分别对高、低频合成孔径声呐的湖试数据进行了处理,水下地貌和小目标的成像质量均有明显提高。      

Phase-unwrapping algorithm in the presence of discontinuities using a system with crossed grating

A new phase-unwrapping algorithm for the phase map containing discontinuities by the use of a system with crossed grating is described in this paper. A crossed grating is projected onto the object in the usual way, the deformed grating image acquired is Fourier transformed and the frequency spectra for the individual gratings are separated. Using both phase distributions which have different sensitivities, the correct phase values in the presence of discontinuities, especially those caused by the object with height steps, can be obtained. This algorithm is fast and accurate. The results of the measurement of a three-dimensional object with height steps are presented.     

相移阴影莫尔条纹正交化解调技术

提出一种基于克莱姆正则化分析法的三帧自标定相移阴影莫尔三维轮廓技术.该技术首先采用移动光栅的方法获得相移条纹图,然后通过不同帧相移条纹图相减去除条纹图背景,进而结合克莱姆正交化法和最小二乘法,发展了一种相位解调方法,提取了测量相位.以五步Harlharan算法为参考,用不同算法对同一物体表面进行测量.结果表明,相对于典型的三步相移法和主量分析方法,提出的方法测量得到的相位误差最小(0.5rad),且简化了测量过程.     

High Flattened Comb Filter with Precise Channel Spacing Based on Linearly Chirped Fiber Bragg Grating and Phase Compensation

Abstract

A novel approach to implement high flattened comb filters with precise channel spacing based on DC phase compensation is proposed. Channel wavelength error and peak reflectivity variation are discussed and calculated. A phase compensation method by simply changing the DC refractive index is proposed. Fiber Bragg gratings with different DC phase shifts are fabricated, which indicates that an arbitrary DC phase shift can be introduced precisely. A high flattened comb filter with precise 50-GHz channel spacing is realized with the help of a micrometer-precision translation stage. Then the peak reflectivity variation with and without phase compensation for different chirp coefficients is researched.     

太赫兹逆合成孔径雷达相位误差分析和补偿方法

通过对太赫兹逆合成孔径雷达(THz-ISAR)成像原理进行分析,构造目标回波距离维相位误差的多项式表示形式,提出了基于启发式最小熵搜索的二次相位误差校正方法和基于距离维自聚焦的三次及三次以上相位误差校正方法,校正了THz-ISAR回波信号距离维的相位误差,进而消除THz-ISAR一维距离像和二维成像结果中的散焦和展宽现象。理论分析和仿真实验结果都表明该方法能够有效补偿目标回波距离维相位误差,提高一维距离像和二维成像的聚焦效果。     

Transmission measurement of three-dimension profile based on infrared-light interference technology with wafer compensation

A new method of three-dimension profile measurement is proposed based on infrared-light interference technology, which is extended from visible-light region to infrared-light region for white-light scanning interferometry. Microstructure with two steps of different heights is used to be demonstrative sample to prove the property of designed system based on linnik-type interferometric microscope with phase-stepping algorithm. Three-dimension profile and step height can be obtained accurately with GaAs wafer transmission compensation and are highly consistent with the results that obtained from the famous commercial instrument MSA 400. The novel method has widely potential applications in the field of MEMS, such as reconstructing the internal profile of encapsulation devices and analyzing the quality evaluation of bonding interface based on semiconductor materials.     

Compensation of phase change on reflection in white-light interferometry for step height measurement

We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to +/-5 nm or less.     

抑制相位测量轮廓术饱和误差相位融合算法

在相位测量轮廓术中,由于被测物体表面反射率过大,导致照相机捕获的图像中部分像素点强度值超过照相机的最大量化值,即光强度饱和。分析了光强度饱和引起的相位误差,提出一种相位融合算法。该算法通过查找归一化后的最大调制强度,提取其对应的相位,并将该相位作为三维重建的最终相位。实验结果表明,在理想情况及测量系统存在Gamma畸变时该算法均能有效地修复饱和误差。当测量系统存在Gamma畸变时,校正后相位误差均方根值相对于传统技术减小了58.86%。     

调制度测量轮廓术的系统标定

调制度测量轮廓术是一种采用垂直测量方式的三维面形测量方法,可以测量表面有剧烈变化区域的复杂物体。提出了一种基于调制度测量轮廓术测量系统的标定方法,其纵向标定是利用几个相互平行的标定平面建立与CCD像面各像素点对应的测量高度与实际高度之间的映射关系,并利用映射关系确定每一像素点对应的映射关系系数,然后建立映射关系系数查找表,存人测量系统中,完成纵向标定。首先分析了测量系统的误差来源,然后给出了标定方法和标定过程,最后给出了实测结果。结果表明,利用提出的系统标定方法可以有效消除调制度测量轮廓术测量系统误差,显著地提高了系统测量精度。     

相位拼接技术在数字全息中的应用

在确保较高分辩率的前提下,提出了一种相位拼接技术以解决数字全息技术中扩大测量面积的瓶颈问题.在全息数字图记录过程中,确保相邻子孔径间具有重叠区域;拼接中采用相关算法确定重叠区域,并利用再现像重叠区域具有相同信息的特点使用最小二乘方法消除由于孔径的移动所产生的倾斜误差;相关计算和最小二乘反复迭代把相邻再现像精确统一到一个坐标系下,从而实现测量面积的扩展.以平面物体的测量为例建立了数字全息相位拼接技术的理论模型,完成了对相位物体的2×2拼接模拟,并在对标准相位板2×2的拼接实验中获得了较好的拼接效果.     

脉冲压缩与互相关联合的合成孔径声呐回波时延补偿

针对合成孔径声呐中阵元相位不一致导致互相关时延补偿算法对成像质量提升效果有限的问题,提出了一种脉冲压缩与互相关联合的回波时延补偿算法.该算法利用脉冲压缩回波的互相关对原始回波相位畸变进行校正,实现粗补偿;联合脉冲压缩与偏移相位中心算法实现精细时延补偿,对不同合成孔径位置各阵元回波时延差实现了较为准确的估计,增强了成像效果。试验数据经该算法处理后,回波时延得到较为精确的补偿,地貌成像结果的亮度、对比度等统计特性得到不同程度的提高,且纹理细节增多;典型线缆目标的成像聚焦加深,成像长度误差约由5%减小为0.8%。试验结果显示,该算法对互相关时延补偿方法改进效果明显,验证了算法的可行性、有效性。      

基于多时相TanDEM-X极化干涉SAR数据的水稻株高反演

水稻株高是水稻本身以及土壤、水文、气象等因素的综合反映,是水稻长势监测的重要指标。准确、高效、大范围的株高反演为水稻品种识别、物候监测、病虫害评估和产量预测等提供了可靠的依据。合成孔径雷达(SAR),具有全天时、全天候、穿透性的优势,成为水稻株高反演的重要手段之一。基于极化干涉测量(PolInSAR)的散射模型的反演算法具有严密的物理模型的支撑及较高的反演精度等特点,成为植被高度反演研究的热点。结合极化干涉SAR技术,构建了一种基于RVoG(Random Volume over Ground)模型的水稻株高反演算法,并利用2015年水稻生长季内9个时相的TanDEM-X极化干涉SAR数据,进行了水稻株高反演试验。首先基于每个时相下的极化干涉SAR数据分别得到8个复相干系数,利用这8个复相干系数在考虑卫星双站模式等情况下进行去相干处理,然后建立适用于水稻田特性的RVoG模型,接着构建基于该模型的水稻株高反演迭代算法,最后对9个时相下的TanDEM-X数据进行研究区的水稻株高反演及精度评定。结果表明,当水稻株高高于0.4m时,该方法的反演结果较好,决定系数(R^2)为0.86,均方根误差RMSE为6.79 cm;当水稻株高较低时(水稻株高小于0.4 m),反演误差在0.1~0.8 m之间,反演结果较差,被明显高估。通过分析认为,基于极化干涉理论,TanDEM-X数据在较好地反映出水稻植株的较大体散射量的前提下,利用所构建的基于RVOG模型的水稻株高反演算法,能够较好地反演株高在0.33~1.2 m的水稻株高。     

基于相位相关的亚像素配准技术及其在电子稳像中的应用

介绍一种基于相位相关的图像配准方法,并将该方法应用于序列图像的运动检测,通过运动补偿,实现了序列图像的稳定输出。采用相位相关配准方法对序列图像进行亚像素精度配准,运用基于最小二乘的曲面拟合法,估计当前图像相对参考图像的亚像素级的平移量。在补偿图像运动时,为保证亚像素级的补偿精度,采用平滑算法,避免在图像补偿时出现马赛克现象。最后,对样本图像进行了亚像素级位移配准和图像补偿对比实验。实验结果表明,提出的方法可以检测到0．01pixel的运动量,最大配准误差为0．008pixel;采用亚像素级运动量补偿图像,最大误差〈0．5。     

Novel iteration-free blind phase noise estimation for coherent optical OFDM

We propose a novel iteration-free blind phase noise estimation scheme for coherent optical orthogonal frequency division multiplexing （CO-OFDM） systems. In the new algorithm, the cost function is selected as the similar expression with real and imaginary parts as that in the modified constant modulus algorithm, and the new cost function is derived under some assumptions, where it is infinitely approximated by the sine and cosine functions. By means of the analytical formula of the cost function, the initial coarse common phase error can be obtained with only some samples, where the algorithm avoids computational complexity of conventional blind phase noise compensation scheme. In CO-OFDM systems with high-order modulation format （32 quadrature amplitude modulation） and narrow linewidth lasers, it is proved by the simulation results that the nhase noise can be effectively compensated with the proposed blind estimation method.     

光学系统实现热补偿的通用条件

运用光学系统的近轴成像公式，推导出微分形式的物面位于任意位置时热补偿的通用条件，包括薄单透镜、密接薄透镜组和分离薄透镜组等不同情况。推导过程中假设物面位置不随温度发生变化，并且忽略分离薄透镜组中各组分上光线入射高度随温度的变化。利用推导的条件建立了像距的归一化温度变化率与各透镜光热膨胀系数之间的关系，指出所得到的条件具有更加普遍的意义，能够指导机械和伺服控制系统的工程设计，并且在物面位于无穷远时与目前普遍采用的热补偿条件相吻合，即光学系统的光热膨胀系数等于壳体的热膨胀系数。