Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

A dynamic 3D nano-scale surface profilometer using stroboscopic white-light interferometry with novel signal deconvolution was developed to deliver dynamic surface profilometry with a measurement bandwidth of up to a MHz scale and a vertical resolution reaching 1 nm. Previous work using stroboscopic microscopic interferometry for dynamic characterization of micro-(opto)electromechanical systems (M(O)EMS) has been limited in measurement bandwidth of less than a few hundred kHz due to physical length limitation of stroboscopic light. For high-resonance mode analysis, the stroboscopic light pulse is too lengthy to capture the moving fringes from dynamic motion of the detected structure. In view of this need, a novel deconvolution algorithm using correction of the light response was developed for removing potential image blurs caused by the unavoidable vibration of the tested parts. With this advance in technology, the bandwidth of dynamic measurement can be significantly increased without sacrificing measurement accuracy. A microcantilever beam used in AFM was measured to verify the capability of the system in accurate characterization of dynamic behaviors of M(O)EMS.     

High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens

This paper describes a novel fiber-coupled heterodyne interferometer using a micro-electro-mechanical system (MEMS) mirror and an f-theta lens. In this interferometer system, the cross-polarized laser beams operating at 2 μm with the frequency difference of 100 kHz are introduced by means of the two acousto-optic modulators (AOM). The sample with diameter of 300 mm is uniformly scanned by the 1 mm laser beam with the help of the combined optical scanning configuration, a MEMS mirror and an f-theta lens. The output intermediate signal from the two channels, reference channel and the measurement channel, are processed in the 12 bit analog-to-digital (A/D) process system. Details of our interferometer scheme are discussed.     

微结构特性的光学测试平台

微结构是微机电系统的基本元件,其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台,分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明,利用计算机微视觉和频闪成像技术能够实观微结构的平面位移、运动相位及喈振频率等周期运动参量的测试．位移的重复精度为30nm;利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试．位移的重复精度为3nm;激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点．是时域上周期运动测试的重要补充。     

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.     

Dual-frequency optical pumping for spin-polarizing a lithium atomic beam

A lithium-6 atomic beam is spin-polarized by means of optical pumping with a single-mode dye laser operating on the resonance transition. Simultaneous pumping of both hyperfine substates is achieved by frequency-splitting the laser light with an acousto-optic modulator. A polarization dependent signal, obtained by probing the optical activity of the beam with linearly polarized light, is utilized in a microprocessor-controlled laser stabilization scheme. The polarization is analyzed with a sextupole magnet and its overall value is 0.70 for an intensity of 1×10¹⁴ atms s⁻¹. By reversing the sense of circular polarization of the pumping light the atomic beam polarization is easily reversed in direction.     

利用Mirau显微干涉仪测量微器件的纳米级运动

描述了一种用于微机电系统（MEMS）纳米级微运动测量的Mirau显微干涉系统.该系统利用商业化的Mirau显微干涉仪，它直接安装在光学显微镜上，用于测量一个表面微加工水平谐振器的三维运动.面内运动取决于亮场在最佳焦平面处的图像，而离面运动则取决于频闪得到的干涉图像，该图像在物镜纳米定位器的8个不同位置处得到.实验结果表明了系统进行面内和离面运动测量的纳米级分辨力.     

在LiNbO3:Fe晶体中写入Y结孤子的实验研究

采用振幅掩模穿过部分空间非相干光的方法产生一暗迹,将暗迹成像在晶体前表面,得到入射暗迹半高宽为16.75 μm,入射光功率为400 μW.基于LiNbO3:Fe晶体的强光伏效应,在无背景光辐照时,在晶体内写入一对部分空间非相干Y结暗光伏孤子.实验结果表明：在无背景光辐射时可以在LiNbO3:Fe晶体内写入部分空间非相干Y结孤子.     

同步光干涉方法对BEPCⅡ储存环束流的测量

 利用同步光的可见光波段空间干涉方法,对北京正负电子对撞机储存环的束流横向截面垂直尺寸进行了测量。在同步模式下,测得束流横向截面垂直尺寸为155 μm,测量结果与理论值符合得很好。此方法避免了同步光衍射带来的测量误差,并使结果更精确,且对其它非相干小尺寸光源也同样适用。     

Entangled-photon imaging of a pure phase object

We demonstrate experimentally and theoretically that a coherent image of a pure phase object [implemented by a microelectromechanical system (MEMS) micromirror array] may be obtained by use of a spatially incoherent illumination beam. This is accomplished by employing a two-beam source of entangled photons generated by spontaneous parametric down-conversion. One of the beams probes the phase object while the other is scanned. Though each of the beams is, in and of itself, spatially incoherent, the pair of beams exhibits higher-order interbeam coherence.     

