Inductively Coupled Plasma Etching in ICl- and IBr-Based Chemistries. Part II: InP, InSb, InGaP, and InGaAs

A parametric study of Inductively Coupled Plasma (ICP) etching of InP, InSb, InGaP, and InGaAs has been carried out in ICl/Ar and IBr/Ar chemistries. Etch rates in excess of 3.1 for InP, 3.6 for InSb, 2.3 for InGaP, and 2.2 m/min for InGaAs were obtained in IBr/Ar plasmas. The ICP etching of In-based materials showed a general tendency: The etch rates increased substantially with increasing ICP source power and rf chuck power in both chemistries, while they decreased with increasing chamber pressure. The IBr/Ar chemistry typically showed higher etch rates than ICl/Ar, but the etched surface morphologies were fairly poor for both chemistries.     

Dry etching characteristics of III–V semiconductors in microwave BCl3 discharges

Electron cyclotron resonance (ECR) BCl₃ discharges with additional rf biasing of the sample position have been used to etch a variety of III–V semiconductors. GaAs and Al_xGa_1–xAs (x = 0–1) etch at equal rates in BCl₃ or BCl₃/Ar discharges, whereas SF₆ addition produces high selectivities for etching GaAs over AlGaAs. These selectivities are in excess of 600 for dc biases of –150 V, and fall to 6 for biases of –300 V. If the dc biases are kept to – 100 V, there is no measurable degradation of the optical properties of the GaAs and AlGaAs. The AlF₃ formed on the AlGaAs surface during exposure to BCl₃/SF₆ plasmas can be removed by sequential rinsing in dilute NH₄OH and water. In-based materials (InP, InAs, InSb, InGaAs) etch at slow rates with relatively rough morphologies in BCl₃ plasmas.     

Temperature-dependent dry etching characteristics of III–V semiconductors in HBr- and HI-based discharges

Microwave discharges of HBr/H₂/Ar and H/H₂/Ar with additional do biasing of the sample were used to etch InP, GaAs, and AlGaAs at temperatures between 50–250°C. The etch rates increase by factors of 3–50 and 5–9, respectively, for HBr-and HI-based discharges over this temperature range, but display non-Arrhenius behavior. The etched surfaces became very rough above 100°C for InP with either discharge chemistry due to preferential loss of P, while GaAs and AlGaAs are more tolerant of the elevated temperature etching. The near-surface electrical properties of InP are severely degraded by etch temperatures above 100°C, while extensive hydrogen in-diffusion occurs in GaAs and AlGaAs under these conditions, leading to dopant passivation which can be reversed by annealing at 400°C.     

Gas permeability of block copolymers of styrene and butadiene

The permeability of styrene-butadiene block copolymer foils with different composition prepared by casting and pressing has been investigated for the gases Ar, CO₂, and CH₄ at pressure difference of 400 mbar and at the temperature range 298 T [K] 333.The permeation process can be described by the solution diffusion mechanism. The diffusion coefficients decrease in the sequence of the gases Ar, CO₂, and CH₄ and the solubility coefficients increase in the sequence Ar, CH₄, CO₂.The dependence of the permeability on the composition of the block copolymer can be interpreted by the help of percolation theory and the effective medium theory. It follows the critical volume fraction of the percolation of the transport phase _PB ^c (= 0,23) and the coordination numberz (= 4) giving an information concerning the multiphase structure of the block copolymer.Presented in part at the 33^rd Annual Meeting of the Colloid-Gesellschaft, Graz, Austria, September 14–16, 1987.     

51V NMR studies of systems V2O5-KHSO4 and V2O5?K2SO4

Systems V₂O₅–KHSO₄ and V₂O₅–K₂SO₄ have been studied by the⁵¹V NMR method. The first system demonstrates the same states of vanadium as the previously studied V₂O₅–K₂S₂O₇, in this system a compound with an equimolar ratio of components has been found. In V₂O₅–K₂SO₄ the state of vanadium differs from the above systems and the formation of a compound with V/K=4 is observed.

