A new type of eco‐friendly resist based on nonchemically amplified system

Novel water‐processable photopolymers were designed to be useful as environment‐friendly photolithographic materials. By copolymerization of 2‐(2‐diazo‐3‐oxo‐butyryloxy)ethyl methacrylate (DOBEMA), hydroxyethyl methacrylate (HEMA), methacryllic acid (MAA), and sodium 4‐vinylbenzenesulfonate (SVBS), two kinds of polymers, poly(DOBEMA‐co‐HEMA‐co‐SVBS) for negative‐tone resist and poly(DOBEMA‐co‐MAA) for positive‐tone resist, were synthesized and their photolithographic properties were investigated. The single component negative‐tone resist produced 0.8 μm line and space patterns using a mercury‐xenon lamp in a contact printing mode using pure water as casting and developing solvent at a exposure dose of 25 mJ cm^?2. On the other hand, the single component positive‐tone resist produced 0.8 μm line and space patterns at a much higher dose of 150 mJ cm^?2. Thus, the negative resist showed much improved sensitivity when compared with the positive resist and the reported nonchemically amplified resists. This sensitivity is comparable with those of typical chemically amplified resists. © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 7534–7542, 2008     

Polymerization of vinyl monomers photoinitiated by p‐nitroaniline: Photoinitiation mechanism

The polymerization rate of methyl methacrylate photoinitiated by p‐nitroacetanilide in the presence of triethylamine was measured as a function of the amine concentration in different media. The polymerization is more efficient in nonpolar medium (benzene/monomer). ESR studies show the formation of a nitro and an amino free radical, which are formed by photoinduced proton transfer from the amine to the nitro group. The amine radical is the active species that adds to the monomer. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 2269–2273, 2000     

Melt modification of poly(styrene‐co‐maleic anhydride) with alcohols in the presence of 1,3‐oxazolines

Various copolyesteramides were prepared by melt compounding at 220 °C involving reaction of poly(styrene‐co‐maleic anhydride), SMA, with 6, 17, and 28 wt % maleic anhydride content, and 1‐dodecanol, C12OH, in the presence of 2‐undecyl‐1,3‐oxazoline, C11OXA. Copolymer architectures were examined by means of ¹H NMR, FTIR, DSC, and TGA using model compounds prepared via solution reactions. While conversion of anhydride with alcohol was poor due to the thermodynamically favored anhydride ring formation, very high conversions were achieved when stoichiometric amounts of C11OXA were added. According to spectroscopic studies esteramide groups resulted from reaction of oxazoline with carboxylic acid intermediate. In the absence of alcohol, C11OXA reacted with anhydride to produce esterimides. Effective attachment of flexible n‐alkyl side chains via simultaneous reaction of C12OH and C11OXA resulted in lower glass‐transition temperatures of copolyesteramides. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 1222–1231, 2000     

Synthesis of optically active poly(amide‐imide)s derived from N,N′‐(4,4′‐carbonyldiphthaloyl)‐bis‐L‐leucine diacid chloride and aromatic diamines by microwave radiation

3,3′,4,4′‐benzophenonetetracarboxylic dianhydride (4,4′‐carbonyldiphathalic anhydride) was reacted with L ‐leucine in a mixture of acetic acid and pyridine (3 : 2), and the resulting imide‐acid [N,N′‐(4,4′‐carbonyldiphthaloyl)‐bis‐L ‐leucine diacid] was obtained in quantitative yield. The compound was converted to the N,N′‐(4,4′‐carbonyldiphthaloyl)‐bis‐L ‐leucine diacid chloride by reaction with thionyl chloride. A new facile and rapid polycondensation reaction of this diacid chloride with several aromatic diamines such as 4,4′‐diaminodiphenyl methane, 2,4‐diaminotoluene, 4,4′‐sulfonyldianiline, p‐phenylenedi‐amine, 4,4′‐diaminodiphenylether, and m‐phenylenediamine was developed by using a domestic microwave oven in the presence of a small amount of a polar organic medium such as O‐cresol. The polymerization reactions proceeded rapidly compared with the conventional solution polycondensation and were completed within 6 min, producing a series of optically active poly(amide‐imide)s with a high yield and an inherent viscosity of 0.37–0.57 dL/g. All of the above polymers were fully characterized by IR, elemental analyses, and specific rotation. Some structural characterization and physical properties of these optically active poly(amide‐imide)s are reported. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 39: 177–186, 2001     