非相干光源用于“核-环比”法测量表面粗糙度

本文将文献[1-5]的用激光测量表面粗糙度的“核-环比”法推广到采用其他非相干光源,给出测量原理的定量公式及测量装置的结构框图。     

基于布拉格声光衍射场的光强非均匀空间分布研究

为了保证合成孔径激光雷达测试中信号光的光束质量,从波动方程出发,推导出传统的衍射光源布拉格声光作用的耦合波方程。根据测试对光束质量的不同要求,借助有限差分方法分析衍射场光强的空间三维分布,发现声场振幅的不均匀分布会影响声光衍射场的光强分布,光强分布不均造成实验中信息光源的探测难度。通过光强空间分布研究增大有效通光孔径到3 mm,解决了声光调制器光束衍射质量问题,改进后的光束质量达到实验要求。该研究方法适用于改进声光器件工作参数。     

Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement

We report a sinusoidal fringe projection system based on superluminiscent diode (SLD) as a broad-band light source in conjunction with an acousto-optic tunable filter (AOTF) as frequency tuning device for three-dimensional shape measurement. The present system is based on a compact low-coherence Michelson interferometer system. The conventional interferometric system was modified in which one side of the beam splitter was coated with aluminum oxide which is used as reference mirror. With this modified version, interference fringes can easily be obtained by simply placing the external mirror in contact on the other side of beam splitter. Sinusoidal fringes with multiple spatial-carrier frequency can be generated in real-time using the present system by means of changing the radio-frequency signal to AOTF electronically without mechanically moving any component in the system. The present system was tested by projecting the sinusoidal fringes on a step-like object and 3D shape of the object was reconstructed using Fourier transform fringe analysis technique. The main advantages of the proposed system are completely non-mechanical scanning, easy to align, high stability because of its nearly common-path geometry and compactness.     

基于频移反馈腔的全光纤射频调制脉冲激光研究

射频调制的脉冲激光是激光雷达探测领域内的一项重要研究内容.根据声光斩波器的强度和频率调制特性,设计了基于频移反馈腔的全光纤射频调制脉冲激光.理论上,建立了基于频移反馈腔的激光外差相干理论模型,并进行了数值仿真.根据理论模型,实验上严格控制频移反馈腔的长度和声光斩波器触发信号的周期,在100 MHz的射频信号驱动下,产生了脉冲宽度110 ns、重复频率约20 kHz的具有最高700 MHz射频调制的脉冲激光(脉内调制激光);同时微调斩波周期可以实现脉冲前沿或后沿的多样性射频调制.通过改变反馈腔内光纤放大器的输出功率实现了射频调制深度的连续可调,最高达到了0.67.     

基于声光栅的变频条纹投射系统

针对三维形貌测量中结构光照明系统投影速度慢、结构复杂、在线集成困难的问题,提出了一种基于声光栅的变频条纹投射系统。该系统利用拍频信号驱动声光偏转器,在声光晶体中形成两个重叠的光栅,光源发出的激光以布拉格角入射,形成两束一级衍射光,经透镜聚焦形成光强按正弦规律分布的结构光条纹。建立了数学模型,同时提出了一种新的相位凝固技术,使条纹空间频率和相位的变化规律得到了很好的解释。该系统结构紧凑、体积小,全电控可调,无任何机械移动部件,具有条纹投影速度快、精度高、动态可编程的特点。应用该系统对石膏像形貌进行测量,获得了用于三维成像的相位图。该投射系统对于解决复杂几何形状物体的三维测量问题具有较高的工程应用价值。     

Incoherent vector vortex-mode solitons in self-focusing nonlinear media

We suggest a novel type of composite spatial optical soliton created by a coherent vortex beam guiding a partially incoherent light beam in a self-focusing nonlinear medium. We show that the incoherence of the guided mode may enhance, rather than suppress, the vortex azimuthal instability, and we also demonstrate strong destabilization of dipole-mode solitons by partially incoherent light.     

