蓝宝石基GaN薄膜热疲劳分析

首先建立了数值模型分析工作中LED芯片的界面剪应力,根据线性累积损伤理论、GaN薄膜和Al2O3衬底的S-N曲线及随季节变化的载荷谱,确定了GaN薄膜的疲劳损伤系数.分析了温度载荷、芯片尺寸、衬底和薄膜厚度对薄膜热疲劳的影响.GaN薄膜和Al2 O3衬底的S-N曲线为单对数线性关系.LED芯片应力谱分析表明夏季交变应力载荷最大,春秋次之,冬季最小.GaN薄膜剪应力数值和理论解相差6.3;,建立的数值模型可用于LED芯片疲劳寿命分析.LED芯片寿命主要由GaN薄膜决定.GaN薄膜的最大剪应力和疲劳损伤系数随薄膜厚度和温度载荷增加,与芯片尺寸和衬底厚度无关,衬底的疲劳损伤系数不随上述因素变化.数值模型预测LED芯片疲劳寿命接近标称的LED灯具寿命.     

基于偶极子翻转理论的铁电薄膜电滞回线模型

结合铁电体的宏观特性及微观特性,基于偶极子翻转理论(DST),将偶极子翻转的概率函数进行傅里叶展开,建立了一个铁电薄膜电滞回线模型.运用该模型对不同的电滞回线进行模拟,模拟结果与实验结果具有很好的一致性.该模型表达式简洁,参数少且易计算,具有普遍适用性.     

P／I界面处理对a-Si：H柔性太阳能电池性能的影响

采用等离子体辅助化学汽相沉积(PECVD)技术制备本征非晶硅薄膜,对p/i界面进行处理.在此基础上,制备P型微晶硅(μc-Si:H)薄膜与柔性太阳能电池.对P型硅薄膜及太阳能电池的性能进行研究.结果表明:对p/i界面采用H等离子体处理,再引入一定厚度的成核层,可以成功得到高电导率的P型微晶硅窗口层,提高柔性太阳能电池的光伏特性.其中的成核层,不仅促进微晶相P层的生长,还可以起到界面缓冲层的作用.     

缓冲层厚度对Ge/Si多层膜的影响

采用离子束溅射技术,通过改变Si缓冲层厚度,在p型Si衬底生长了一系列的Ge/Si多层膜样品.利用Raman光谱、X射线小角衍射以及原子力显微镜等分析测试技术,研究了多层薄膜的结晶、膜层结构、表面形貌等性质.结果表明:通过引入缓冲层,在一定程度上可以提高颗粒的结晶性;随着缓冲层逐渐沉积,来自界面态的影响有了明显的减弱,且多层膜结构的生长得到有效改善.红外吸收光谱实验表明多层膜的吸收特性与其周期结构密切相关,因此可以通过改变缓冲层厚度的方法,实现对多层薄膜红外吸收特性的调制.     

铝层厚度对铝诱导非晶硅薄膜晶化过程的影响

基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了Al/Si/…Al/Si/glass周期性结构的薄膜.采用真空退火炉对Al/Si多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了退火前、后Al/Si多层薄膜截面形貌的变化规律,并结合扩散过程探讨了铝层厚度对铝诱导非晶硅薄膜晶化过程的本质影响机理.研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,随退火过程的进行,Al、Si原子会沿Al/si层间界面进行互扩散运动且在Si层中达到临界浓度Cs的Al原子所在区域整体呈线形平行于Al/Si界面逐渐向铝原子扩散距离增大的方向推进;随着Al层厚度的增加,Al在Si层中达到临界浓度Cs的区域整体向前推进速度加快,已扩散区域产生硅初始晶核的数量也随之增大;随Al/Si层厚比的增大,虽因铝诱导而晶化的硅薄膜均为多晶态,但非晶硅薄膜在晶化过程中的生长晶面数量增多,同时硅晶粒的尺寸有所减小.     

