Experimental investigation of the adhesion force of single and double-layer coatings on MEMS surfaces

Adhesion force is one of the most important factors in microelectromechanical systems (MEMS), especially for microassembly. It depends on operating conditions and is affected by the contact area. In this study, the adhesion force between MEMS materials and AFM tips was analysed using AFM's point-mode spectroscopy. The aim was to study the effectiveness of various coatings in MEMS adhesion surfaces. For this purpose, five silicon surfaces were used, four of which were coated, and one was noncoated. Two of them were deposited by single-layer coating (Au and Ag). The other two were deposited by double-layer coating (TiO₂/Au, TiO₂/Ag) on a Si (1 0 0) substrate. The depositing was accomplished by the thermal evaporation method. Composite materials and analysis were reviewed by observing the SEM image. The experimental results showed that the method of deposition helped to decrease the adhesion force between the probe tip and the surface of the specimens, and double-layer coating had stronger effect on decreasing the adhesion force than the single-layer coating.     

Evaluation of the adhesion properties of inorganic materials with high surface energies

With the aim of checking the validity of methods for characterizing the adhesion between inorganic materials with high surface energies, the properties of the adhesion between an inorganic material (indium tin oxide (ITO)) and model surfaces with various surface energies (Cl-, NH2-, CH(3)-, and CF3-functionalized surfaces) were evaluated using atomic force microscopy (AFM) and the Johnson-Kendall-Roberts (JKR) apparatus. For this purpose, the AFM tip and the JKR lens were modified with ITO using radio frequency (rf) magnetron sputtering. The work of adhesion between the ITO coating and each model surface was estimated using AFM and the JKR apparatus and compared with the result obtained from contact angle measurements. The adhesion forces determined from the force-displacement curves (AFM) were found to agree with the predictions of the Derjaguin-Muller-Toporov (DMT) theory. The JKR equation used in the interpretation of the JKR experiments was modified by taking into account the differences between the surface and bulk moduli of the ITO-coated poly(dimethylsiloxane) (PDMS) lens. The ratio of the surface modulus to the bulk modulus we used in this modified JKR equation was obtained by determining the slope of the attracting part of the force-displacement curve. The values of the work of adhesion calculated using the modified JKR equation were also found to agree with the values obtained from contact angle measurements. We conclude that the two methods using AFM and the JKR apparatus can be used in the evaluation of the work of adhesion between inorganic materials with high surface energies such as metal and metal oxide surfaces.     

A generalized analytical model for the elastic deformation of an adhesive contact between a sphere and a flat surface

A new method to calculate the elastic deformation of a sphere on a flat surface is presented. The model considers the influence of short-range as well as long-range attractive forces both inside and outside the actual contact area. In contrast to earlier models, this theory describes the nature of these deformations in the intermediate regime between the so-called JKR and DMT limits by simple analytic expressions. Equations for the calculation of the contact radius, the deformation, and the pressure distribution are given. In all equations, the critical force that might vary between the limiting values found in the DMT and the JKR model acts as transition parameter.     

Analytical methods to derive the elastic modulus of soft and adhesive materials from atomic force microcopy force measurements

We present new DMT‐based and JKR‐based methods to derive the elastic modulus of sample surfaces from an atomic force microscope force‐distance curve (DMT: Derjaguin‐Muller‐Toporov, JKR: Johnson–Kendall–Roberts). Application of the methods to the Maugis–Dugdale curves revealed that the JKR‐based method determines very accurate moduli for Maugis' transitional parameter λ > 0.3; however, the DMT‐based method generally estimates much less accurate moduli. The new JKR‐based method has advantages over the two‐point method, which has been often used for the JKR analysis, in capabilities to select the fitting range and to involve more than two points in curve fitting. Utilizing the advantages, for example, one can limit the fitting range to the attractive force zone to reduce the contact area of soft and adhesive materials. The method consists of algebraical calculation and optionally linear fitting; hence, the computational cost is low enough to be applicable to a real‐time JKR analysis method of fast force mapping. The detailed procedure of the method is explained using a force‐distance curve on a poly(dimethylsiloxane) surface. The advantages of the method are demonstrated using a force mapping data on a vulcanized rubber blend. © 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2019 , 57, 1279–1286     