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⁵¹V KHSO₄–V₂O₅ K₂SO₄–V₂O₅. , K₂S₂O₇–V₂O₅, . K₂SO₄–V₂O₅ V/K4.

     

Optical diagnostic studies of trimethyl phosphine-containing radio-frequency discharges

We have investigated the decomposition of P(CH₃)₃ in 13-MHz, radio-frequency discharges in He and H₂. Relative concentrations of atomic phosphorus were estimated actinometrically by measuring P emission intensities, relative to Ar, while quantitative, relative P₂ number densities were measured by ArF excimer laser-induced fluorescence. A radiative lifetime of 10.5±1.0 ns was measured for the v=11 level of the C¹ _u ⁺ state, resonantly excited by the 193 nm laser. Additions of P(CH₃)₃ to He discharges reduce the electron energy distribution as sensed by the quenching of optical emission from He and trace amounts of added Ar, and thereby causes the overall process P(CH₃)₃P+3CH₃ to occur with maximum efficiency at very low (0.5%) P(CH₃)₃ additions. H₂ discharges are 10 times less efficient at producing P and P₂, due to the lower electron energies, and possibly to hydrogenation reactions. P₂ production in both He and H₂ discharges increases linearly with pressure up to at least 10 torr. Under optimum conditions, plasma decomposition of P(CH₃)₃ (and by analogy PH₃) promises to be an attractive source of phosphorus for growth of phosporus-containing thin films.     

Molecular Interactions and Inclusion Phenomena in Substituted β-Cyclodextrins. Simple Inclusion Probes: H2O, C, CH4, C6H6, NH4 +, HCOO−

Using a simple molecular mechanics approach interaction energy profiles of simple probes (C, CH₄, C₆H₆, H₂O, NH₄ ⁺, and HCOO^-) passing through the center of the -CD ring cavity along the main molecular symmetry axis were first evaluated. Molecular Electrostatic Potential (MEP) values along the same path were also evaluated. The effect of the flexibility of the host -CD molecule together with solute-solvent (H₂O) interactions have been represented by averaging structures of MD calculations for -CD alone and -CD surrounded by 133 H₂O molecules. The effect of various substitutions of -CD has also been evaluated. Small symmetric hydrophobic probes (such as C, CH₄, C₆H₆) are predicted to form stable inclusion complexes with non-substituted and substituted -CDs, the probe position typically being near the cavity center. The stability of the inclusion complexes will increase with increasing size and aliphatic character of the probe. Small polar and charged probes (such as H₂O, NH₄ ⁺, HCOO^-) are predicted to prefer the interaction with the solvent (water) in the bulk phase rather than the formation of inclusion complexes with non-substituted and substituted -CDs. Guest–host interactions in the stable inclusion complexes with hydrophobic probes are almost entirely dominated by dispersion interactions. The MEP reaches magnitudes close to zero in the center of the non-substituted -CD ring cavity and in most of the studied substituted -CDs and shows maximum positive or negative values outside of the cavity, near the ring faces. Substitution of -CD by neutral substituents leads to enhanced binding of hydrophobic probes and significant changes in the MEP profile along the -CD symmetry axis.     

Ethane hydrogenolysis on silica-supported tantalum hydride. Quantum-chemical study

The structures of the (H₄Si₂O₅)O₂Ta(R, RR"R, RR) clusters (R, R", R = H, Me, Et, Pr; R = CH₂), which model the basic structural units of the catalytic cycle of ethane hydrogenolysis on silica-supported tantalum hydride, were studied by the density functional theory (B3LYP) and the perturbation theory (MP2). The possible structure of active sites was proposed based on comparison of experimental results with calculated data. Ethane hydrogenolysis and metathesis proceed by a mechanism involving the formation of ethylene -complexes and carbenium derivatives of tantalum as intermediates.     