CZTSe/Cd1-xZnxS界面能带结构研究

严重的开路电压损耗是限制铜锌锡硫(硒)薄膜太阳电池性能提升的关键问题,其吸收层和缓冲层界面的能带结构有待进一步优化.针对此问题,本文对CZTSe/Cd1-xZnxS界面的能带结构进行了研究.首先,模拟计算了化学水浴法制备Cd1-xZnxS薄膜所需的溶液体系条件,通过椭偏仪和SEM测试结果分析了不同Cd/Zn比例的Cd1-xZnxS缓冲层形貌、光学特性以及禁带宽度.然后,对CZTSe/Cd1-xZnxS界面进行了XPS测试分析,发现CZTSe/Cd0.9Zn01S界面最为匹配,其导带失调值约为0.3 eV.最后对电池器件进行了制备与测试,得到的CZTSe/Cd0.9Zn0.1S结构的太阳电池比CZTSe/CdS结构具有更高的开路电压,达到了394 mV,转换效率达到了5.78;.     

压电层体积分数对BTO基复合薄膜磁电性能的影响

基于力学参数模型研究了NFO/BTO层状复合薄膜的磁电效应,发现当压电相的体积分数约为0.47时,磁电耦合性能最好.通过脉冲激光沉积法在掺0.7;Nb的(001)-STO衬底上生长了不同体积分数比的2-2型NFO/BCZT异质结构的磁电复合薄膜.XRD结果表明:NFO/BCZT磁电复合薄膜均为(00l)择优取向生长结构.通过锁相技术测试了NFO/BCZT复合薄膜的磁电耦合系数,测试结果表明压电相体积稍大于铁磁层体积时,磁电性能最佳.实验结果与理论结果存在一定差异,主要是由于材料实际参数与计算所用参数有差异、界面的非理想耦合无法得到准确的k值以及复合薄膜微观结构、应力等影响.     

Cu掺杂对ZnO基薄膜光学及磁学性能影响

本文采用脉冲激光沉积(PLD)方法在单晶Si(100)衬底上沿c轴方向生长出单晶ZnCoAlO薄膜,并通过加镀Cu层调节薄膜的光学和磁学特性.采用X射线衍射仪(XRD),光致发光光谱仪,振动样品磁强计(VSM)和霍尔效应仪对薄膜的结构、光学和磁学性能进行了研究.实验表明,样品均具有纤锌矿结构并沿(002)面择优生长.加镀Cu层之后,薄膜紫外发光得到增强,掺杂导致薄膜ZnO晶格能带间隙变宽,并使得近带边激子发光增强.同时发现,在室温下Cu离子对薄膜磁性和电子浓度产生影响,Cu掺杂可以改变薄膜中载流子浓度,并影响原有磁性的双交换机理.     

薄膜型声学超材料板结构隔声特性分析

针对发动机产生低频噪声引起驾驶员生理异常影响战机飞行品质的问题,提出一种薄膜型声学超材料板结构模型进行减振降噪.采用模态分析法对薄膜声学材料的基本特性进行分析,并结合有限元对平板结构模型隔声机理、隔声量影响因素进行了研究.结果显示:隔声量是弹性波与薄膜相互作用声能量衰减的结果,弹性波衰减速度直接影响隔声性能.结果表明:通过改变结构参数,则第一隔声峰处的隔声量增大,第一波谷的频率变化很小,同时薄膜的第一隔声峰向低频移动.     

Ar流量对ECR-PECVD制备氢化纳米晶硅薄膜结构及性能影响研究

采用电子回旋共振等离子体增强化学气相沉积(ECR-PECVD)设备制备了氢化纳米晶硅薄膜.通过Raman光谱、XRD和紫外-可见分光光度计的测试分析,研究了Ar/H2对薄膜组织结构和光学性能的影响,并对沉积腔室的等离子体环境进行了系统的诊断.实验发现:少量Ar气的通入有利于提高腔室中的电子温度,保证纳米晶硅薄膜结构的同时提高薄膜的光学带隙宽度.进一步提高Ar气的比例,薄膜明显非晶化,光学性能下降.结合薄膜生长机理和放电气体电离特性对实验结果的产生原因进行了分析.     

Influence of electric field on fatigue processes of thin ferroelectric films

The field and frequency dependences of the remanent polarization, coercive field, and internal bias field on the number of switching cycles have been studied experimentally in thin ferroelectric lead titanate and lead zirconate titanate films. A model is proposed to describe the features of fatigue effect in these films.     

Size effect in displacive ferroelectrics

It is ascertained that the size effect in thin ferroelectric films is related to the spatial correlation of ferroelectric polarization, depending on boundary conditions. The influence of the size effect on the permittivity of displacive ferroelectrics is described. It is shown that the size effect manifests itself differently for different orientations of the polarization vector with respect to the boundaries of a ferroelectric layer.     

