Optical inspection and characterization of microoptics using confocal microscopy

With the growing demand for microoptics in different areas the importance of the characterization increases. Methods for a fast defect detection in microlens arrays are developed. We present a technique where the confocal principle is applied for determining the variation and the absolute value of the focal length. Additionally, using a self–filtering method the deviation of the periodic structure of microlens arrays is investigated theoretically and experimentally. Point-like defects as well as aberrations have been detected. The introduced methods allow the fast, parallel characterization of microlens arrays.     

Development of modulating permanent magnet sextupole lens for focusing of pulsed cold neutrons

Modulating permanent magnet sextupole lens (PMSx) for focusing pulsed cold neutrons is under development. The synchronized modulation of its field gradient suppresses the chromatic aberration which arises from the Time Of Flight method. The strength of the magnetic field, the torque, and the rise of temperature during its operation are studied on a fabricated prototype. Experiments on focusing pulsed very cold neutrons (VCN) at ILL (Institute of Laue Langevin, France) were carried out and VCN with around λ=40 Å were focused by the PMSx at a focal length of about 0.5 m. The experimental results are presented in conjunction with the principle of the neutron focusing and the modulating method of the focal strength of permanent magnet lens with the double ring structure.     

Design and Fabrication of Microlens Array for Near-Field Vertical Cavity Surface Emitting Laser Parallel Optical Head

A GaP microlens for collecting laser light was developed in the tip of a near-field probe. It is important to realize a near-field optical probe head with high throughput and a small spot size. The design and fabrication results of the GaP microlens array are described. The most suitable GaP microlens with a probe was calculated as having a 10 μm radius using the two-dimensional finite difference time domain (2-D FDTD) method. The full width half maximum (FWHM) spot size variation and optical power density tolerance were calculated as 157 nm ± 5 nm and 7%, respectively. A spherical GaP microlens was fabricated with a radius of 10 μm by controlling the Cl₂/Ar gas mixture ratio. The difference between the theoretical spherical shape and the fabricated GaP microlens was evaluated as 40 nm at peak to valley. The FWHM spot size and optical throughput of the fabricated microlens were measured as 520 nm and 63%, respectively. The microlens was the same as a theoretical lens with a 10 μm radius. The micron-lens array fabrication process for a near-field optical head was demonstrated in this experiment.     

A Differential Phase Detection Method for Tracking-Error Signals Using a Monolithic Confocal Laser Coupler

We previously presented the differential phase detection method using a monolithic confocal laser coupler with a confocal knife edge structure (the CKE device), which we call the CKE Pit-Edge method and which is applied to an optical disk system in which the disk has a pit depth of λ/4n. In this paper, the experimental results using this new method are reported. The experimental results agree well with the calculated results. Thus, tracking-error signals, which are very stable in the face of radial lens displacement, can be obtained for an optical disk with any pit depth using the CKE Push-Pull method and the CKE Pit-Edge method.     

Characterization of Microoptic Arrays by Evaluation of the Axial Confocal Response

Fast characterisation and defect recognition of microlens arrays is a problem unsolved. Results of measurements using a system based on the confocal principle working in parallel to determine spherical aberrations, focal lengths and void elements of microoptic arrays are presented.     

An optical technique for remote focusing in microscopy

We describe the theory of a new method of optical refocusing that is particularly relevant for confocal and multiphoton microscopy systems. This method avoids the spherical aberration that is common to other optical refocusing systems. We show that aberration-free refocusing can be achieved over an axial scan range of 70 μm for a 1.4 NA objective lens. As refocusing is implemented remotely from the specimen, this method enables high axial scan speeds without mechanical interference between the objective lens and the specimen.     

Limitations of the Shack–Hartmann sensor for testing optical aspherics

Aspheric lenses and surfaces are increasingly used in modern high-quality optics. Therefore, new measuring methods for an accurate quantification of these aspheres are also necessary. The current approach to quantify aspheres is to apply null systems such as computer-generated holograms as a part of a null lens in a interferometer. An alternative to this method is the Shack–Hartmann wavefront sensor. The dynamic range of this sensor can be adjusted by the optical parameters of the applied microlens array. Hence, large wavefront aberrations can be measured directly without a null lens. However, there are basic limitations in the dynamic range of a Shack–Hartmann sensor (SHS) depending on the curvature of the incident wavefront. In this paper, an analytical expression to determine the strongest wavefront curvature which can be measured with a defined microlens array of an SHS is derived. It allows to calculate the microlens parameters required to measure the wavefront of a test lens. Particularly, the influence of rotational symmetric aspherical wavefront shapes to the dynamic range of an SHS has been studied. A comparison between interferometry and the SHS has been accomplished. Numerical solutions using scalar diffraction theory illustrate the analytical predictions.     