Interaction force measurement between E. coli cells and nanoparticles immobilized surfaces by using AFM

To better understand environmental behaviors of nanoparticles (NPs), we used the atomic force microscopy (AFM) to measure interaction forces between E. coli cells and NPs immobilized on surfaces in an aqueous environment. The results showed that adhesion force strength was significantly influenced by particle size for both hematite (α-Fe(2)O(3)) and corundum (α-Al(2)O(3)) NPs whereas the effect on the repulsive force was not observed. The adhesion force decreased from 6.3±0.7nN to 0.8±0.4nN as hematite NPs increased from 26nm to 98nm in diameter. Corundum NPs exhibited a similar dependence of adhesion force on particle size. The Johnson-Kendall-Roberts (JKR) model was employed to estimate the contact area between E. coli cells and NPs, and based on the JKR model a new model that considers local effective contact area was developed. The prediction of the new model matched the size dependence of adhesion force in experimental results. Size effects on adhesion forces may originate from the difference in local effective contact areas as supported by our model. These findings provide fundamental information for interpreting the environmental behaviors and biological interactions of NPs, which barely have been addressed.     

Multiasperity contact adhesion model for universal asperity height and radius of curvature distributions

A new approach to the multiasperities contact interaction between two surfaces is presented. Each asperity is individually considered with its own different height and radius of curvature. Different materials, such as polyvinylchlorine (PVC) and stainless steel, are used as model systems. For each of the model materials, a set of asperities was generated using Monte Carlo method. Both asperity heights and radii were based on their statistical distributions experimentally obtained. Contact forces were determined for each asperity at a given distance between the two surfaces, while the deformation of each asperity was calculated according to the Johnson-Kendall-Roberts (JKR) or the Derjaguin-Muller-Toporov (DMT) model (depending on the material). The contribution of each asperity to the overall surface was summed, and the overall contact force was determined. The developed method was validated against contact force measurements obtained with atomic force microscopy (AFM).     

Stick slip contact mechanics between dissimilar materials: effect of charging and large friction

Measurements of the contact radius as a function of applied force between a mica surface and a silica surface (mica/silica) in air are reported. The load/unload results show that the contact radius generally increases with applied force. Because of the presence of charging due to contact electrification, both a short-range van der Waals adhesion force and longer-range electrostatic adhesive interaction contribute to the measured force. The results indicate that approximately 20% of the pull-off force is due to van der Waals forces. The contact radius versus applied force results can be fit to Johnson-Kendall-Roberts (JKR) theory by considering that only the short-range van der Waals forces contribute to the work of adhesion and subtracting a constant longer-range electrostatic force. Also, an additional and unexpected step function is superimposed on the contact radius versus applied force curve. Thus, the contact diameter increases in a stepped dependence with increasing force. The stepped contact behavior is seen only for increasing force and is not observed when symmetric mica/mica or silica/silica contacts are measured. In humid conditions, the contact diameter of the mica/silica contact increases monotonically with applied force. Friction forces between the surfaces are also measured and the shear stress of a mica/silica interface is 100 times greater than the shear stress of a mica/mica interface. This large shear stress retards the increase in contact area as the force is increased and leads to the observed stepped contact mechanics behavior.     