Influence of Rapid Thermal Processing on the Orientation Properties of PbTiO3 Thin Film

Rapid thermal processing (RTP) has developed in fabrication of ferroelectric (FE) thin films because it can reduce processing temperature and time. It also improves the properties of FE thin films compatible with semiconductor devices. The thin film samples used were prepared by a multi-ion-beam reactive cosputtering system (MIBRECS) at room temperature. The samples were then subjected to a post-deposition annealing in a RTP system. It was found that PbTiO₃ (PT) thin film can grow on amorphous or polycrystalline interfacial layer and the PT thin films annealed by RTP showed the prefered [110] and [100] textures.     

沉积温度对磁控溅射BiFeO3薄膜结构和性能的影响

应用磁控溅射法在以SrRuO3 (SRO)薄膜为缓冲层的Pt/TiO2/SiO2/Si(001)基片上制备了多晶BiFeO3 (BFO)薄膜,构架了SRO/BFO/SRO异质结电容器.采用X射线衍射、铁电测试仪等研究沉积温度对BFO薄膜结构和性能的影响.X射线衍射图谱显示BFO薄膜为多晶结构.在2.5 kHz测试频率下,500℃生长的BFO薄膜呈现比较饱和的电滞回线,2Pr为145μC/cm2,矫顽场Ec为158 kV/cm,漏电流密度约为2.4×104 A/cm2.漏电机制研究表明,在低电场区,SRO/BFO/SRO电容器满足欧姆导电机制,在高电场区,满足普尔-弗兰克导电机理.实验发现:SRO/BFO/SRO电容器经过109翻转后仍具有良好的抗疲劳特性.     

(111)取向0.7PMN-0.3PT薄膜机电耦合性能

铁电薄膜由于其优异物理性能,而被广泛应用于微电子、光电子、微机电领域。在铁电薄膜理论研究方面,热力学理论可以有效地预测铁电薄膜的相结构、极化特性和机电性能等,且已在(001)取向铁电薄膜的研究中取得了较好的应用,而对于(111)取向铁电薄膜的研究报道非常少。因此,本文通过对序参量坐标转换的方法,构建了(111)取向薄膜的热力学势能函数及其机电性能计算方法。基于此,研究了(111)取向0.7PMN-0.3PT铁电薄膜的相结构及其机电性能。研究结果表明,(111)取向0.7PMN-0.3PT铁电薄膜的相结构主要存在沿晶轴方向三个极化可互换的对称相:顺电相PE、菱方相R和单斜相M_A(或M_B)。在应变和外电场的调控下,(111)取向0.7PMN-0.3PT薄膜展现出优良的机电性能,在R和M_A相变点处,介电常数ε11、ε22、ε33和面外压电系数d33取得了极大值。在外电场E₃分别为0、50 kV/cm、100 kV/cm和200 kV/cm时,面外介电常数ε33的峰值分别为4 382、2 646、2 102和1 600,面外压电系数d33的峰值分别为303.8 pm/V、241.9 pm/V、219.7 pm/V和195.1 pm/V。应变和外电场能够较好地调控薄膜的机电耦合性能,可为优异机电耦合性能的器件制备提供参考。     

Synthesis and characterization of type-II textured tungsten disulfide thin films by vdWR process with Pb interfacial layer as texture promoter

The growth of type-II textured tungsten disulfide (WS₂) thin films by solid state reaction between the spray deposited WO₃ and gaseous sulfur vapors with Pb interfacial layer has been studied. X-ray diffraction (XRD) technique is used to measure the degree of preferred orientation ‘S’ and texture of WS₂ films. Scanning electron microscopy (SEM) and transmission electron microscopy techniques have been used to examine the microstructure and morphology. The electronic structure and chemical composition were studied using X-ray photoelectron spectroscopy (XPS). The use of Pb interfacial layer for the promotion of type-II texture in WS₂ thin films is successfully demonstrated. The presence of (0 0 3 l), (where l=1, 2, 3, …) family of planes in the XRD pattern indicates the strong type-II texture of WS₂ thin films. The crystallites exhibit rhombohedral (3R) structure. The large value of ‘S’ (1086) prompts the high degree of preferred orientation as well. The stratum of crystallites with their basal plane parallel to the substrate surface is seen in the SEM image. The EDS and XPS analyses confirm the tungsten to sulfur atomic ratio as 1:1.75. We purport that Pb interfacial layer enhances type-II texture of WS₂ thin films greatly.     