Synthesis and characterization of PEE‐PEO diblock copolymers with complementary end‐groups for hydrogen‐bond heteroassociation

Poly(ethylethylene‐b‐ethylene oxide) (PEE‐PEO) diblock copolymers with pyridine‐benzoic acid end‐groups for heterodimeric hydrogen bonding were designed as a possible means to noncentrosymmetric organizations by spontaneous self‐assembly. These end‐functionalized polymers were synthesized by anionic living polymerization with protected initiator and terminating reagents. A series of polymeric intermediates with different end‐groups was characterized by proton nuclear magnetic resonance, matrix‐assisted laser desorption/ionization time‐of‐flight mass spectrometry, and gel permeation chromatography. Preliminary studies of solid‐state organization by differential scanning calorimetry and small‐angle X‐ray scattering provided evidence for a long‐range order that was sensitive to chain length, copolymer composition, and end‐group structure. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 207–219, 2000     

Polymer electrolyte membranes based on p‐toluenesulfonic acid doped poly(1‐vinyl‐1,2,4‐triazole): Synthesis,thermal and proton conductivity properties

Throughout this work, the synthesis, thermal as well as proton conducting properties of acid doped heterocyclic polymer were studied under anhydrous conditions. In this context, poly(1‐vinyl‐1,2,4‐triazole), PVTri was produced by free radical polymerization of 1‐vinyl‐1,2,4‐triazole with a high yield. The structure of the homopolymer was proved by FTIR and solid state ¹³C CP‐MAS NMR spectroscopy. The polymer was doped with p‐toluenesulfonic acid at various molar ratios, x = 0.5, 1, 1.5, 2, with respect to polymer repeating unit. The proton transfer from p‐toluenesulfonic acid to the triazole rings was proved with FTIR spectroscopy. Thermogravimetry analysis showed that the samples are thermally stable up to ～250 °C. Differential scanning calorimetry results illustrated that the materials are homogeneous and the dopant strongly affects the glass transition temperature of the host polymer. Cyclic voltammetry results showed that the electrochemical stability domain extends over 3 V. The proton conductivity of these materials increased with dopant concentration and the temperature. Charge transport relaxation times were derived via complex electrical modulus formalism (M*). The temperature dependence of conductivity relaxation times showed that the proton conductivity occurs via structure diffusion. In the anhydrous state, the proton conductivity of PVTri1PTSA and PVTri2PTSA was measured as 8 × 10^?4 S/cm at 150 °C and 0.012 S/cm at 110 °C, respectively. © 2010 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 48: 1016–1021, 2010     

Decomposition of poly(4‐hydroxystyrene sulfone) in alkaline aqueous solutions

It was confirmed by ¹H NMR measurements that poly(4‐hydroxystyrene sulfone) (PHOSS) was decomposed in dissolving in a deuterium oxide solution of sodium deuteroxide to give trans‐2‐(4‐hydroxyphenyl)ethenesulfinic acid (HESA) and 4‐hydroxystyrene (HOSt) quantitatively. HESA and HOSt were formed in the mole ratio of about 2:3. The amount of each product was almost independent of the alkaline concentration ranging from 1 to 12 w/v %. The mole ratio of monomeric units of decomposed PHOSS to NaOD was estimated to be 0.64. A possible decomposition mechanism was discussed. The initiation reaction was the abstraction of a methylene proton anti to a sulfonyl group by alkali, followed by the main chain scission of the polymer. The resonance structure stabilizing a terminal phenolate anion possibly enhanced the elimination of HESA, so that it was produced in quantity comparable to HOSt. The decomposition of PHOSS in alkaline aqueous solutions was a conformation‐determined polymer degradation following Hofmann's rule. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 2760–2766, 2000     

