Synthesis and radiation degradation of vinyl polymers with fluorine: Search for improved lithographic resists

Homopolymers of methyl α-fluoroacrylate (MFA), trifluoroethyl methacrylate (TFEM), and hexafluoroisopropyl methacrylate (HFIM) were prepared, as were their methyl methacrylate (MMA) copolymers. Copolymers of vinylidene fluoride (VDF) and chlorotrifluoroethylene (CTFE) with MMA were also prepared. The radiation susceptibilities of these polymers were measured by the ⁶⁰Co γ-irradiation method, in which molecular weights were measured by membrane osmometry and gel permeation chromatography (GPC). All the copolymers degraded by predominant chain scission except poly(methyl α-fluoroacrylate), (PMFA), which crosslinks even at low doses (ca. 1 Mrad). The G_s - G_x and G_s values of the chain scissioning polymers and copolymers are higher than those of poly(methyl methacrylate) PMMA reference. The high susceptibility of PMFA homopolymer to crosslinking is in contrast to that of poly(methyl α-chloroacrylate), as we reported earlier. This effect is interpreted as resulting from extensive hydrogen fluoride and polyenlyl radical formation, which leads to facile crosslinking. However, incorporation of the MFA monomer unit causes the (22/78) MFA/MMA copolymer to degrade with a larger value of G_s that PMMA. Apparently a second-order process leads to crosslinking in PMFA and this is retarded in the copolymer. In the hehomopolymers of HFIM and TFEM and in the HFIM-MMA and TFEM-MMA copolymers the HFIM and TFEM components facilitate degradation with negligible crosslinking. The increased degradation susceptibility of VDF and CTFE copolymers with MMA over that of PMMA is attributed to processes at the VDF or CTFE components present in smaller concentrations (3-5 mole %) than the threshold levels (25-50% necessary for significant crosslinking).     

Synthesis,Thermal Properties,and Radiolysis of Poly(Cyclohexyl α-Chloroacrylate)

Cyclohexyl α-chloroacrylate (CCA) was polymerized by radical anionic and γ-radiation initiation. The anionic polymerization of cyclohexyl α-chloroacrylate gave moderately isotactic polymer in toluene and syndiotactic-rich polymer in THF. Poly(cyclohexyl α-chloroacrylate) (PCCA) was found to undergo two-stage weight loss in thermogravimetric analysis, and the first-stage weight loss was attributed to the lactonization reaction. PCCA degraded under γ-radiation, and the radiation yields of crosslinking and scission, G _x and G _s, were 0.6 and 3.8, respectively.     

Radiolysis of resist polymers. III. Copolymers of methyl-α-chloroacrylate and trihaloethylmethacrylates

Homopolymers of 2,2,2-trifluoroethyl(methacrylate) (TFEMA) and 2,2,2-trichloroethyl-(methacrylate) (TCEMA) and copolymers with methyl-α-chloroacrylate (MCA) in a range of compositions were synthesized. The reactivity ratios were obtained; the two copolymerizations were close to ideal. Poly(MCA) showed G_s = 7.4 and G_s = 0.9 by γ-radiolysis. On the other hand, poly(TFEMA) and poly(TCEMA) and G_s values of 2.0 and 2.4, respectively, and G_x = 0. Radiolysis of copolymers was initiated to a large degree by dissociative electron capture by the halogen atoms in both comonomers, as revealed by the ESR spectra of radicals derived from them. Germinal recombinations in irradiated poly(TFEMA) suggested the presence of radicals in proximity. This process was absent in the copolymers. GC-MS analysis of volatile products and other supporting evidence showed that TFEMA monomers tended to depolymerize; the TCEMA monomers did not. The radiolysis yields varied monotonically with the comonomer composition for the MCA–TFEMA system but the yield–composition relationship was irregular in MCA–TCEMA copolymers. Four noncrosslinking systems are potential radiation resists arranged in increasing order of promise: poly(TFEMA) (G_s = 2.0, T_g = 70°); poly(TCEMA) (G_s = 2.7, T_g = 142°); poly(94MCA-co-6TCEMA) (G_s = 2.7, T_g = 142°); and poly(68MCA-co-32TFEMA) (G_s = 3.0, T_g = 112°). These materials merit further investigation for E-beam or x-ray lithographic applications. Mechanisms of radiolysis for these materials, based on ESR, GC-MS, and radiolysis yield data, were discussed.     