Epitaxial growth of ferroelectric oxide films

This review paper begins with a brief overview of the most common ferroelectric materials, the perovskites and the Aurivillius families. The epitaxial growth of ferroelectric epitaxial films can be a viable approach to improve the ferroelectric properties, in particular for the layered perovskites. Defects related to a polycrystalline structure, which lead to a degradation of ferroelectric properties like remanent polarisation, piezoelectric coefficient, charge retention, and may cause time-dependent fatigue problems, can be prevented. However, it is also to be considered that effects connected with thin films like substrate clamping, strain or finite thickness may limit the film properties. Substitution of elements allows the adjustment of the film characteristics to the device function. Additionally, the orientation of the films can be controlled by the appropriate choice of the substrate, which is important due to the anisotropy of the ferroelectrics.The deposition methods commonly used for ferroelectric oxide layers are reviewed, particularly with regard to epitaxial growth. The conditions under which stoichiometric, crystalline growth can be obtained are described. The paper primarily focuses on the MO-CVD technique.Furthermore whether epitaxial growth of ferroelectric films occurs or not depends on several conditions like lattice mismatch between film and substrate, surface orientation and crystal symmetry of the substrate, thermal expansion of film and substrate. The influence of these parameters on epitaxial growth is discussed. Local epitaxial growth of ferroelectric layers on metallic electrodes is also mentioned due to its importance in device fabrication. The site-engineering concept is shortly reviewed as the substitution of elements constitutes a simple way to modify film properties in thin film technology.     

Surface Chemical Bonding States and Ferroelectricity of Pb(Zr0.52Ti0.48)O3 Thin Films

The surface chemical bonding states and the ferroelectric properties of sol‐gel deposited lead zirconate titanate [Pb(Zr_0.52Ti_0.48)O₃, PZT] thin films coated on (111)Pt/Ti/SiO₂/Si substrates were investigated. X‐ray photoelectron spectroscopy (XPS) was used to determine the oxidation state of the surface and the chemical composition as a function of depth in ferroelectric PZT thin layers. Values for the dielectric constant and dissipation factor at 1 kHz for the 300 nm‐thick film were 1214 and 0.014 for the film annealed at 520 °C, and 881 and 0.015 for a film annealed at 670 °C. Measured values for the remanent polarization (P_r) and coercive field (E_c), from polarization‐electric field (P‐E) hysteresis loops biased at 10 V at a frequency of 100 Hz, were 16.7, 14.4 μC/cm² and 60, 41.7 kV/cm for 520 °C and 670 °C. The leakage current density (J) was 72 and 96 nA/cm² at an applied field of 100 kV/cm. It was found that the bonding states of lead and oxygen in the surface regions could be correlated with the ferroelectric properties of the integrated thin layers.     

SrRuO3导电层对快速退火制备Pb(Zr,Ti)O3薄膜结构和性能的影响

采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上,制备了Pt/Pb(Zr,Ti)O3(PZT)/Pt和SrRuO3(SRO)/PZT/SrRuO3(SRO)异质结电容器,并研究了快速退火条件下SRO导电层对PZT结构和性能的影响.XRD测试表明,两种结构电容器中的PZT薄膜均为钙钛矿结构,SRO/PZT/SRO、Pt/PZT/Pt均具有较好的铁电性和脉宽依赖性,5 V电压下两电容器的剩余极化强度Pr和矫顽电压Vc分别为28.3 μC/cm2、1.2 V和17.4 μC/cm2、2.1 V.在经过1010次翻转后,SRO/PZT/SRO铁电电容器疲劳特性相对于Pt/PZT/Pt电容器有了较大的改善,但SRO导电层的引入也带来了漏电流增大的问题.     

On two-dimensional ferroelectricity in layered polymer films on substrates

A simple model for describing structural phase transitions in thin ferroelectric copolymer films on solid substrates obtained by the Langmuir-Blodgett method has been suggested. It is shown that the polymer-substrate interaction and surface tension considerably influence these transitions and, in particular, can induce additional low-temperature first-and second-order phase transitions depending on the material parameters and the film thickness. The main dimensionless parameter and its critical value, which control the formation of the additional order in very thin films, are determined.