Studies on the γ-effects. Part 3. Variations in the γ-effects ofN-substituted benzylamines,o-aminomethylphenols and 3,4-dihydro-2H-1,3-benzoxazines against theE s ′ substituent constants

The magnitude of the -effects on¹³C chemical shifts was studied as function of theN-substitution [Me, Et, Bu, CH₂C₆H₅, CH₂CH₂C₆H₅, Prⁱ, Bu^t, Bu^s, c-C₆H₁₁, CH(CH₃)C₆H₅, Bu^t, or Ph] for several benzylamines,o-aminomethylphenols and 3,4-dihydro-2H-1,3-benzoxazines. A correlation between the _c-values and the steric substituent constants (E _s ) of theN-substituents proved useful in characterizing the variation of the -effects along with the conformational factors. The diastereospecificity of the -effects is discussed for purposes of configurational assignments.For part 2, see Ref. 1. This paper is also Part 5 in the series Studies on the Benzoxazine Series.     

Novel tetrahedral and heteronuclear transition metal clusters prepared via single and double isolobal displacements

Ten transition metal cluster complexes with parent and substituted cyclopentadienyl ligands, [(⁵-C₅H⁴ CH₂CH₂)₂O][MFeCoS(CO)₈]₂ (2 M=Mo; 3 M=W), (⁵-C₅H₅)(⁵-RC₅H₄)MFeNiS(CO)₅ (5 M=Mo, R=Me; 6M= W, R=H), (⁵-C₅H₅)[⁵-C₅H₄C(O)CH₂]₂[WFeNiS(CO)₅][WFeCoS(CO)₈] (8), (⁵-C₅H₅)₂[⁵-C₅H₄ C(O)CH₂]₂[WFeNiS(CO)₅]₂ (9), (⁵-RC₅H₄)[(⁵-C₅H₄CH₂CH₂)₂O][Mo2FeS(CO)₇][MoFeCoS (CO)₈] (10R=MeCO; 12 R=MeO2C), (⁵-RC₅H₄)₂[(⁵-C₅H₄CH₂CH₂)₂O][Mo₂FeS(CO)₇]₂ (11 R=MeCO; 13 R=MeO2C), were synthesized through single and double isolobal displacements and characterized by elemental analyses, i.r., 1H-n.m.r. and MS techniques.     

C-C bond formation at polynuclear metal centers

Studies on C-C bond formation between simple hydrocarbon species such as CH₂, C=CH₂, CH=CH₂, CH₂=CH₂, CH₂=C=CH₂ and CHCH at a diruthenium center suggest that the process is promoted when the dimetal center can readily compensate for the two electrons lost in the formation of the new C-C bond. Thus, whereas -CH₂ and ethene combine only under forcing conditions, the combination of -CH₂ with allene or ethyne, which have additional -electrons available for coordination, occurs readily at room temperature. Likewise, the availability of uncoordinated -electrons in -C=CH₂ allows vinylidene to link rapidly with ethene at room temperature. Alkyne complexes [Ru₂(CO)(-RCCR)(-C₅H₅)₂] (R=CF₃ or Ph) react only under vigorous conditions with additional alkyne to give [Ru₂(CO)(-C₄R₄) (-C₅H₅)₂], but give these same species at room temperature in the presence of acid, shown to be due to the intermediacy of highly reactive 30-electron -vinyl cations. Thermally, alkyne linking proceedsvia three-alkyne species [Ru₂(-C₆R₆)(-C₅H₅)₂] to a four-alkyne complex [Ru₂(-C₈R₈)(-C₅H₅)₂], containing an unprecedented C₈ ligand composed of a C₆ ring with a C₂ tail. Treatment of [Ru₂(CO)(-RCCR)(-C₅H₅)₂] with unsaturated metal fragments gives trimetal complexes such as [Ru₃(CO)₅(₃-CF₃CCCF₃) (-C₅H₅)₂]. The MeCN derivative of this species undergoes unusual linking processes on reaction with additional alkyne to giveinter alia [Ru₃(CO)₃(₃-CCF₃){₃-C₃(CF₃)₃}(-C₅H₅)₂], arising from alkyne cleavage, and [Ru₃(CO)₃{₃-C₄(CF₃)₂(CO₂Me)₂}(-C₅H₅)₂], a closo-pentagonal bipyramidal Ru₃C₄ cluster.     

Studies on the V2O5?TiO2 system, V. Equilibrium pressures

The oxygen equilibrium pressures from pure V₂O₅ and co-precipitated V₂O₅–TiO₂ system were measured in the range of 200–450 °C. The behavior of the equilibrium pressure with changes of temperature of the samples with and without TiO₂ is attributed to Ti⁴⁺ interaction with the V₂O₅ lattice.

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V₂O₅ - V₂O₅–TiO₂ 200–450°C. TiO₂ Ti⁺⁴ V₂O₅.

     

Synthesis of new trans-1,2-disilylethylene derivatives by hydrosilylation of ethynylsilanes

Conclusions Eight new trans-1,2-disilylethylenes were synthesized by the hydrosilylation of (CH C)₂Si(OCH₃)CH₃ with HSiCl₃ and HSi(CH₃)Cl₂, and also of (CH₃)₃SiC CH, CH₃O(CH₃)₂SiC CH, and CH₃(CH₃O)₂SiC CH with HSi(CH₃)(C₆H₅)Cl₉ and of (CH₃O)₃SiC CH with HSi(CH₃)Cl₂. The alcoholysis of these compounds with MeOH gave the corresponding methoxy derivatives.Translated from Izvestiya Akademii Nauk SSSR, Seriya Khimicheskaya, No. 8, pp. 1874–1877, August, 1976.     

Energetics of Water/Cyclodextrins Interactions

The heat capacities of solid -CD, 8.1 H₂O and -CD, 6.0 H₂O have been measured between 10 and 300 K by adiabatic calorimetry. Using earlier results obtained in similar experiments with anhydrous cyclodextrins and with -CD, 9.7 H₂O, a comparative analysis has been developed. The energetic behaviours of anhydrous and hydrated cyclodextrins (CDs) have been compared in order to investigate the role of water molecules in the stabilization of the cyclodextrin's rings and on their reactivities. Calculations, based on the additivity of thermodynamic properties, provide the energetic and entropic average contributions of water molecules in each cyclodextrin. From these results, we assumed that the water–water and water–CD interactions are rather different according to the cyclodextrin. In the (-CD, 9.7 H₂O) structure, the water molecules seem to be better organised in a relatively independent network. Concerning hydrated -CD and -CD, stronger water–CD interactions probably prevent an optimal organisation of the water–water bonds network. Differential scanning calorimetry was also used to follow the evolution of the thermal behaviour of -CD, nH₂O versus hydration ratio between 170 and 300 K. Our results indicate that the -CD ring needs at least 1.6 water molecules to be stabilized in the solid state.     

Mixed ligand complexes involving aminoacid dithiocarbamates,substituted phosphines and nickel(II)

Mixed ligand complexes involving four aminoacid dithiocarbamates (RRdtc=glydtc^– (R=H; R=H), methdtc^– (R=H; R=C₃H₇S), sardtc^– (R=Me; R=H), trydtc^– (R=H; R=C₉H₈N), substituted phosphines [PPh₃, Ph₂PCH₂CH₂PPh₂(dppe)] and nickel(II) are reported. All are diamagnetic. Thermal analyses of the complexes are in keeping with the proposed formulae. Thermal decomposition of the dithiocarbamate moiety proceeds through the formation of Ni(SCN)₂. PPh₃ and dppe are lost in the initial decomposition stages.     

Distortion of the Cucurbituril Molecule by an Included 4‐Methylpyridinum Cation

The crystal and molecular structures of a guest–host complex of cucurbituril with 4methylpyridinium, {(4MePyH) (C₃₆H₃₆N₂₄O₁₂)}(NO₃) · 4H₂O, were determined by Xray structural analysis. The crystals are monoclinic with a = 26.276(3) , b = 25.861(2) , c = 17.375(2) , = 124.17(1)°, V_cell =9768.6(18) ³, space group Cc, and Z = 8. The structure contains two crystallographically independent supramolecular complexes. They are arranged in pillars oriented along the a axis. In each pillar, the complexes are parallel to each other. The pillars are shifted with respect to each other by onehalf of the crystallographic translation. The centers of the supermolecules are arranged according to a pseudobodycentered motif. Distortions of the cucurbituril molecule depending on the guest type have been analyzed with the use of results obtained in the present and previous studies.     

