等离子体密度对放电等离子体极紫外光源影响研究

等离子体状态是决定极紫外光源功率和转换效率的最重要因素之一,理论和实验研究上Xe气流量对放电等离子体极紫外光源辐射谱和等离子体状态的影响,对于优化光源工作条件具有重要的意义。理论上,采用碰撞-辐射模型,模拟了非局部热力学平衡条件下,不同电离度的离子丰度分布随电子温度和离子密度的变化。推导了Xe8+~Xe11+离子4d-5p跃迁谱线强度随电子温度的变化趋势。实验上,采用毛细管放电机制,利用罗兰圆谱仪测量和分析了不同等离子体密度条件下,放电等离子体极紫外光谱的变化,分析了Xe气流量对等离子体状态的影响。理论和实验结果表明： 相同的电流条件下,等离子体箍缩时的平均电子温度随着Xe气流量的增加而降低。对于4d-5p跃迁,低电离度离子与高电离度离子谱线强度的比值随着温度的增加而减少。电流28 kA、Xe气流量0.4 sccm(cm3·min-1)时,等离子体Z 箍缩平均电子温度位于29 eV附近。Xe气流量增加时,受离子密度和最佳电子温度的影响,实现Xe10+离子4d-5p跃迁13.5 nm(2%带宽)辐射谱线强度最优化的Xe气流量位于0.3~0.4 sccm之间。     

基于脉冲CO2激光锡等离子体光刻光源的极紫外辐射光谱特性研究

研究了不同条件下脉冲放电CO₂激光烧蚀平板锡靶产生的等离子体极紫外辐射特性, 设计并建立了一套掠入射极紫外平焦场光栅光谱仪, 结合X射线CCD探测了光源在6.5～16.8 nm波段的时间积分辐射光谱,得到了极紫外光谱随激光脉宽, 入射脉冲能量及背景气压的变化规律。实验结果发现：入射激光脉冲能量在30～600 mJ变化时,极紫外辐射光谱的强度随辐照激光脉冲能量的增加而增加, 但并不是线性关系, 具有饱和效应, 且产生极紫外辐射的脉冲能量阈值约为30 mJ,当激光脉冲能量为425 mJ时具有最高的转换效率,此时中心波长13.5 nm处2%带宽内的转换效率约为1.2%。激光脉冲半高全宽在50～120 ns范围内变化时, 极紫外辐射光谱的峰值位置均位于13.5 nm,光谱形状几乎没有什么变化, 但是脉宽从120 ns变到52 ns后,由于激光功率密度的提高,极紫外辐射强度也随之增强了约1.6倍。极紫外光谱的强度随背景气压的增大而迅速下降, 当腔内空气气压为200 Pa时, 极紫外辐射光子几乎被全部吸收,而当缓冲氦气气压为7×104 Pa时,仍能够探测到微弱的极紫外辐射信号,计算表明100 Pa的空气对13.5 nm极紫外光的吸收系数为3.0 m-1,而100 Pa的He气的吸收系数为0.96 m-1。     

660 nm单一波长Nd:YAG陶瓷激光器

 针对陶瓷晶体1319 nm的谱线设计了适合的谐振腔腔镜膜系参量,采用激光二极管列阵侧向抽运掺杂1.1at%、Φ3×50 mm的Nd:YAG陶瓷,利用色散棱镜及KTP晶体Ⅱ类匹配腔内倍频,研制了一台660 nm单一波长输出的高重频Nd:YAG陶瓷红光激光器.根据陶瓷晶体的热透镜焦距设计了谐振腔的各个参量,在重复频率为1000 Hz、单脉冲抽运能量约144 mJ时,获得了3.9 mJ的660 nm脉冲激光输出,总的光-光转换效率为2.71%.为进一步研究大功率、高效率的陶瓷红光激光器奠定了基础.     

670nm电光调Q陶瓷激光器

为了进一步研究Nd∶YAG陶瓷激光器的红光波段,研制了一台重复频率为1 000 Hz的670 nm电光调Q Nd∶YAG陶瓷激光器.采用三个激光二极管列阵侧面抽运掺杂浓度为1.1at%、尺寸为Φ3×50 mm2的Nd∶YAG陶瓷晶体,根据实验测量的陶瓷晶体热透镜焦距,优化设计了折叠腔的各个参量,并对陶瓷晶体及倍频晶体热...     