Dual roles of alkyl alcohols as syndiotactic‐specificity inducers and accelerators in the radical polymerization of N‐isopropylacrylamide and some properties of syndiotactic poly(N‐isopropylacrylamide)

The effects of simple alkyl alcohols on the radical polymerization of N‐isopropylacrylamide in toluene at low temperatures were investigated. We succeeded in the induction of syndiotactic specificity and the acceleration of polymerization reactions at the same time by adding simple alkyl alcohols such as 3‐methyl‐3‐pentanol (3Me3PenOH) to N‐isopropylacrylamide polymerizations. The dyad syndiotacticity increased with a decrease in the temperature and an increase in the bulkiness of the added alcohol and reached up to 71% at ?60 °C in the presence of 3Me3PenOH. With the assistance of NMR analysis, it was revealed that the alcohol compounds played dual roles in this polymerization system; an alcohol compound coordinating to the N? H proton induced syndiotactic specificity, and that hydrogen‐bonded to the C?O oxygen accelerated the polymerization reaction. The effect of syndiotacticity on the properties of poly(N‐isopropylacrylamide)s was also examined in some detail. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 44: 4450–4460, 2006     

Negative‐working photoresist of methacrylate polymers based on the transesterification of the 2‐hydroxyethyl group in the presence of an acid

This article reports a novel crosslinking functionality of the 2‐hydroxyethyl methacrylate unit (HEMA) in the presence of an acid. The polymeric compositions, consisting of a polymer containing the HEMA unit and a photoacid generator, were insolubilized in an aqueous base developer on exposure to UV light and a successive baking process to provide a negative‐working photoresist. A series of poly(benzyl methacrylate‐co‐methacrylic acid‐co‐2‐hydroxyethyl methacrylate) terpolymers with various contents of HEMA were prepared to elucidate the photopolymeric characteristics. The polymer behavior in films was examined by a comparison of the photosensitivity and IR spectroscopic method. Experiments with a model compound were also carried out. On the basis of the results, we found that the resist was insolubilized by crosslinking through the transesterification of HEMA segments due to acid generated from the photoacid generator and subsequent heating. The advantage of using the 2‐hydroxyethyl group is that in the terpolymer, the HEMA unit is transparent at a short‐wavelength region and is a promising crosslinking unit for ArF lithographic photoresists. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 1858–1867, 2002     

Synthesis and properties of a new fluorine‐containing polybenzimidazole for high‐temperature fuel‐cell applications

An amorphous, organosoluble, fluorine‐containing polybenzimidazole (PBI) was synthesized from 3,3′‐diaminobenzidine and 2,2‐bis(4‐carboxyphenyl)hexafluoropropane. The polymer was soluble in N‐methylpyrrolidinone and dimethylacetamide and had an inherent viscosity of 2.5 dL/g measured in dimethylacetamide at a concentration of 0.5 g/dL. The 5% weight loss temperature of the polymer was 520 °C. Proton‐conducting PBI membranes were prepared via solution casting and doped with different amounts of phosphoric acid. In the methanol permeability measurement, the PBI membranes showed much better methanol barrier ability than a Nafion membrane. The proton conductivity of the acid‐doped PBI membranes increased with increasing temperatures and concentrations of phosphoric acid in the polymer. The PBI membranes showed higher proton conductivity than a Nafion 117 membrane at high temperatures. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 44: 4508–4513, 2006     

Melt polycondensation of L‐lactic acid with Sn(II) catalysts activated by various proton acids: A direct manufacturing route to high molecular weight Poly(L‐lactic acid)