Investigation of the redox properties of polynuclear “ladder” complexes containing Cr,Mn, and Fe

The redox potentials of new Cr, Mn, and Fe polynuclear ladder complexes, (⁵-Cp)Fe(CO)₂(¹,⁵-C₅H₄)Fe(CO)₂(¹,⁵-C₅H₄)Mn(CO)₃, (⁵-Cp)Fe(CO)₂(¹,⁵-C₅H₄)Mn(CO)₃, (⁵-Cp)Fe(CO)₂(¹,⁶-Ph)Cr(CO)₃, (⁵-Cp)Fe(CO)₂(¹,⁵-C₅H₄)Fe(CO)₂CH₂Ph, (⁵-Cp)Fe(CO)₂(¹,⁶-CH₂Ph)Cr(CO)₃, were measured and the mechanism of their electrochemical oxidation and reduction was suggested. It was shown that the - or -bonds of the bridging ligand can be cleaved selectively by applying cathodic or anodic potentials, respectively. On the basis of the obtained electrochemical data, a mechanism is suggested for the rearrangement observed when the complexes are metallated by butyllithium.Translated fromIzvestiya Akademii Nauk. Seriya Khimicheskaya, No. 2, pp. 362–366, February, 1995.This work was carried out with financial support from the Russian Foundation for Basic Research (Project No 94-03-08628a).     

Schiff base complexes of silicon(IV)

Reactions of silicon tetraacetate with different types ofSchiff bases have been investigated in anhydrous benzene. Monofunctional bidentate, C₆H₅CHNXOH and HORCHNC₆H₅ [whereX=CH₂CH₂, CH₂CH(CH₃) or o-C₆H₄ and R=o-C₆H₄ or 2,1-C₁₀H₆], bifunctional tridentate, o-HOC₆H₄CHNYOH [whereY=CH₂CH₂ or CH₂CH(CH₃)] and bifunctional tetradentateSchiff bases, o-HOC₆H₄C(CH₃)N(CH₂) _n NC(CH₃)C₆H₄OH-o (wheren=2 or 3) have been shown to yield derivatives of the type, Si(OAc)_4– m L _m, Si(OAc)_4–2 n L _n and Si(OAc)₂ L (wherem=1,2 or 3;n=1 or 2 and HL, H₂ L and H₂ L represent the molecules of monofunctional bidentate, bifunctional tridentate and bifunctional tetradentateSchiff bases resp.) and have been found to be monomeric in boiling benzene. Tentative structures based on IR and in a few cases PMR spectra have been indicated for the resulting derivatives.With 2 Figures     

Determination of the exposed surface area of V2O5 on a V2O5/Al2O3 catalyst

NH₃, NO and CO₂ were tested as adsorbates for selective determination of exposed surface area of V₂O₅ on a V₂O₅/Al₂O₃ catalyst. The most promising appears to be CO₂ which interacts with the support Al₂O₃ only.

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NH₃, NO CO₂ V₂O₅ V₂O₅/Al₂O₃. CO₂, Al₂O₃.

     

Plasma-assisted etching of aluminum in CCl4−Cl2 mixtures

The etching of aluminum has been studied in a diode reactor fed with CCl₄–Cl₂ mixtures. The overall reaction has been found to be influenced by the contemporaneous deposition of low-volatile etch products and/or a chlorocarbon polymer film originating from the polymerization of CCl_x species. A simple approach is described which allows the chemical contribution to the etch process to be distinguished from the physical one of through-film diffusion. The etching of a clean Al surface is shown to be controlled by chlorine chemisorption at low temperature.Work partially supported by Progetto Finalinalizzato Materiali per l'Elettronica a Stato Solido del CNR and by the Italian Ministry of Education (MPI).