应用场光线传递方程计算鱼眼镜头像场像差

应用场光线传递方程,从鱼眼镜头的孔径光阑处,逆向追迹场光线传递方程,确定任意视场角场光线的初始位置,即光阑球差.正向追迹场光线计算鱼眼镜头系统物、像空间视场角之间的关系曲线;用多项式拟合求出关系曲线的解析表达式.通过反演运算,根据畸变图像复原物的图像分布,达到消除鱼眼镜头成像系统畸变的目的.最后,计算了一个160°鱼眼镜头光学系统的光阑球差和图像的畸变,并应用本文方法复原物的图像分布.计算结果表明:光阑球差的计算结果与真值的相对误差小于1%;复原的物方图像径向高度相对误差小于0.25%,说明本文计算鱼眼镜头像场像差的方法是可行的.     

Suppression of primary chromatic aberration by genetic algorithm in an advanced telephoto lens

This paper proposes a new method for finding a suitable glass combination set for an advanced telephoto lens via a genetic algorithm (GA). Normally, glass properties, inclusive of index and Abbe number, play a significant role in the elimination of primary chromatic aberration. So many optical glasses (over 300 different refractive types) have been developed hitherto that it is difficult to choose a state-of-the-art glass combination quickly. According to the newly developed GA operations in this paper, however, several suitable glass combinations can be found quickly through a unique sequence of function selection, crossover and mutation. An advanced telephoto lens design is employed in this research, which has the characteristic of being more sensitive to axial aberrations than lateral chromatic aberrations. The GA operations are described in the macro of the optical software program, CODE V. The simulation results in this research show that the primary chromatic aberration is efficiently eliminated after the application of GA. The main goal of this research is that during optimization, error function could be minimized only if primary aberrations are well under control in our first step; in a telephoto lens, the secondary spectrum of longitudinal chromatic aberration and lateral chromatic aberration caused by distortion play a role in chromatic aberration control as well; however, optimization with a combination of both primary chromatic aberration and secondary chromatic aberration will complicate the process with a lot of working variables. The GA method introduced in this paper might efficiently eliminate the primary chromatic aberration first by finding the best glass combination and its trend and then simplifying the following optimization process for all optical systems.     

Effect of Interference on Scanning Performance of fθ Lens Fixed by a Shrink Fitter

An ultra-precise method of joining optical lenses in a housing by a shrinkage fit has been developed using a shrink fitter, which is a cylindrically shaped machine element made of a plastic material. In this method, the form error of the shrink fitter increased the interference of shrinkage fit which caused a lens deformation much greater than the limitation of surface irregularity of λ/2. With an fθ lens unit of the laser scanner, this lens deformation may deteriorate the laser beam spots on an image plane. Therefore, the shrink fitter is carefully and precisely turned, however this takes time and costs money. This is a contact problem between the optical lenses and the shrink fitter. In this paper, to determine limit interferences of the shrink fitter, the effect of the interference of the shrinkage fit on the scanning performance was examined through computer simulation.     

左手性介质平板透镜系统的赛德尔像差特性

根据初级像差理论广泛研究了由左手性介质构造的平板透镜系统的赛德尔像差特性.由初级像差加和定理推导了适合于这种系统的赛德尔和数公式,并指出了寻找消赛德尔像差的平板透镜系统的方法.作为两个特例,分别讨论了消赛德尔像差的左手性介质单透镜和双胶合透镜系统.     

Compensation for chromatic aberrations in acousto-optic systems used in spectral analysis of images

This paper considers novel optical schemes that are related to acousto-optic systems for the spectral analysis of images. The systems are characterized by a low level of transverse and longitudinal chromatic aberrations. Mathematical expressions that describe the magnitudes of the transverse aberration in various configurations of acousto-optic filters are derived. A decrease in longitudinal chromatic aberrations is examined in an optical scheme that is based on a single objective lens and an additional negative lens. A similar analysis is carried out for a confocal system that is formed of two objective lenses. The experimental investigations carried out in the visible range of the spectrum demonstrated a decrease in the longitudinal shifts of images by a factor of 2.5 and by as much as two orders of magnitude or more in the transverse image shifts.     

Two-Dimensional Alignment-Free Optical Interconnect Using Micro Optical Bench Scheme

In this paper, we have proposed and demonstrated a novel packaging method involving a vertical cavity-surface emitting laser (VCSEL) array. The concept is based on micro optical bench (MOB) placing a laser sub-mount and two-dimensional optical fiber array to match the reference plane of MOB to provide an alignment free optical interconnect. No degradation of I-V and I-L characteristics of the packaged VCSELs was found after use of the proposed packaging process. The coupling loss was about 0.9 dB for λ = 1.55 μm and the loss deviation among channels was less than 0.5 dB in a 2 x 4 ch coupling module between planar microlens and multi-mode fibers.     

基于固定校正板和透镜阵列的机载共形窗口像差校正

为了校正大扫描视场机载共形窗口引入的像差,提出一种基于固定校正板和透镜阵列的静态校正方法。首先使用固定校正板校正静态像差;然后在像面前安置固定的透镜阵列,利用透镜阵列中的各个透镜单元分别校正不同扫描角度的动态像差;最后基于所提方法设计应用在机载共形光学系统中的像差校正器。设计结果表明,所提方法在±42°的扫描视场范围内能够良好地校正共形窗口引入的像差。与其他动态或静态校正方法相比,所提方法可以实现大扫描视场机载共形光学系统像差的校正,同时降低机载共形光学系统的质量,提高系统的稳定性。     

Liquid-crystal microlens arrays using patterned polymer networks

A real-time dynamically tunable-focus microlens array made from a polymer-liquid-crystal (LC) composite is demonstrated. The polymer was first patterned in microlens array cavities by lamination, and the LC-monomer mixture was then injected to the molded polymer cavities and finally stabilized by UV light-induced networks. Using this new fabrication method, we demonstrated a lens with a spherical shape and a glazed surface. This LC-based microlens can reach approximately 100% light efficiency for linearly polarized light. The saturation voltage of the lens is approximately 60 Vrms, and the response time is approximately 30 ms.     

Lens Sag Measurement of Microlens Array Using Optical Interferometric Microscope

This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared.The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe.When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays.     

梯度透镜折射率分布高次项系数的数值计算

本文从光线方程出发,给出了一系列利用径向梯度透镜球象差进行数值计算求解折射率分布高次项系数的公式及测量计算结果。     

Applications of Liquid Crystals to Variable-Focusing Lenses

Liquid Crystal (LC) lens cells with variable focusing properties are fabricated using nematic LC materials and applicable to optical devices, and our recent work on these cells is described. First, the LC lens cells are prepared using lens-shaped substrates coated with transparent electrodes. Their focal length can be continuously varied between the values for an ordinary ray and an extraordinary ray by changing the voltage passing across them. Methods of improving properties and some applications of the lens-shaped LC lens are briefly described. The lens properties of these cells with plane-paralleled structure are then demonstrated, where the refractive index is graded to a quadratic distribution resulting from an axially symmetric non-uniform electric field. LC cells with axially distributed tilt angles are constructed using a pair of circular hole-patterned electrode substrates and very small LC lens (LC microlens) with variable focusing can be fabricated. Optimizing the electrode structure, device parameters, and material parameters of the LCs, excellent focusing properties can be obtained. The properties of the LC microlens are improved by using the polymer stabilization technique. The LC microlens with a divided electrode structure shows three-dimensional beam steering and focusing properties, and the astigmatic aberration caused by the molecular orientation effect can be compensated. Applications of the LC microlens to optical devices and systems are introduced.     

Determination of optical field generated by a microlens using digital holographic method

In the paper, application of the digital holographic method for full field characterization of the beam generated by microlenses is considered. For this goal, the laboratory setup was designed based on Mach-Zehnder interferometry with the additional reference channel. The beam generated by a microlens was imaged by an afocal system and intensity distributions or interferograms (holograms) were registered by CCD camera. The digital holography using one image allows us to determine microlens parameters, i.e., focal length, aberrations, and shape. The optimum conditions to determine the surface shape of a microlens using holographic method have been found. We compare obtained results with geometrical and interferometric measurements. We show the advantage of digital holography for a shape microlens determination (improved accuracy), aberrations, and focal length (characterization facility). Through optimum refocusing, the digital holography gives more precise shape. The paper is accompanied with computer simulations and the experimental measurement data for geometrical, interferometric, and holographic methods.     

Differential algebraic method for arbitrary-order chromatic aberration analysis of electrostatic lenses

In this paper, differential algebra is applied to calculate arbitrary high-order chromatic aberrations of electrostatic electron lenses. Expressions of differential algebraic form of high-order combined chromatic aberration coefficients are obtained and arbitrary-order chromatic aberrations can be calculated numerically. As an example, a typical Schiske's electrostatic lens has been studied. All the first- to third-order chromatic aberration coefficients of the lens have been calculated, and the pattern of the first-order chromatic aberration has been given as well.