AFM measurements of forces between silica surfaces

Interaction forces and adhesion between a silica sphere and a flat silica surface in aqueous electrolyte solutions were investigated by atomic force microscopy. The forces were measured as a function of surface separation, pH and NaCl concentration as the surfaces were approaching each other. The adhesion force was determined upon retraction with respect to pH, NaCl concentration and contact time. The magnitude of the long range repulsive force was decreasing with decreasing pH. A short range repulsive force was observed at pH = 2, but no long range repulsive forces were observed at this pH. Force measurements showed that adhesion of silica surfaces in water was obstructed by short and long range repulsive forces. Adhesion was enhanced when both the long and the short range repulsive force was mitigated. A maximum adhesion force of 7.8 mN/m was measured at pH = 12.5 when the short range force vanished and the long range repulsive force was reduced by increasing the NaCl concentration. At pH = 12.5, the work of adhesion was calculated to be 1.2 mJ/m² according to the Derjaguin–Muller–Toporov (DMT) model. Adhesion energy was much less at pH = 2 (0.3 mJ/m²) due to persistive short range repulsion.     

Direct measurement of the binding force between microfabricated particles and a planar surface in aqueous solution by force-sensing piezoresistive cantilevers

We propose a force measurement method for evaluating the binding force between microscale flat surfaces in an aqueous solution. Using force-sensing piezoresistive cantilevers with sub-nanonewton force resolution, we have directly measured binding forces between SiO2-SiO2 microcontacts, which were created by gravity-driven random collision between microfabricated SiO2 cylindrical particles and a planar SiO2 substrate in a HCl solution. First, to examine our method we measured the pH dependence of the binding force. The binding forces were 12 and 5.8 nN at pH 1.0 and 2.0, respectively. As the pH increased, the binding force decreased and became zero at pH greater than 3.0. We confirmed that the bindings were based on the van der Waals' (VDW) force at pH 2.0 or less whereas a repulsive double-layer force acted between the surfaces at pH 3.0 or more. Second, the binding forces were categorized into a friction force or an adhesion force between the particles and the substrate. In the measurement, the friction force between the particle and the substrate was measured in the case when the particle slid on the substrate. On the contrary, the adhesion force was measured when the particle came off the substrate. Whether the particle slid or came off depended on the aspect ratio of the particle. We fabricated cylindrical particles with an aspect ratio of 0.03-2.0 and distinguished the friction force from the adhesion force by changing the aspect ratio of the particles. As a result, the friction force per unit contact area between SiO2-SiO2 flat surfaces was found to be 330 pN/microm2 +/- 20% when we used particles with a low aspect ratio (<0.1), and the adhesion force per unit contact area was 90 pN/microm2 +/- 20% for particles with a high aspect ratio (>0.4). For fluidic self-assembly that utilizes microscale surface contact in a liquid, our measurement method is an effective tool for studying and developing systems.     

The mechanics of contact and adhesion of periodically rough surfaces

An analytical model based on the Johnson–Kendall–Roberts (JKR) theory of adhesion was used to study the contact mechanics and adhesion of periodically rough surfaces. The relation of the applied load to the contact area and the work of adhesion W was found in closed form for arbitrary surface profiles. Our analysis showed that when the parameter [where α* is a numerical constant of order one, β is the aspect ratio of a typical surface profile (or asperity), and ρ is the number of asperities per unit length], the surfaces will jump into contact with each other with no applied load, and the contact area will continue to expand until the two surfaces are in full contact. The theory was then extended to the non‐JKR regime in which the region where the surface forces act is no longer confined to a small region near the contact zone. Exact solution was also obtained for this case. An exact analysis of the effect of entrapped air on the mechanics of adhesion and contact was also enacted. The results showed that interaction between asperities should be taken into consideration in contact‐mechanics models of adhesion or friction. © 2001 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 39: 1195–1214, 2001     

Determination of solid surface tension from particle-substrate pull-off forces measured with the atomic force microscope

Atomic force microscopy (AFM) is capable of solid surface characterization at the microscopic and submicroscopic scales. It can also be used for the determination of surface tension of solids (gamma) from pull-off force (F) measurements, followed by analysis of the measured F values using contact mechanics theoretical models. Although a majority of the literature gamma results was obtained using either Johnson-Kendall-Roberts (JKR) or Derjaguin-Muller-Toporov (DMT) models, re-analysis of the published experimental data presented in this paper indicates that these models are regularly misused. Additional complication in determination of gamma values using the AFM technique is that the measured pull-off forces have poor reproducibility. Reproducible and meaningful F values can be obtained with strict control over AFM experimental conditions during the pull-off force measurements (low humidity level, controlled and known loads) for high quality substrates and probes (surfaces should be free of heterogeneity, roughness, and contamination). Any probe or substrate imperfections complicate the interpretation of experimental results and often reduce the quality of the generated data. In this review, surface imperfection in terms of roughness and heterogeneity that influence the pull-off force are analyzed based upon the contact mechanics models. Simple correlations are proposed that could guide in selection and preparation of AFM probes and substrates for gamma determination and selection of loading conditions during the pull-off force measurements. Finally, the possibility of AFM measurements of solid surface tension using materials with rough surfaces is discussed.     

Colloid probe AFM investigation of interactions between fibrinogen and PEG-like plasma polymer surfaces

Interaction forces between surfaces designed to be protein resistant and fibrinogen (Fg) were investigated in phosphate-buffered saline with colloid probe atomic force microscopy. The surfaces of the silica probes were coated with a layer of fibrinogen molecules by adsorption from the buffer. The technique of low-power, pulsed AC plasma polymerization was used to make poly(ethylene glycol) (PEG)-like coatings on poly(ethylene teraphthalate) by using diethylene glycol vinyl ether as the monomer gas. The degree of PEG-like nature of the films was controlled by use of a different effective plasma power in the chamber for each coating, ranging from 0.6 to 3.6 W. This produced a series of thin films with a different number of ether carbons, as assessed by X-ray photoelectron spectroscopy. The interaction force measurements are discussed in relation to trends observed in the reduction of fibrinogen adsorption, as determined quantitatively by (125)I radio-labeling. The plasma polymer coatings with the greatest protein-repelling properties were the most PEG-like in nature and showed the strongest repulsion in interaction force measurements with the fibrinogen-coated probe. Once forced into contact, all the surfaces showed increased adhesion with the protein layer on the probe, and the strength and extension length of adhesion was dependent on both the applied load and the plasma polymer surface chemistry. When the medium was changed from buffer to water, the adhesion after contact was eliminated and only appeared at much higher loads. This indicates that the structure of the fibrinogen molecules on the probe is changed from an extended conformation in buffer to a flat conformation in water, with the former state allowing for stronger interaction with the polymer chains on the surface. These experiments underline the utility of aqueous surface force measurements toward understanding protein-surface interactions, and developing nonfouling surfaces that confer a steric barrier against protein adsorption.     

Forces between Polymer Surfaces and Self-Assembled Monolayers

Gold-coated atomic force microscope (AFM) tips functionalized with amine-, hydroxyl-, carboxylic acid-, and methyl-terminated alkanethiol molecules were used to probe the adhesive forces of polystyrene and poly(acrylic acid) films in dry air (relative humidity < 0.5%). X-ray photoelectron spectroscopy (XPS) and contact angle measurements confirmed the quality and uniformity of similarly treated gold surfaces and the polymer films. XPS indicated that the amine-functionalized thiol films were protonated and comprised of multilayers. Contact angle data were used to calculate surface free energies, and DMT theory yielded the works of adhesion and interfacial free energies for the tip-substrate combinations. In the case of polystyrene, the work of adhesion followed the order methyl > carboxylic acid > hydroxyl > amine. For poly(acrylic acid), the observed order was hydroxyl > amine > carboxylic acid > methyl.     

Normal Forces between Cellulose Surfaces Measured with Colloidal Probe Microscopy

Colloidal probe microscopy was employed to study interactions between cellulose surfaces in aqueous solutions. Hydrodynamic forces must be accounted for in data analysis. Long-range interactions betweeen cellulose surfaces are governed by double-layer forces and, once surfaces contact, by osmotic repulsive forces and viscoelasticity. Increasing the ionic strength decreases surface potentials and increases adhesive forces. Polyelectrolytes cause strong steric repulsion at high surface coverage, where interactions are sensitive to probe velocity. Polymer bridging occurs at low coverage. The conformation of adsorbed polyelectrolytes depends on the polymer concentration. Copyright 2000 Academic Press.     

Surface modification of thermoplastics by atomic layer deposition of Al2O3 and TiO2 thin films

Al₂O₃ and TiO₂ thin films were deposited by atomic layer deposition at 80-250 °C on various polymeric substrates such as polymethylmethacrylate (PMMA), polyetheretherketone (PEEK), polytetrafluoroethylene (PTFE) and ethylenetetrafluoroethylene (ETFE). The films were studied with FESEM, EDX, XRD, contact angle measurements and adhesion tests. The film growth rates on the thermoplastics were close to the corresponding growth rates on Si substrates. The adhesion of the films was good on PEEK and poor on PTFE. All coated surfaces showed lower water contact angles than the uncoated thermoplastics. Furthermore, the water contact angles on all TiO₂-coated surfaces decreased upon UV illumination, most efficiently with crystalline TiO₂ coatings.     

Interaction forces and molecular adhesion between pre-adsorbed poly(ethylene imine) layers

Interaction forces between pre-adsorbed layers of branched poly(ethylene imine) (PEI) of different molecular mass were studied with the colloidal probe technique, which is based on atomic force microscopy (AFM). During approach, the long-ranged forces between the surfaces are repulsive due to overlap of diffuse layers down to distances of a few nanometers, whereby regulation of the surface charge is observed. The ionic strength dependence of the observed diffuse layer potentials can be rationalized with a surface charge of 2.3 mC/m2. The forces remain repulsive down to contact, likely due to electro-steric interactions between the PEI layers. These electro-steric forces have a range of a few nanometers and appear to be superposed to the force originating from the overlap of diffuse layers. During retraction of the surfaces, erratic attractive forces are observed due to molecular adhesion events (i.e., bridging adhesion). The frequency of the molecular adhesion events increases with increasing the ionic strength. The force response of the PEI segments is dominated by rubber-like extension profiles. Strong adhesion forces are observed for low molecular mass PEI at short distances directly after separation, while for high molecular mass weaker adhesion forces at larger distances are more common. The work of adhesion was estimated by integrating the retraction force profiles, and it was found to increase with the ionic strength.     

Polymer-Based Superhydrophobic Coating Fabricated from Polyelectrolyte Multilayers of Poly(allylamine hydrochloride) and Poly(acrylic acid)

Superhydrophobic films mainly based on poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) polyelectrolyte multilayer have been deposited onto cleaned glass substrate by a layer-by-layer dip coating method. 3 bilayers of the PAH and PAA was directly coated onto the substrate as an underlying layer for subsequent coating. Desired surface roughness on the polyelectrolyte bilayers was created by etching the bilayers in hydrochloric acid solution so as to create the open pore having suitable size at the surface. Then, nanoparticles such as SiO₂ and TiO₂ of various sizes were deposited onto the etched polyelectrolyte bilayers. Finally, the surfaces were further modified with semifluorinated silane followed by cross-linking at 180 °C for 2 h to obtain desirable surface morphological features. The effect of etching time and addition of nanoparticles on surface morphology was investigated using an atomic force microscope (AFM). Wetting ability of the prepared film was determined by measuring water droplet contact angle using a goniometer. Adhesion between the superhydrophobic films and the substrate was evaluated by using a standard tape test method (D3359). The adhesion was improved by reducing the organic content in the films.     