Determination of absolute rate constants for free radical polymerization of ethyl α-fluoroacrylate and characterization of the polymer

The absolute rate constants for propagation (k_p) and for termination (k_t) of ethyl α-fluoroacrylate (EFA) were determined by means of the rotating sector method; k_p = 1120 and k_t = 4.8 × 10⁸ L/mol.s at 30°C. The monomer reactivity ratios for the copolymerizations with various monomers were obtained. By combining the k_p values for EFA from the present study and those for common monomers with the monomer reactivity ratios, the absolute values of the rate constants for cross-propagations were also evaluated. Reactivities of EFA and poly(EFA) radical, being compared with those of methyl acrylate and its polymer radical, were found to be little affected by the α-fluoro substitution. Poly(EFA) prepared with the radical initiator was characterized by differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). Although the glass transition temperature obtained by DSC for poly(EFA) resembled that of poly(ethyl α-chloroacrylate), its TGA thermogram showed fast chain de polymerization to EFA that was distinct from complicated degradation of poly(ethyl α-chloroacrylate).     

Chain scission efficiency and reactive-ion etch resistance of alternating copolymers of styrene and olefins trisubstituted or tetrasubstituted with electron-withdrawing groups

Alternating copolymers of styrene (St) with electron-deficient olefins trisubstituted or tetrasubstituted with cyano and carboalkoxy groups have been subjected to ⁶⁰Co γ-radiolysis together with a series of copolymers of methyl methacrylate (MMA) and St. The chain scission susceptibility G_s—G_x determined by membrane osmometry drastically decreases as St is incorporated in poly(methyl methacrylate) (PMMA). Whereas the alternating St-MMA copolymer is slightly crosslinked upon irradiation, an alternating copolymer of St with diethyl 2-cyano-1,1-ethylenedicarboxylate maintains a fairly high degradation sensitivity (G_s—G_x = 1.2). The reactive-ion etch rates were determined for the series of polymers in CF₄/O₂ (92/8). The etch resistance is significantly increased by introduction of St units in PMMA, and the highly substituted alternating copolymer etches as slowly as the MMA(50)—St(50) copolymers. Thus the alternating copolymer of NCCH=C(CO₂Et)₂ with St behaves like PMMA when exposed to high-energy radiation but is comparable to PSt in plasma environments.     

γ-Radiolysis of ketone polymers. II. γ-Irradiation of styrene–methyl vinyl ketone copolymers

γ-Radiolysis of copolymers of styrene and methyl vinyl ketone shows that the introduction of pendant carbonyl groups markedly increases the G(s) value as compared to the homopolymer of styrene. The G(x) value is only slightly affected. These efficiencies are determined by employing an established statistical theory for random crosslinking and scission coupled with gel-permeation chromatography as the analytical tool required to follow the changes in the MWD of polymers. Also the G(H₂) values are unaltered by the introduction of carbonyl groups in polystyrene. These results are in marked contrast to the effects of carbonyl groups in polyethylene when subjected to γ-radiolysis and can be attributed to the protective role played by the aromatic phenyl groups in polystyrene.     

Donor-acceptor complexes in copolymerization. L. Preparation and microstructure of chlorine-containing alternating conjugated diene–acceptor monomer copolymers

Neighboring monomer units cause significant shifts in the infrared absorption peaks attributed to cis- and trans-1,4 units in conjugated diene-acceptor monomer copolymers. Conjugated diene-maleic anhydride alternating copolymers apparently have a predominantly cis-1,4-structure, while alternating diene-SO₂ copolymers have a predominantly trans-1,4 structure. Alternating copolymers of butadiene, isoprene, and pentadiene-1,3 with α-chloroacrylonitrile and methyl α-chloroacrylate, prepared in the presence of Et_1.5AlCl_1.5(EASC), have trans-1,4 unsaturation. Alternating copolymers of chloroprene with acrylonitrile, methyl acrylate, methyl methacrylate, α-chloroacrylonitrile, and methyl α-chloroacrylate prepared in the presence of EASC-VOCl₃ have trans-1,4 configuration. The reaction between chloroprene and acrylonitrile in the presence of AlCl₃ yields the cyclic Diel-Alder adduct in the dark and the alternating copolymer under ultraviolet irradiation. The equimolar, presumably alternating, copolymers of chloroprene with methyl acrylate and methyl methacrylate undergo cyclization at 205°C to a far lesser extent than theoretically calculated, to yield five and seven-membered lactones. The polymerization of chloroprene in the presence of EASC and acetonitrile yields a radical homopolymer with trans-1,4 unsaturation.     

Radiolysis of resist polymers. IV. Poly(p-substituted-α-methylstyrene)s

The effect of parasubstituents on the radiation chemistry of poly(α-methylstyrene) (PMS) was compared for the fluoro (PFMS), chloro (PCMS), bromo (PBMS), isopropyl (PiPMS), and methoxy (PMeOM) derivatives. Radiolysis yields, ESR spectra, and GC? MS analysis of products were obtained. PMS and PFMS have similar low radiolysis yields, products, and product distributions. Only main-chain radicals which persist to 200° were observed. PCMS has increased values of G_s, G_x, and G_r. The product analysis results suggest that the presence of chlorine contributes to the primary process by dissociative electron capture and enhances the cleavage of α-methyl group. Irradiation of PBMS caused crosslinking and yielded few volatile products. PMeOMS and PiPMS gel readily by γ-irradiation and may be useful as negative radiation resists.     

Poly(alkyl α-chloroacrylates). IV. Tacticity analysis from 300 MHz proton magnetic resonance spectra

300 MHz proton magnetic resonance spectroscopy was applied to the determination of triad structures of three poly(alkyl α-chloroacrylates) of widely varying stereoregularities. Assignments and quantitative analyses were made for all of the tetrad peaks in the backbone methylene resonance of poly(methyl α-chloroacrylate), poly(ethyl α-chloroacrylate), and poly(isopropyl α-chloroacrylate). In addition the methyl singlet peaks of poly(methyl α-chloroacrylate), the methyl triplet peaks of poly(ethyl α-chloroacrylate) which had not been amenable previously to resolution at 220 MHz, and the methyl doublet peaks of poly(isopropyl α-chloroacrylate) were resolved, and the triad values which were obtained from these pendant ester group resonances compared favorably with triad values calculated from experimental tetrad values. As a demonstration of the internal agreement of the triad and tetrad peaks assignments, statistical calculations of the stereochemical structures of the actic and syndiotactic polymers were generally described well or to a first approximation by random selection statistics (Bernoullian) while the stereochemical statistics of the moderately to highly isotactic polymers were consistent with a nonrandom statistical process (first-order Markovian), as expected.     

Stereoregularity of poly(alkyl α-chloroacrylates) and mechanism of isotactic polymerization

The catalytic activity of the complexes prepared by the reaction of Grignard reagents with ketones, esters, and an epoxide as polymerization catalysts of methyl and ethyl α-chloroacrylates was investigated. The modifiers which gave isotactic polymers were α,β-unsaturated ketones such as benzalacetophenone, benzalacetone, dibenzalacetone, mesityl oxide, and methyl vinyl ketone, and α,β-unsaturated esters such as ethyl cinnamate, ethyl crotonate, and methyl acrylate. Catalysts with butyl ethyl ketone, propiophenone, and propylene oxide as modifiers produced atactic polymers but no isotactic polymers. It was revealed that the complex catalysts having a structure ? C?C? O? MgX (X is halogen) gave isotactic polymers. The mechanism of isotactic polymerization was discussed. In addition, for radical polymerization of ethyl α-chloroacrylate, enthalpy and entropy differences between isotactic and syndiotactic additions were calculated to give ΔH_i^* ? ΔH_s^* = 910 cal/mole and ΔS_i^* ? ΔS_s^* = 0.82 eu.     

Determination of coisotacticities of some alternating styrene–acrylic copolymers by NMR spectra

Coisotacticities σ for some alternating copolymers were determined through the analyses of their CH₃O, CH₃ and CH₂ proton NMR spectra; styrene–methyl methacrylate (σ = 0.56), styrene-methyl acrylate (σ = 0.53), styrene–methyl α-chloroacrylate (σ = 0.69), styrene–methacrylonitrile (σ = 0.19), styrene–methacrylamide (σ = 0.16), α-methylstyrene–methyl methacrylate (σ = 0.21), and α-methylstyrene–methyl acrylate (σ = 0.53) were studied. It was found that a terminal model or Bernoullian trial prevails in these complexed copolymerizations with diethylaluminum chloride. The influence of monomer structure on σ values is discussed.     

Alternating copolymerization of styrene and methyl α-chloroacrylate with diethylaluminum chloride

The alternating copolymerization of styrene and methyl α-chloroacrylate (MCA) with diethylaluminum chloride (Et₂AlCl) in benzene at 0°C has been investigated. The copolymer has an equimolar composition irrespective of the feed monomer composition, the copolymer yield and the amount of Et₂AlCl used. The copolymerization proceeds first very rapidly and then rather slowly after attaining a certain yield which varies proportionally to the amount of Et₂AlCl used. A maximum copolymer yield is observed at about 60% MCA feed composition. The ¹H-NMR analyses of dyad, triad, and pentad of the alternating deuterated α-d-St-MCA copolymer indicate that the configuration of this copolymer can be explained by a single parameter, coisotacticity σ(σ = 0.69). A favorable mechanism of the alternating propagation as well as of the stereoregularity control is discussed.     

Radiation degradation susceptibility of vinyl polymers: Nitriles and anhydrides

The effect of γ irradiation on a series of vinyl polymers, which included polymethacrylonitrile, poly(α-chloroacrylonitrile), poly(dimethyl itaconate), poly(acrylic anhydride), and poly(methacrylic anhydride), was studied as part of a program to develop improved positive lithographic resists. Radiation-induced degradation was observed for polymethacrylonitrile, poly(α-chloroacrylonitrile), and poly(methacrylic anhydride). Molecular weight degradation as a function of dose was monitored by membrane osmometry or GPC techniques. For γ-irradiated poly(dimethyl itaconate) and poly(acrylic anhydride) crosslinking was found to predominate over chain scission. [G(s)–G(x)] values, calculated from molecular weight inverse versus dose curves, indicate that both nitrile polymers degraded more efficiently than a poly(methyl methacrylate) reference standard on the basis of M _n changes. The radiation behavior of the first three polymers confirms earlier findings than vinyl polymers with quaternary carbons predominantly degrade when subjected to ionizing radiation.     

Radiolysis of resist polymers. VI. Copolymers of trihalophenylmethacrylate and methyl methacrylate

Copolymers of several compositions of methyl methacrylate (MMA), trichlorophenyl methacrylate (TCPMA), and tribromophenyl methacrylate (TBPMA) have been synthesized and characterized. Gamma radiolysis yields are very sensitive to the presence of the halogenated monomers. With less than 10% of the halogenated monomer in the copolymers. G_s values were found to be much greater than that of PMMA. However, the halogenated monomer introduces a tendency toward crosslinking. The results are consistent with the enhancement of chain scission by dissociative electron capture and the tendency of phenyl radical intermediates to cause crosslinking. These structure-property relationships were found to be valid for all the homopolymers and copolymers investigated in this series.     

Lactic acid‐ and carbonate‐based crosslinked polymeric micelles for drug delivery

Our objective was to synthesize and evaluate lactic acid‐ and carbonate‐based biodegradable core‐ and core‐corona crosslinkable copolymers for anticancer drug delivery. Methoxy poly(ethylene glycol)‐b‐poly(carbonate‐co‐lactide‐co‐5‐methyl‐5‐allyloxycarbonyl‐1,3‐dioxane‐2‐one) [mPEG‐b‐P(CB‐co‐LA‐co‐MAC)] and methoxy poly(ethylene glycol)‐b‐poly(acryloyl carbonate)‐b‐poly(carbonate‐co‐lactide) [mPEG‐b‐PMAC‐b‐P(CB‐co‐LA)] copolymers were synthesized by ring‐opening polymerization of LA, CB, and MAC using mPEG as an macroinitiator and 1,8‐diazabicycloundec‐7‐ene as a catalyst. These amphiphilic copolymers which exhibited low polydispersity and critical micelle concentration values (0.8–1 mg/L) were used to prepare micelles with or without drug and stabilized by crosslinking via radical polymerization of double bonds introduced in the core and interface to improve stability. mPEG₁₁₄‐b‐P(CB₈‐co‐LA₃₅‐co‐MAC_2.5) had a higher drug encapsulation efficiency (78.72% ± 0.15%) compared to mPEG₁₁₄‐b‐PMAC_2.5‐b‐P(CB₉‐co‐LA₃₉) (20.29% ± 0.11%).¹H NMR and IR spectroscopy confirmed successful crosslinking (～70%) while light scattering and transmission electron microscopy were used to determine micelle size and morphology. Crosslinked micelles demonstrated enhanced stability against extensive dilution with aqueous solvents and in the presence of physiological simulating serum concentration. Furthermore, bicalutamide‐loaded crosslinked micelles were more potent compared to non‐crosslinked micelles in inhibiting LNCaP cell proliferation irrespective of polymer type. Finally, these results suggest crosslinked micelles to be promising drug delivery vehicles for chemotherapy. © 2012 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2013     

Using the reversible addition–fragmentation chain transfer process to synthesize core‐crosslinked micelles

Poly(2‐hydroxyethyl acrylate)–poly(n‐butyl acrylate) block copolymers were synthesized with the reversible addition–fragmentation chain transfer (RAFT) process. The block copolymers were synthesized successfully with either poly(2‐hydroxyethyl acrylate) or poly(n‐butyl acrylate) macro‐RAFT agents. The resulting block copolymers had narrow molecular weight distributions (polydispersity index = 1.3–1.4). Copolymer self‐aggregation in water yielded micelles, with the hydrodynamic diameter (D_h) values of the aggregates dependent on the length of both blocks according to D_h ～ N_BA^1.17N_HEA^0.57, where N_BA is the number of repeating units of n‐butyl acrylate and N_HEA is the number of repeating units of 2‐hydroxyethyl acrylate. The micelles were subsequently stabilized via chain extension of the block copolymer with a crosslinking agent. The successful chain extension in a micellar system was confirmed by an increase in the molecular weight, which was detected with membrane osmometry. The crosslinked particles showed noticeably different aggregation behavior in diverse solvent systems. The uncrosslinked micelles formed by the block copolymer (N_HEA = 260, N_BA = 75) displayed a definite critical micelle concentration at 5.4 × 10^?4 g L^?1 in aqueous solutions. However, upon crosslinking, the critical micelle concentration transition became obscure. © 2006Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 44: 2177–2194, 2006     

Synthesis,microstructure, and copolymerization studies of 2-chloroethyl α-chloroacrylate

Poly(2-chloroethyl α-chloroacrylate) was synthesized by radical initiation, and its microstructure was evaluated using carbon-13 NMR. Methyl methacrylate (M₁) and 2-chloroethyl α-chloroacrylate (M₂) were copolymerized in toluene at 55°C using azobisisobutyronitrile as initiator. The reactivity ratios are 0.37 ± 0.28 and 1.21 ± 2.26, The thermal properties of these copolymers have also been reported.     

New initiator system for the anionic polymerization of (meth)acrylates in toluene. IV. Random copolymerization of (meth)acrylates in toluene initiated by s-BuLi ligated by lithium silanolates

Copolymerization of binary mixtures of alkyl (meth)acrylates has been initiated in toluene by a mixed complex of lithium silanolate  (s-BuMe₂SiOLi) and s-BuLi (molar ratio > 21) formed in situ by reaction of s-BuLi with hexamethylcyclotrisiloxane (D₃). Fully acrylate and methacrylate copolymers, i.e., poly(methyl acrylate-co-n-butyl acrylate), poly(methyl methacrylate-co-ethyl methacrylate), poly(methyl methacrylate-co-n-butyl methacrylate), poly(methyl methacrylate-co-n-butyl methacrylate), poly(isobornyl methacrylate-co-n-butyl methacrylate), poly(isobornyl methacrylate-co-n-butyl methacrylate) of a rather narrow molecular weight distribution have been synthesized. However, copolymerization of alkyl acrylate and methyl methacrylate pairs has completely failed, leading to the selective formation of homopoly(acrylate). As result of the isotactic stereoregulation of the alkyl methacrylate polymerization by the s-BuLi/s-BuMe₂SiOLi initiator, highly isotactic random and block copolymers of (alkyl) methacrylates have been prepared and their thermal behavior analyzed. The structure of isotactic poly(ethyl methacrylate-co-methyl methacrylate) copolymers has been analyzed in more detail by Nuclear Magnetic Resonance (NMR). © 1999 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 37: 2525–2535, 1999     

RAFT synthesis of amphiphilic (A‐ran‐B)‐b‐C diblock copolymers with tunable pH‐sensitivity

RAFT homopolymerization of 2‐(diisopropylamino)ethyl methacrylate (DPA) and 2‐(diethylamino)ethyl methacrylate (DEA) and their random copolymerization were investigated. The random copolymers of DPA‐ran‐DEA were synthesized and used as macro‐CTA to prepare poly(DPA‐ran‐DEA)‐b‐poly(N‐(2‐hydroxypropyl) methacrylamide) amphiphilic block copolymers. The ¹H NMR and GPC measurements confirmed the successful synthesis of these copolymers. The potentiometric titration results showed that the pK_b values of these copolymers were in the range of 6.7 ～ 7.7 and linearly varied with the DPA/DEA composition, regardless of the block length of HPMA. The pH‐induced micellization in PBS solution was verified by fluorescence spectroscopy. The dynamic light scattering evaluation showed that the hydrodynamic diameters of these micelles are between 37 ～ 43 nm © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 3740–3748, 2008     

Inverse emulsions in a molten salt/hydroxy-terminated polybutadiene system using block copolymers as emulsifiers

Block copolymers of poly(N-t-butylbenzoyl ethylenimine) and poly(N-propionyl ethylenimine) (B_x/E_y and B_x/E_y/B_x) or poly (N-lauroyl ethylenimine) and poly (N-propionyl ethylenimine) (U_x/E_y) were synthesized by cationic ring-opening polymerization of 2-substituted δ2-oxazolines. Inverse emulsions (salt-in-oil) were made using these block copolymers as emulsifiers, hydroxy-terminated polybutadiene (HTPB) as the nonpolar phase and methyl ammonium ethane sulfonate (MAES) as the polar phase. These inverse emulsions (S/O) were then cured using a triisocyanate to give a dispersion of molten salt (MAES) droplets in polyurethane. Pore sizes of these cured inverse emulsions were measured from scanning electron photomicrographs as a function of stirring time and concentrations of block copolymer and molten salt. The results indicate that pores with diameters in the range of 1.5 X 10^?6 m can be obtained using triblock copolymer B_x/E_y/B_x, and that the surfactant molecules can be spread as a monolayer at the MAES-HTPB interface.