Poly(L ‐lactic acid) (PLLA) was produced by the melt polycondensation of L ‐lactic acid. For the optimization of the reaction conditions, various catalyst systems were examined at different temperature and reaction times. It was discovered that Sn(II) catalysts activated by various proton acids can produce high molecular weight PLLA [weight‐average molecular weight (M_w ) ≥ 100,000] in a relatively short reaction time (≤15 h) compared with simple Sn(II)‐based catalysts (SnO, SnCl₂ · 2H₂O), which produce PLLA with an M_w of less than 30,000 after 20 h. The new catalyst system is also superior to the conventional systems in regard to racemization and discoloration of the resultant polymer. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 1673–1679, 2000     

Solid‐state NMR studies of cis‐1,4‐polyisoprene crosslinked with dicumyl peroxide in the presence of triallyl cyanurate

The network of dicumyl peroxide (DCP)/triallyl cyanurate (TAC) crosslinked cis‐1,4‐polyisoprene was studied by solid‐state NMR techniques such as direct‐polarization (DP), cross‐polarization (CP), and proton T₂ experiments. Line broadening and cis/trans isomerization of mobile carbons were observed in the DP experiments. The information on rigid carbons of network structures was observed with the CP technique. Motional heterogeneity was examined by proton T₂ relaxation experiments. Decreases in long T₂ (T_2L) values from the mobile non‐network structures and short T₂ (T_2S) values from the rigid network structures were observed with an increase in peroxide or coagent concentration. The percentage of T_2S in T₂ relaxation, which is related to network density, was observed to increase with peroxide and coagent addition. © 2000 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 38: 1417–1423, 2000     

The effect of oxygen on the three‐component radical photoinitiator system: Methylene blue,N‐methyldiethanolamine,and diphenyliodonium chloride

In this article, we extend our mechanistic study of the three‐component radical photoinitiator system, consisting of methylene blue (MB), N‐methyldiethanolamine, and diphenyliodonium chloride, by investigating the influence of oxygen on the rate of the consumption of MB dye. The mechanism involves electron transfer/proton transfer from the amine to the dye as the primary photochemical reaction. Oxygen quenches the triplet state of the dye, leading to retardation of the reaction. We used time‐resolved steady‐state fluorescence monitoring to observe the MB concentration in situ in both a constant oxygen environment and a sealed reactor as the dye is consumed via photoreaction. In the sealed reactor, we observed a retardation period (attributed to the presence of oxygen) followed by rapid exponential decay of the MB fluorescence after the oxygen was depleted. On the basis of the impact of the amine and iodonium concentrations on the fluorescence intensity and the duration of the retardation period, our proposed mechanism includes an oxygen‐scavenging pathway, in which the tertiary amine radicals formed in the primary photochemical process consume the oxygen via a cyclic reaction mechanism. The iodonium salt is an electron acceptor, acting to reoxidize the neutral dye radical back to its original state and allowing it to reenter the primary photochemical process. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 3336–3346, 2000     

Cationic copolymerization of racemic‐β‐butyrolactone with L,L‐lactide: One‐pot synthesis of block copolymers

Cationic copolymerization of racemic‐β‐butyrolactone (β‐BL) with l,l ‐lactide (LA) initiated by alcohol and catalyzed by trifluoromethanesulfonic acid proceeding by activated monomer (AM) mechanism was investigated. Although both comonomers were present from the beginning in the reaction mixture, polymerization proceeded in sequential manner, with poly‐BL formed at the first stage acting as a macroinitiator for the subsequent polymerization of LA. Such course of copolymerization was confirmed by following the consumption of both comonomers throughout the process as well as by observing the changes of growing chain‐end structure using ¹H NMR. ¹³C NMR analysis and thermogravimetry revealed the block structure of resulting copolymers. The proposed mechanism of copolymerization was confirmed by the studies of changes of ¹H NMR chemical shift of acidic proton in the course of copolymerization, providing an indication that indeed protonated species and hydroxyl groups are present throughout the process, as required for AM mechanism. © 2013 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2013 , 51, 4873–4884     