Forces between polyethylene surfaces in oxyethylene dodecyl ether solutions as influenced by the number of oxyethylene groups

The atomic force microscopy (AFM) colloidal probe technique was used to study the effect of oxyethylene dodecyl ethers, C12En (n = 1-7), on interactions between hydrophobic polyethylene (PE) surfaces in aqueous solutions. Long-range (colloidal) and contact (pull-off) forces were measured between 10 to 20 microm PE spheres and a flat PE surface at concentrations of surfactant of 1 x 10(-6) and 1 x 10(-4) M. The surface tension of the surfactant solutions and contact angles at PE surfaces were also studied. The influence of the number of oxyethylene groups in the surfactant molecule was examined. Initially, long-range attractive (hydrophobic) forces between the PE surfaces were observed that decreased in range and magnitude with an increase in the number of oxyethylene groups in 1 x 10(-4) M solutions. Above four oxyethylene groups per molecule, repulsive forces were observed. The measured pull-off force between PE surfaces decreased monotonically from approximately 500 mJ/m2 for C12E1 to 150 mJ/m2 for C12E7. The interfacial energy was calculated on the basis of the JKR model, taking into account long-range forces operating outside the contact area. The interfacial energies decreased from 43-47 mJ/m2 for PE-water and PE-C12E1 (1 x 10(-4) M) interfaces to approximately 18 mJ/m2 for PE-C12E7 (1 x 10(-4) M). The interfacial energy was also calculated from measured contact angles and surface tensions using Neumann's equation of state and Young's equation. A similar relationship between interfacial energy and the number of oxyethylene groups was observed on the basis of contact and surface tension measurements. However, interfacial energy values were smaller, within 15-20 mJ/m2, than those calculated from AFM pull-off force measurements.     

Characterization of adhesion at solid surfaces: Development of an adhesion-testing device

A custom-built adhesion-testing device (ATD) is described in this paper, which was developed to study energetics of various solid (polymeric) interfaces. A review is also given of the main techniques of adhesion and adherence measurements, including non-destructive and destructive methods, with major emphasis on the evolution and applications of contact mechanics techniques. Using the Johnson-Kendall-Roberts (JKR) theory of contact mechanics in the elastic deformation regime, the interfacial energy of solid surfaces can be obtained by measuring the contact radius, loading force, and vertical displacement between an (elastic) sphere (lens) and a flat surface (one of which, or both, coated with the sample of interest). The parameters needed for JKR analyses were determined by our custom-built device. Based on the JKR theory, the values of work of adhesion, combined elastic modulus and interfacial energy were determined from the loading and unloading curves on poly(dimethylsiloxane)-poly(dimethylsiloxane) (PDMS) systems. Cumulative adhesion hysteresis and elastic modulus were also calculated. The results obtained agree well with literature data measured by different methods. These measurements on compliant PDMS-PDMS model systems can also serve as validation and verification of the adhesion-testing devices described in this study.     

Chemical Force Microscopy Study of Adhesion and Friction between Surfaces Functionalized with Self-Assembled Monolayers and Immersed in Solvents

Adhesive and frictional forces between surfaces modified with self-assembled monolayers (SAMs) and immersed in solvents were measured with chemical force microscopy as functions of surface functionality and solvent. Si/SiO2 substrates were modified with SAMs of alkylsiloxanes (SiCl3(CH2)n-X), and gold-coated AFM tips were modified with SAMs of alkylthiolates (HS-(CH2)n-X). SAMs of alkylsiloxanes terminated in a methyl or oxidized vinyl group; SAMs of alkanethiolates terminated in a methyl or carboxyl group. Adhesive and frictional forces were measured in hexadecane, ethanol, 1,2-propanediol, 1,3-propanediol, and water. The work of adhesion (W) was calculated with the Johnson-Kendall-Roberts theory of adhesive contact. The JKR values agreed well with values derived from the Fowkes-van Oss-Chaudhury-Good surface tension model and from contact angle results. Calculated values of W for all combinations of contacting surfaces and solvents spanned two orders of magnitude. W correlated with the surface tension of the solvent for hydrophobic/hydrophobic interactions; hydrophilic/hydrophilic and hydrophobic/hydrophilic interactions were more complex. Friction forces were fit to a modified form of Amonton's law. For any solvent, friction coefficients were largest for the hydrophilic/hydrophilic contacting surfaces. The friction coefficient for any contacting pair was largest in hexadecane. In polar solvents, friction coefficients scaled with solvent polarity only for hydrophobic/hydrophobic contacting pairs. Copyright 1999 Academic Press.