LD泵浦Nd：YAG/Cr：YAG腔外频率变换高功率紫外激光器

用KTP晶体对激光二极管端面泵浦的Nd:YAG晶体;Cr:YAG被动调Q产生的1064nm脉冲激光器进行腔外倍频,用BBO晶体四倍频产生266 nm紫外激光.用15 W的LD阵列;当LD泵浦功率为12 W的情况下;红外(1064 μm)调Q平均输出功率为2.2 W;脉冲序列周期为40 μs;脉宽为18ns;峰值功率高达4.9kW.采用KTP腔外二倍频;532nm的绿光输出平均功率为850mW;用BBO腔外四倍频;266nm的紫外光输出平均功率高达215mW，绿光-紫外光光转换效率为25.2%, 红外到紫外总的转换效率为9.8%.     

多波长半导体激光阵列端泵Nd:YAG脉冲激光器

研制了无温控多波长激光二极管阵列端面泵浦Nd：YAG电光调Q激光器。采用4 000 W多波长准连续激光二极管阵列作为泵浦源,快轴准直镜与透镜导管作为泵浦耦合系统,端面泵浦φ6 mm×60 mm的Nd：YAG晶体,并采用RTP晶体进行电光调Q实验。在重复频率5 Hz、室温（25℃）时,激光器获得了最大输出能量74.4 mJ、脉宽15 ns的1 064 nm脉冲激光输出,光光转换效率达到11%。在25~55℃的工作温度下,对多波长LDA的光谱特征与激光器的输出特性作了测试,激光器输出能量随着工作温度的上升而先迅速下降再逐步保持稳定,当重复频率分别为5 Hz和10 Hz时,激光器对应的最低输出能量分别为48 mJ与37 mJ。     

A Model for Extreme Ultraviolet Radiation Conversion Efficiency From Laser Produced Mass-Limited Tin-Based Droplet Target Plasmas

Simple arguments are used to construct a model to explain the extreme ultraviolet radiation conversion efficiency(EUV-CE) of a tin-based droplet target laser produced plasmas by calculating the laser absorption efficiency,radiation efficiency,and spectral efficiency.The dependence of drive laser pulse duration and laser intensity on EUV-CE is investigated.The results show that at some appropriate laser intensity,where the sum energy of the thermal conduction,out-off band radiation and plasma plume kinetic losses is at a minimum,the EUV-CE should reach a maximum.The EUV-CE predicted by the present simple model is also compared with the available experimental and simulation data and a fair agreement between them is found.     

高能量高转换效率355 nm紫外激光器

为了得到一种三倍频效率高达60%的355 nm脉冲激光器,采用曲率半径分别为2 m的凹凸高斯镜和9 m的平凹全反镜组合作为谐振腔,加以电光调Q,得到1 064 nm高光束质量激光输出,再将其进行行波放大,获得重复频率10 Hz、脉宽7.3 ns、单脉冲能量1.01 J的1 064 nm基频光输出。利用Ⅰ类相位匹配LBO晶体进行二倍频、Ⅱ类相位匹配LBO晶体进行三倍频以得到波长为355 nm的紫外光输出。通过二倍频和三倍频输出特性和非线性晶体参数的分析和实验调试,最终获得了单脉冲能量为608 mJ、脉宽为5.7 ns、线宽为2 nm的紫外激光输出。通过优化二倍频的转换效率,可使1 064 nm基频光到三倍频得到的355 nm紫外光的转换效率达60%。     

The effects of pulsed Nd:YAG laser irradiation on surface energy of copper

The effect of laser surface treatment on the surface energy of copper plate was investigated in terms of the surface microstructure analysis and theoretical computation in this paper. The surfaces of the copper plates were treated by Nd:YAG pulsed laser with different powers. The microstructures of the treated copper plates were analyzed by optical microscopy and X-ray diffraction (XRD), and the wetting experiment was performed to evaluate the variation of surface energy. The results showed that the surface microstructure and the corresponding surface energy of copper, changed with the variation of the laser power. The experimental results further explained by XRD results and theoretical calculation, demonstrated that the surface energy changed when the crystal structure in the surface layer was re-oriented in a preferred orientation after laser irradiation.     

Laser welding of glasses using a nanosecond pulsed Nd:YAG laser

This work reports on laser welding of two 1 mm thickness borosilicate glasses through the irradiation with a nanosecond pulsed laser, as a novel alternative to the use of ultrashort pulsed lasers for welding of transparent materials. Two different methodologies were investigated and compared in terms of interface quality. In a first approach, the glasses were joined without any absorbing intermediate layer. However, the bond interface possesses defects. To improve the resulting bond interface, the use of a titanium ultrathin intermediate layer was proposed to weld the glasses substrates, acting as a sealant between them. The laser parameters were optimized to achieve the best joining conditions of the Ti film. The use of the Ti layer gives rise to a bond interface more homogeneous and free of damages. As a further step, thin glasses of 86 µm thickness, of great technological value, were joined through the Ti film as well. The joined interfaces were inspected through optical microscopy and scanning electron microscopy (SEM) while the bond quality was evaluated by Scanning Acoustic Microscopy (SAM).     

离轴抽运对Nd:YAG激光器振荡模式影响的研究

以激光二极管端面抽运固体激光器为研究对象,通过实验研究了离轴抽运条件下,离轴量的大小对Nd:YAG激光器的振荡光阈值、振荡模式、光束质量以及激光器的斜效率的影响,分析了在同一抽运位置改变LD电流时输出光位置及模式的变化情况.实验结果表明,当抽运光离轴量增大时,斜效率增大,但输出光依次出现从低阶模到高阶模的变化,激光器的振荡阈值升高,光束质量变差;在同一抽运位置增大LD电流时,输出光从高阶模向低阶模转化,光斑中心向此时的抽运中心轴靠拢.     

Laser induced copper electroless plating on polyimide with Q-switch Nd:YAG laser

The results of laser induced deposition of copper on polyimide substrate from copper electrolyte solution are reported. Unlike most work reported in the literatures where CW Ar⁺ lasers were used, a second harmonic (532 nm wavelength) Q-switch Nd:YAG laser was used for our experiments. The deposition process was conducted by laser-catalyzing of the polyimide surface and subsequent photothermal-accelerated reduction of copper-complex ions in an alkaline reducing environment. The characteristics of the deposited copper line were investigated in terms of laser beam scanning speed, and the number of scans. The surface morphology and chemical composition of the deposited copper were analyzed using field emission scanning electron microscope (FESEM) and energy dispersive spectrometer (EDX). The optimum processing conditions have been identified. The copper deposit was found to adhere well to the substrate.     

基于小波能量和光斑尺寸的干扰图像尺度分析

介绍了激光干扰对CCD成像系统的影响,从影响光电成像系统目标检测性能的角度阐述了激光干扰图像与背景杂波的相似性.针对激光干扰图像的频率特性,利用小波分析在图像处理中的优势,结合机器视觉中背景杂波的量化尺度,提出了基于小波能量和光斑尺寸的综合图像尺度.对典型激光干扰图像的小波分析显示,随着激光干扰功率的增大,干扰图像中的低频分量和高频分量会同时增加,图像中的光斑可被看作是低频分量,光斑周围“斑驳状”的散斑是高频分量,类似于盐噪音.激光视场内干扰实验及数值计算表明:激光干扰会降低Otsu算法分割准确度,增加相关检测虚警概率,该尺度将干扰图像的高频分量和低频分量结合起来,同时克服了单一光斑尺度和小波能量尺度的局限性,能够较好地评估视场内激光干扰CCD成像系统的效果.     

高峰值功率大能量Nd:Ce:YAG激光器的研究

将氙灯抽运Nd:Ce:YAG激光器作为主振荡器,一级抽运Nd:YAG放大,实现了能量为1.8 J,脉宽为8 ns,束散角为2.3 mrad,重复频率为20 Hz的激光输出,峰值功率达0.22GW.该激光器体积更小,效率更高,可靠性更强.     

Bi靶激光等离子体极紫外光源以及碎屑辐射特性研究

激光等离子体极紫外光源具有体积小、稳定性高和输出波长可调节等优势,在极紫外光刻领域发挥着重要的作用。Bi靶激光等离子体极紫外光源在波长9～17 nm范围内具有较宽的光谱,可应用于制造极紫外光刻机过程中所需的极紫外计量学领域。利用平像场光谱仪和法拉第杯对Bi靶激光等离子体极紫外光源以及离子碎屑辐射特性进行了实验研究。在单脉冲激光打靶条件下,实验中观察到Bi靶激光等离子极紫外光谱在波长12.3 nm处出现了一个明显的凹陷,其对应着Si L-edge的吸收,是Bi元素光谱的固有属性。相应地在波长为11.8和12.5 nm位置处产生了两个宽带的辐射峰。研究了两波长光谱特性以及辐射强度随激光功率密度的变化。结果表明,在改变聚焦光斑大小实现不同激光功率密度（0.7×1010～3.1×1010 W·cm-2）过程中,当功率密度为2.0×1010 W·cm-2时两波长处的光辐射最强,其原因归结为Bi靶极紫外光辐射强度受激光能量用于支撑等离子膨胀的损失和极紫外光被等离子体再吸收之间的平衡制约所致。在改变激光能量实现不同激光功率密度过程中,由于烧蚀材料和产生两波长所需高阶离子随着功率密度的增加而增加,增强了两波长处的光辐射。进一步,研究了双脉冲激光对Bi靶极紫外光谱辐射特性影响,实验发现双脉冲打靶下原来在单脉冲打靶时出现在波长13～14 nm范围内的凹陷消失。最后,对单脉冲激光作用Bi靶产生极紫外光源碎屑角分布进行了测量。结果表明,当探测方向从靶面法线方向移动到沿着靶面方向上的过程中,探测到Bi离子动能依次减小,并且离子动能随激光脉冲能量降低而呈线性减小。此项研究有望为我国在研制极紫外光刻机过程所需的计量学领域提供技术支持和打下夯实的基础。     

nc-Si/SiNx超晶格薄膜实现Nd:YAG激光器调Q和锁模

采用射频磁控反应溅射法制备a-Si/SiNx超晶格薄膜材料,热退火后形成纳米Si晶粒。把nc-Si/SiNx薄膜作为饱和吸收体插入Nd:YAG激光器腔内,在腔长较短时,实现1.06μm激光的被动调Q运转,获得最小脉宽23ns的调Q单脉冲输出,当腔长增加到124cm时,获得平均脉宽35ps的锁模脉冲序列。根据实验现象结合薄膜结构,分析了材料调Q与锁模的产生机制,并研究了不同工作条件下的调Q输出性能。     

Accuracy control of three-dimensional Nd:YAG laser shaping by ablation

Improving the dimensional accuracy along the optical axis without decreasing the materials removing rate is a key issue in three-dimensional laser shaping. This paper presents a concept for performing three-dimensional laser shaping by directly using machining laser as the photo source of the non-contacting measuring device. Due to the high power measuring photo source and a 1.06 μm bandpass filter, the interference caused by the emission light of ablated surface can be effectively avoided, the delay time is not needed to be inserted between the laser pulse and the measurement. So the measurement will not decrease the material removal rate and productivity. By using this system, the shaping accuracy of 30 μm can be achieved at the removing rate of about 4.0×10⁻² mm³/sec for Si₃N₄ ceramic, both are much better than the results obtained before.     

基于LD双端面泵浦的Nd:YAG高效率倍频激光器

报道了一种利用激光二极管（LD）双端面泵浦的Nd：YAG激光晶体,Cr⁴⁺：YAG晶体被动调Q,LBO临界相位匹配腔内倍频的高转换效率的绿光激光器。分析了双端面泵浦YAG激光器的热效应,实验中LD双端面泵浦,采用U型平行平面腔结构对Nd：YAG进行传导冷却。当总泵浦光为33.8 W时,得到被动调Q频率10 KHz、功率8.21 W的线偏振基频光输出。6.72 W的绿光输出的倍频效率为86%,输出光束为基模,M²为1.4。实验表明双端面泵浦YAG倍频激光器具有很高的转换效率。     

1 444 nm Nd:YAG激光输出效率的理论分析

从激光晶体能级结构出发,利用速率方程,分析了Nd:YAG激光系统的放大自发辐射(Amplified Spontaneous Emission,ASE)和激发态吸收(Excited State Absorption,ESA)对激光输出的影响.介绍了输出耦合及抽运和热效应对1 444 nm激光输出的影响.在反射率为0.80～0.95之间,输出耦合对输出效率影响不明显.