Theoretical Calculations of Relative Ion Yields for Glow Discharge Mass Spectrometry

Quantitative determination of the elemental composition of metals and other solids by glow discharge mass spectrometry requires a calibration factor for each element. In past work, these factors, called relative ion yields (RIYs), have been determined experimentally from the mass spectra of standards of certified composition. The RlYs of some elements were found to be over 10 times larger than the RIYs of other elements. In this study a simple calculation of the RIYs of the elements within the same sample is derived from a theoretical framework which takes into account the combined effects of sputtering and ionization. The ionization function involves the electron affinity and the first ionization potential of each element, plus two unknown parameters. By favorable selection of a temperature parameter and a chemical-potential parameter, the RIYs calculated by this method were found to agree satisfactorily with the experimental RlYs of former work. The temperature of 16,000 K (used in this work) corresponds to an average electron energy of ～ 2 eV.     

Gas-Chromatographic Analysis of Mixtures of Hydrogen Isotopes

A simple method is proposed for the gas-chromatographic analysis of complex gas mixtures containing hydrogen isotopes; the method is based on the substantial difference in the thermal conductivity of these isotopes. The total peak of the isotopes is recorded in a chromatogram, and the calibration is performed by pure reference gases. The concentrations of impurity gases in the analyzed mixture and in reference samples for each of the hydrogen isotopes are determined simultaneously. The fractional concentrations of protium and deuterium are calculated by the equations involving the heights of the unresolved peaks of hydrogen isotopes in chromatograms and concentrations of impurity components.     

Investigations on cluster and molecular ion formation by plasma mass spectrometry

The formation of molecular and cluster ions of different inorganic materials in plasma mass spectrometry – spark source mass spectrometry (SSMS), radiofrequency glow discharge mass spectrometry (rf GDMS), laser ionization mass spectrometry (LIMS), inductively coupled plasma mass spectrometry (ICP-MS) and laser ablation ICP-MS (LA-ICP-MS) – was investigated and compared. Similar abundance distributions of cluster ions were observed for a graphite sample, for boron nitride/ graphite and for metal oxide/graphite mixtures using different plasma mass spectrometric methods. A correlation of intensities of metal argide ions in ICP-MS with their bond dissociation energies was used to estimate unknown dissociation energies of molecular ionic species. For the elements of the 2nd or 3rd period in the periodic table, the intensities of most argon molecular ions (ArX⁺) measured by ICP-MS rise with increasing atomic number in a similar manner to the theoretically calculated bond dissociation energies of argon molecular ions.     

A combined experimental and theoretical study of uranium polyhydrides with new evidence for the large complex UH4(H2)6

Several monouranium and diuranium polyhydride molecules were investigated using quantum chemical methods. The infrared spectra of uranium and hydrogen reaction products in condensed neon and pure hydrogen were measured and compared with previous argon matrix frequencies. The calculated molecular structures and vibrational frequencies were used to identify the species present in the matrix. Major new absorptions were observed and compared with the previous argon matrix study. Spectroscopic evidence was obtained for the novel complex, UH4(H2)6, which has potential interest as a metal hydride with a large number of hydrogen atoms bound to uranium. Our calculations show that the series of complexes UH4(H2)1,2,4,6 are stable.     

On-line coupling of atomic spectrometry and ion chromatography with time resolved registration as a new tool for ultra trace analysis in refractory metals

Summary On-line coupling of Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES) and Ion Chromatography (IC) offers unique features for ultra trace analysis. With an on-line preconcentration procedure based on cation exchange, sub-ng/g analysis is possible in complex matrices like molybdenum and tungsten. Results match with isotope dilution mass spectrometry (IDMS) and are comparable with glow discharge mass spectrometry (GDMS). The optimal dissolution reagent for these matrices is hydrogen peroxide whose clean up to ultra high purity is possible with metal-free chromatographic equipment. All elements with cationic chemistry can be preconcentrated in acidic peroxide solutions. In this study 21 elements are measured which are detrimental for microelectronic applications. The absolute detection limits of the IC-ICP combination, with time resolved registration, are at the lower ng-level. The reproducibility is not significantly lowered by the coupling, but a ten-fold sensitivity enhancement is observed in comparison to chemically similar off-line trace-matrix-separations. Other features are simultaneous matrix corrections, use of monitors lines for method enhancement, error recognition and correction using time resolved measurement and simple calibration of the method with aqueous standards.     

A contribution to the study of matrix effects in the analysis of solid samples by D. C. glow discharge mass spectrometry

Relative Sensitivity Factors (RSF) for the analysis of 22 elements by glow discharge mass spectrometry have been determined from the multiple determination of 19 reference materials representing steels, Ni-based heat resisting alloys, copper, aluminium, molybdenum and indium by using an Ar/0.2 vol. % H₂ mixture as a filler gas. The measurements were made by using the VG 9000 glow discharge mass spectrometer. For all the materials analyzed, the relative variations of these factors were reduced by more than a factor of 2 when the Ar/H₂ mixture was substituted to the pure argon. In addition, the proposed technique greatly decreases the matrix effects, thus allowing the determination of the elemental composition of metallic samples without needing to use standard reference materials.     

On copper diffusion in silicon measured by glow discharge mass spectrometry

Copper contamination occurs frequently in silicon for photovoltaic applications due to its very fast diffusion coupled with a low solid solubility, especially at room temperature. The combination of these properties exerts a challenge on the direct analysis of Cu bulk concentration in Si by sputtering techniques like glow discharge mass spectrometry (GDMS). This work aims at addressing the challenges in quantitative analysis of fast diffusing elements in Si matrix by GDMS. N-type, monocrystalline (Czochralski) silicon samples were intentionally contaminated with Cu after solidification and consequently annealed at 900 °C to ensure a homogeneous distribution of Cu in the bulk. The samples were quenched after annealing to control the extent of the diffusion to the surface prior to the GDMS analyses, which were carried out at different time intervals from within few minutes after cooling onward. The Cu profiles were measured by high-resolution GDMS operating in a continuous direct current mode, where the integration step length was set to ～0.5 μm over a total sputtered depth of 8–30 μm. The temperature of the samples during the GDMS analyses was also measured in order to evaluate the diffusion. The Cu contamination of n-type Si samples was observed to be highly material dependent. The practical impact of Cu out-diffusion on the calculation of the relative sensitivity factor (RSF) of Cu in Si is discussed.     

Calibration transfer strategy to compensate for instrumental drift in portable quadrupole mass spectrometers

We report the use of a calibration transfer strategy to correct for drift in the quantitative sensitivity of a portable quadrupole mass spectrometer (QMS) aimed at process monitoring applications. