Improved thermal model and its application in UV high-power pulsed laser ablation of metal target

An improved thermal model describing UV high-power nanosecond laser ablation of metal target is presented. The vaporization effect, the plasma shielding effect, as well as the absorption coefficient and absorptivity dependence of temperature are considered in this model. Take iron target as an example, the numerical solutions are obtained from the heat flow equations (before and after melting) using a finite difference method. The space and time dependence of temperature of the target, the time dependence of temperature at two different positions for a certain laser fluence, and the ablation rate as a function of laser fluence are also presented. The numerical results that agreed well with the experimental data are much better than the one without, which indicates that the above two effects and the temperature dependence of absorption coefficient and absorptivity in UV high-power laser ablation of metal target should not be neglected. We hope the present model will be useful for further experimental investigation of metal thin films prepared by pulsed laser deposition.     

飞秒激光烧蚀金属靶的冲击温度

在明确飞秒激光与物质相互作用过程冲击温度概念的基础上, 讨论了飞秒激光烧蚀铝靶和铜靶过程中的冲击温度与其他物理量的关系, 利用飞秒激光烧蚀金属的双温模型提取了冲击温度的绝对值, 基于非傅里叶热传导模型计算了冲击温度的分布. 此项研究结果对飞秒激光安全加工含能材料有借鉴意义. 关键词： 飞秒激光 含能材料 烧蚀 冲击温度     

基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.     

纳秒脉冲激光沉积薄膜过程中的烧蚀特性研究

研究了高能短脉冲激光薄膜制备的整个烧蚀过程.首先建立了基于超热理论的烧蚀模型，然 后利用较为符合实际的高斯分布表示脉冲激光输入能量密度，给出了考虑蒸发效应不同阶段 的烧蚀状态方程.结合适当的边界条件，以Si靶材为例，利用有限差分法得到了靶材在各个 阶段温度随时间和烧蚀深度的演化分布规律及表面蒸发速度与烧蚀深度在不同激光辐照强度 下随时间的演化规律.结果表明，在脉冲激光辐照阶段，靶材表面的蒸发效应使得靶材表面 温度上升显著放缓；在激光辐照强度接近相爆炸能量阈值时，蒸发速度与蒸发厚度的变化由 于逆流现象将显著放缓.还得到了考虑了熔融弛豫时间及蒸发效应的固-液界面随时间的演化 方程，这一结论较先前工作更具有普适性. 关键词： 脉冲激光烧蚀 热流方程 温度演化 有限差分法     

Vaporization and Plasma Shielding during High Power Nanosecond Laser Ablation of Silicon and Nickel

A thermal model to describe the high-power nanosecond pulsed laser ablation is presented. It involves the vaporization and the following plasma shielding effect on the whole ablation process. As an example of Si target, we obtainthe time evolution of the calculated surface temperature, ablation rate and ablation depth. It can be seen that plasma shielding plays a more important role in the ablation process with time. At the same time, the ablation depth with laser fluence based on different models is shown. Moreover, we simulate the pulsed laser irradiation Ni target. The evolution of the transmitted intensity and the variation of ablation depth per pulse with laser fluence are performed. Under the same experimental conditions, the numerical results calculated with our thermal model are more in agreement with the experimental data.     

A simplified predictive model for high-fluence ultra-short pulsed laser ablation of semiconductors and dielectrics

Ultra-short pulsed laser ablation is a very complicated process and a predictive model is very desirable for process design and optimization in practical applications. However, the molecular dynamics or hydrodynamic models, although they are powerful and necessary tools for the study of the fundamental physics, are time-consuming and difficult to apply for practical applications. In this paper, a predictive, simplified and easy to apply model has been developed for high-fluence ultra-short laser ablation of semiconductors and dielectrics. Unlike many other simplified models, this model does not involve any free adjustable variables. The model predictions agree well with experimental measurements for femtosecond laser ablation, while the model is not very applicable for pulse durations more than ∼10 ps.     

飞秒激光脉冲与金属光阴极相互作用

本文从理论上分析了飞秒激光与光阴极相互作用过程，采用双温模型分析了飞秒激光脉冲辐照下金属薄膜的温度效应。通过建立一个简单的光电效应模型，获得了最佳的金属光阴极厚度，通过该模型可以发现，产生的光电流对在飞秒激光脉冲辐照下的电子温度和晶格温度有着很大的依赖关系。     

Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation

We report time-resolved studies using femtosecond laser pulses, accompanied by model calculations, that illuminate the difference in the dynamics of ultrashort pulsed laser ablation of different materials. Dielectrics are strongly charged at the surface on the femtosecond time scale and undergo an impulsive Coulomb explosion. This is not seen from metals and semiconductors where the surface charge is effectively quenched.     

Femtosecond pulsed laser ablation deposition of tantalum carbide

In this work a frequency-doubled Nd:glass laser with a pulse duration of 250 fs has been used to ablate a TaC target and to deposit thin films on silicon. The results have been compared with those previously obtained by nanosecond pulsed laser deposition and evidence of large differences in the plasma characteristics has been revealed. In particular, in the femtosecond and nanosecond plumes the energy and the velocity of neutral and ionized particles are very different. The features of femtosecond ablation include the delayed emission from the target of large and slow particles. The characteristics of the femtosecond plasma are clearly related to the morphology and composition of the deposited films and the results show a nanostructure consisting of a large number of spherical particles, with a mean diameter of about 50 nm, with a stoichiometry corresponding to Ta₂C. To explain these features, an ablation-deposition mechanism, related to the ejection of hot particles from the target, is proposed.     

A comparative study of gadolinium gallium garnet growth by femtosecond and nanosecond pulsed laser deposition

The growth of epitaxial Nd:Gd₃Ga₅O₁₂ (GGG) on Y₃Al₅O₁₂ (YAG) by femtosecond pulsed laser deposition is reported. We have used a Ti:sapphire laser at a wavelength of 800 nm and pulse length of 130 fs, operating at a repetition rate of 1 kHz. The film properties have been studied systematically as a function of the deposition parameters of laser fluence, spot-size, oxygen pressure, target-substrate distance and temperature. Scanning electron microscopy, atomic force microscopy and X-ray diffractometry were used to characterise the surface structure and crystallinity of the films. X-ray diffraction analysis shows that epitaxial growth has occurred. A comparison between the ion velocities produced by nanosecond and femtosecond laser ablation of the GGG target material has been investigated by the Langmuir probe technique. The results indicate a large difference in the plasma characteristics between femtosecond and nanosecond ablation, with ion velocities up to eight times faster observed in the femtosecond case.     

飞秒激光烧蚀固体靶的冲击压强

在明确飞秒激光与物质相互作用过程中冲击压强和冲击温度概念的基础上, 讨论了飞秒激光烧蚀铝、铜、硅三种固体靶过程中的冲击压强与其他物理量的关系, 利用飞秒激光烧蚀固体靶的时间分辨泵浦探测阴影图提取了冲击压强的绝对值. 此项研究结果对飞秒激光安全加工含能材料以及飞秒激光推进技术有重要意义. 关键词： 飞秒激光 含能材料 冲击压强 冲击温度     

Thermal analysis of intense femtosecond laser ablation of aluminum

This paper numerically simulates the process of ablation of an aluminum target by an intense femtosecond laser with a fluence of 40 J/cm 2 based on the two-temperature equation,and obtains the evolution of the free electron temperature and lattice temperature over a large temporal and depth range,for the first time. By investigating the temporal evolution curves of the free electron temperature and lattice temperature at three representative depths of 0,100 nm and 500 nm,it reveals different characteristics and mechanisms of the free electron temperature evolution at different depths. The results show that,in the intense femtosecond laser ablation of aluminum,the material ablation is mainly induced by the thermal conduction of free electrons,instead of the direct absorption of the laser energy; in addition,the thermal conduction of free electrons and the coupling effect between electrons and lattice will induce the temperature of free electrons deep inside the target to experience a process from increase to decrease and finally to increase again.     

Effect of vapor attenuation in surface ablation of cobalt by pulsed UV laser

Numerical calculations based on a thermal model were presented, which describe the process of target heating and ablation of cobalt during irradiation by 30-ns laser pulses at 308 nm. The attenuation of laser by vapor has been taken into account in this model. As results of the calculations, the temperature distribution beneath the target surface and the temporal evolution of surface temperature were given. The dependence of ablation rate on laser fluence was also studied based on this model. The surface ablation of cobalt with pulsed excimer laser was investigated experimentally. Our model considering proper vapor attenuation has shown to be in good agreement with the experimental results. Received: 20 January 2000 / Accepted: 13 March 2000 / Published online: 5 July 2000     

Synthesis of nanocrystalline cubic zirconia using femtosecond laser ablation

We report on the synthesis of nanocrystalline zirconia in liquid using femtosecond laser ablation. Nanocrystalline cubic zirconia has been prepared by femtosecond laser ablation of zirconium in ammonia, while nanocrystalline tetragonal and monoclinic zirconia was synthesized in water. The physical and chemical mechanisms of the formation of nanocrystalline metastable zirconia are discussed. The intrinsic properties of femtosecond laser ablation in liquid and OH⁻¹ may be responsible for the synthesis of cubic zirconia. It is suggested that the femtosecond laser pulse can create higher temperature and pressure conditions at a localized area in the liquid than the nanosecond laser pulse and the cooling is also faster in the femtosecond laser ablation process, which determined the difference between the products synthesized with femtosecond and nanosecond-pulsed laser ablation.     

The potential of UV femtosecond laser ablation for varnish removal in the restoration of painted works of art

Despite significant advances, laser ablation with nanosecond pulses presents limitations in dealing with the restoration of classes of painted works of art, such as paintings with a very thin layer of varnish. Femtosecond laser processing promises the means for overcoming such limitations. To this end, femtosecond ablation of two typical varnishes, dammar and mastic, is examined. For these varnishes, processing by Ti:Sapphire irradiation (800 nm) turns out to be ineffective. In contrast, irradiation with 248 nm ∼500 fs laser pulses results in a higher etching resolution (etching rates of ∼1 μm/pulse or less). For irradiation with few laser pulses at moderate laser fluences, etched morphology is far smoother than in the processing with nanosecond laser pulses. Furthermore, chemical modifications are considerably reduced (by nearly an order of magnitude), and exhibit a number of additional novel differences. Both etching rates and extent of chemical modifications are largely independent of varnish absorptivity. In all, femtosecond UV laser irradiation is indicated to hold a high potential, offering new perspectives for the restoration of painted works of art. Finally, a tentative model is advanced accounting in a consistent way for the observations.     

Nanotexturing of gold films by femtosecond laser-induced melt dynamics

Using tightly focused femtosecond laser pulses one can produce sub-micrometer holes and periodic structures in almost all solid materials. But with structure sizes below one micron, femtosecond laser structuring forfeits its universal character. In this paper we concentrate on the discussion of the influence of electron-phonon coupling strength in metal ablation morphology. In metals with weak electron-phonon coupling, results of femtosecond laser ablation can be dominated by solidified flow dynamics in molten material. One can make use of this phenomenon for ablation-free nanotexturing of gold films. PACS  42.62.-b; 42.65.Re; 52.38.hf     

Morphology studies of the metal surfaces with enhanced absorption fabricated using interferometric femtosecond ablation

Recently, the enhancing of bulk metals optical absorption with focused femtosecond pulses was demonstrated. This absorption enhancement is caused by different nano- and micro-structures which are formed during laser ablation with ultrashort pulses. In this paper we study the evolution of the surface structures using interferometric ablation and compare it to normal fs-ablation. Previously we have shown that interferometric femtosecond ablation is an efficient method to fabricate absorbing metal surfaces. In this study we ablated large areas of hole-array structures with different pulse numbers in polished stainless steel and copper samples. The evolution of surface morphology and the depth of the holes for these structured surfaces are presented. In addition, the reflectance of laser generated surface structures are measured at the wavelength range of 200–2300 nm using a standard spectrophotometer.     

Molecular dynamic study of volumetric phase change induced by a femtosecond laser pulse

During the last decade, femtosecond laser has been used for micro-machining of various materials. In this work, the phase change phenomena during femtosecond laser ablation are investigated using molecular dynamics (MD) simulation. The process of femtosecond laser ablation of nickel is calculated. The temperature and stress history, and the generation and growth of gas bubbles are traced. For different laser pulse fluences, the material ablation process is analysed to reveal the effect of temperature and stress. PACS 02.70.Ns; 42.62.-b; 64.60.Ht     

Theoretical studies of ultrafast ablation of metal targets dominated by phase explosion

Ultrashort pulse laser ablation of metallic targets is investigated theoretically through establishing a modified two-temperature model that takes into account both the temperature dependent electron–lattice coupling and the electron–electron-collision dominated electron diffusion processes for higher electron temperature regime. The electron–lattice energy coupling rate is found to reduce only slowly with increasing pulse duration, but grow rapidly with laser fluence, implying that the melting time of metallic materials decreases as the laser intensity increases. By taking phase explosion as the primary ablation mechanism, the predicted dependences of ablation rates on laser energy fluences for different laser pulse widths match very well with the experimental data. It is also found that during phase explosion the ablation rate is almost independent of the pulse width, whereas the ablation threshold fluence increases with the pulse duration even for femtosecond pulses. These theoretical results should be useful in having proper understanding of the ablation physics of ultrafast micromachining of metal targets. PACS 52.50.Jm; 61.80.Az; 72.15.Cz; 79.20.Ap; 79.20.Ds     

Nanosecond laser ablation for pulsed laser deposition of yttria

A thermal model to describe high-power nanosecond pulsed laser ablation of yttria (Y₂O₃) has been developed. This model simulates ablation of material occurring primarily through vaporization and also accounts for attenuation of the incident laser beam in the evolving vapor plume. Theoretical estimates of process features such as time evolution of target temperature distribution, melt depth and ablation rate and their dependence on laser parameters particularly for laser fluences in the range of 6 to 30 J/cm² are investigated. Calculated maximum surface temperatures when compared with the estimated critical temperature for yttria indicate absence of explosive boiling at typical laser fluxes of 10 to 30 J/cm². Material ejection in large fragments associated with explosive boiling of the target needs to be avoided when depositing thin films via the pulsed laser deposition (PLD) technique as it leads to coatings with high residual porosity and poor compaction restricting the protective quality of such corrosion-resistant yttria coatings. Our model calculations facilitate proper selection of laser parameters to be employed for deposition of PLD yttria corrosion-resistive coatings. Such coatings have been found to be highly effective in handling and containment of liquid uranium.