The kinetics of polycondensation of α,α′‐dichloro‐p‐xylene with 4,4′‐isopropylidenediphenol using benzyltriethylammonium chloride as a phase‐transfer catalyst

The phase‐transfer catalyzed polycondensation of α,α′‐dichloro‐p‐xylene with 4,4′‐isopropylidenediphenol was carried out using benzylethylammonium chloride in a two‐phase system of an aqueous alkaline solution and benzene at 60 °C under nitrogen atmosphere. The rate of polycondensation was expressed as the combined terms of quaternary onium cation and 4,4′‐isopropylidenediphenolate anion rather than the feed concentration of catalyst and 4,4′‐isopropylidenediphenol. The measured concentrations of hydroxide and chloride anion in the aqueous solution and α,α′‐dichloro‐p‐xylene in the organic phase were used to obtain the reaction rate constant with the integral method, and to analyze the polycondensation mechanism with a cyclic phase‐transfer initiation step in the heterogeneous liquid–liquid system. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 3059–3066, 2000     

Spontaneous dehydration mechanism of aromatic aldehyde reactions with hydroxyl and non‐hydroxyl amines

The plot of rate constants vs. pH for the dehydration step of the reaction between furfural and 5‐nitrofurfural with hydroxylamine, N‐methylhydroxylamine, and O‐methylhydroxylamine, shows two regions corresponding to the oxonium ion‐catalyzed and spontaneous dehydration. The oxonium ion‐catalyzed dehydration region of the reaction of furfural with the above mentioned hydroxylamines exhibits general acid catalysis with excellent Brønsted correlation (Brønsted coefficients: 0.76 (r = 0.986), 0.68 (r = 0.987), and 0.67 (r = 0.993) respectively). However, the rate constants of the spontaneous dehydration of these hydroxylamines, where water is considered the general acid catalyst, exhibit a large positive deviation from the Brønsted line. This fact was not observed in the reaction of non‐hydroxyl amines with different aromatic aldehydes by other authors, thus supporting that the spontaneous dehydration steps for these reactions proceed by intramolecular catalysis. The mechanism of intramolecular catalysis might be stepwise. First, a zwitterionic intermediate is formed. It can then evolve in the second step by loss of water, or follow a concerted pathway, with the transference of a proton through a five‐membered ring (general intramolecular acid catalysis). In the case of non‐hydroxyl amines, data suggested the possibility of a mechanism of intramolecular proton transfer through one or two water molecules, from the nitrogen of the amine to the leaving hydroxide ion. © 2002 Wiley Periodicals, Inc. Int J Chem Kinet 34: 685–692, 2002     

Sorption and diffusion of methanol and water in PVDF‐g‐PSSA and Nafion® 117 polymer electrolyte membranes

Sorption and diffusion properties of poly(vinylidene fluoride)‐graft‐poly(styrene sulfonic acid) (PVDF‐g‐PSSA) and Nafion® 117 polymer electrolyte membranes were studied in water/methanol mixtures. The two types of membranes were found to have different sorption properties. The Nafion 117 membrane was found to have a maximum in‐solvent uptake around 0.4 to 0.6 mole fraction of methanol, while the PVDF‐g‐PSSA membranes took up less solvent with increasing methanol concentration. The proton NMR spectra were recorded for membranes immersed in deuterated water/methanol mixtures. The spectra showed that the hydroxyl protons inside the membrane exhibit resonance lines different from the resonance lines of hydroxyl protons in the external solvent. The spectral features of the lines of these internal hydroxyl groups in the membranes were different in the Nafion membrane compared with the PVDF‐g‐PSSA membranes. Diffusion measurements with the pulsed field gradient NMR (PFG‐NMR) method showed that the diffusion coefficient of the internal hydroxyl groups in the solvent immersed Nafion membrane mirrors the changes in the diffusion coefficients of hydroxyl and methyl protons in the external solvent. For the PVDF‐g‐PSSA membranes, a decrease in the diffusion coefficient of the internal hydroxyl protons was seen with increasing methanol concentration. These results indicate that the morphology and chemical structure of the membranes have an effect on their solvent sorption and diffusion characteristics. © 2000 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 38: 3277–3284, 2000     

Functionalization of polymeric organolithium compounds with 3,4‐epoxy‐1‐butene: Precursors for diene‐functionalized macromonomers

The functionalization of polymeric organolithiums (PLi) with 3,4‐epoxy‐1‐butene (EPB) in a hydrocarbon solution yielded the corresponding hydroxybutene‐functionalized polymers in high yields (>95%). Three modes of addition of PLi to EPB were observed (1,4, 3,4, and 4,3). The products and chain‐end structures were characterized by ¹H NMR, ¹³C NMR, attached‐proton‐test ¹³C NMR, calculated ¹³C NMR chemical shifts, and matrix‐assisted laser desorption/ionization time‐of‐flight mass spectrometry (MALDI‐TOF MS). The regioselectivity of the addition depended on the PLi chain‐end structure, the reaction conditions, and the addition of lithium salts or Lewis bases. In the absence of additives, the functionalization of poly(styryl)lithium (PSli) produced equal amounts of 1,4‐, 3,4‐, and 4,3‐addition, as determined by quantitative ¹³C NMR analysis. The use of a low temperature (6 °C), inverse addition, the addition of triethylamine (TEA; [TEA]/[PSLi] = 20) as a Lewis base, or dienyllithium chain ends produced polymers with only the 1,4‐addition product. Mild dehydration of the hydroxybutene‐functionalized polymer with p‐toluenesulfonic acid produced the corresponding diene‐functionalized macromonomer, as shown by MALDI‐TOF MS. © 2003 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 41: 947–957, 2003     

Highly fluorinated low‐molecular‐weight photoresists for optical waveguides

A series of highly fluorinated polymers were synthesized by copolymerization of 2,3,4,5,6‐pentafluorostyrene (PFS) and fluorinated styrene derivate monomer (FSDM). Their chemical structure were confirmed by ¹H NMR, ¹³C NMR, and ¹⁹F NMR spectra. The refractive index and cross‐linking density of the polymers can be tuned and controlled by monitoring the feed ratio of comonomers. A series of negative‐type low‐molecular‐weight fluorinated photoresists (NFPs) were prepared by composing of fluorinated polystyrene derivates (FPSDs), diphenyl iodonium salt as a photoacid generator (PAG) and solvent. The polymer films prepared from NFP by photocuring exhibited excellent chemical resistance and thermal stabilities (T_d ranged from 230.5 to 258.1 °C). A clear negative pattern was obtained through direct UV exposure and chemical development. For waveguides without upper cladding, the propagation loss of the channel waveguides was measured to be 0.25 dB/cm at 1550 nm. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2011     

pH‐ and β‐cyclodextrin‐responsive micelles based on polyaspartamide derivatives as drug carrier

A novel kind of graft polymer poly(aspartic acid)‐ethanediamine‐g‐adamantane/methyloxy polyethylene glycol (Pasp‐EDA‐g‐Ad/mPEG) was designed and synthesized for drug delivery in this study. The chemical structure of the prepared polymer was confirmed by proton NMR. The obtained polymer can self‐assemble into micelles which were stable under a physiological environment and displayed pH‐ and β‐cyclodextrin (β‐CD)‐responsive behaviors because of the acid‐labile benzoic imine linkage and hydrophobic adamantine groups in the side chains of the polymer. The doxorubicin (Dox)‐loaded micelles showed a slow release under physiological conditions and a rapid release after exposure to weakly acidic or β‐CD environment. The in vitro cytotoxicity results suggested that the polymer was good at biocompatibility and could remain Dox biologically active. Hence, the Pasp‐EDA‐g‐Ad/mPEG micelles may be applied as promising controlled drug delivery system for hydrophobic antitumor drugs. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2015 , 53, 1387–1395