利用频闪结构光测量旋转叶片的三维面形

在对快速甚至高速运动物体进行研究时,需要对运动物体各个时刻的三维面形和形变量进行数字化描述。提出了一种利用频闪光作为结构照明光源,基于傅里叶变换轮廓术对旋转叶片每个时刻的三维面形和变形量进行动态测量的光学方法。使用自行设计的同步控制单元对风扇叶片旋转位置进行检测,用该检测信号同步驱动频闪结构光源的发光和图像采集系统“冻结”记录下旋转叶片表面变形条纹的瞬时图像,再运用傅里叶变换轮廓术计算出每一瞬间时刻旋转叶片的三维面形,分析这些三维面形数字化结果可以进一步得到旋转叶片的变形量。通过对家用电风扇的实验,验证了该方法的合理性和可行性。该方法可望在高速运动物体的面形和变形研究上有广泛运用。     

Measurement of the Mutual Coherence Function of an Incoherent Infrared Field with a Gold Nano-wire Dipole Antenna Array

The first direct measurement of the mutual coherence function of a spatially incoherent infrared beam was performed at 10.6 μm using a pair of infrared dipole nano-wire antennas that were connected to a common bolometer in the center of the pair by short lengths of coplanar strip transmission line. A spatially incoherent source was constructed by dithering a BaF2 diffuser near the focus of a CO2 laser beam. The distance from the diffuser to the nano-wire antenna pair was held constant while the distance from the focus of the laser beam to the diffuser was varied to control the effective diameter of the source. The measured bolometer signal was proportional to the magnitude of the mutual coherence function at the plane of the antennas. The experimental results were found to match the predicted performance closely. If this technology can be extended to large arrays, a form of synthetic aperture optical imaging based on the Van Cittert-Zernike theorem is possible, similar to that performed at microwave frequencies now by astronomers. This has the potential to greatly increase the angular resolution attainable with optical instruments.     

基于微机电系统红外光源的长光程气体检测

针对红外气体传感器对光源的要求,选用了一种宽波长、高调制频率、低功耗的小体积微机电系统(micro-electro-mechanic system, MEMS)红外光源作为辐射源,其各项性能均能很好的满足红外传感系统对于光源的要求。由于其面光源的朗伯辐射特性,整形之后的红外光数值孔径仍然很大,采用传统的长光程气室结构很难实现长光程从而提高系统的检测灵敏度。本文结合双波长单光路的差分检测方法,设计了一种基于积分球特性的吸收气室,有效地解决了MEMS红外光源在高灵敏度气体检测应用中难于实现长光程的问题;并运用光在传输过程中光通量守恒的原理,推导了此积分球吸收气室的等效光程,解决了积分球气室等效光程计算的难题;同时采用FPGA主控芯片对MEMS红外光源进行高频调制并处理探测器的输出信号,使得外围电路的设计更加简单、灵活。设计中,使用直径为5 cm的积分球吸收气室便可实现166.7 cm的等效光程,研究结果显示系统可测得的最小甲烷浓度达0.001×10-6,极大地提高了红外检测系统的灵敏度。     

MEMS微变形镜测试技术及算法研究

介绍了基于计算机控制的频闪显微干涉测量技术,实现了对MEMS微变形镜的表面形貌、离面变形、静态电压-位移曲线和谐振频率的测量。采用频闪成像、计算机微视觉技术以及基于最小二乘曲面拟合法的亚像素定位技术实现了对平面内微位移的测量;利用频闪成像以及5步相移干涉技术实现了对干涉相位的提取,建立了适合于MEMS微变形镜特性测试的相位解缠算法,恢复了代表被测物体表面形貌的真实相位,实现了微变形镜静动态特性的测试。测试结果表明:频闪显微相移干涉测量技术具有测量速度快、精度高、易实现自动控制等特点。     

Cherenkov counter for measuring the intensity of bunches extracted from the IHEP accelerator

The Cherenkov counter for measuring the numbers of protons in bunches extracted from the IHEP accelerator using a slow extraction system is described. The measurement range is from 1 to 10⁶ particle/bunch. The maximum bunch frequency is 6 · 10⁶ s^–1. Cherenkov light is measured by an XP 2020 photomultiplier. The results of measurements of the XP 2020 signal amplitude on the applied voltage, obtained using semiconductor light sources are presented. The data of counter calibration on the proton beam are discussed.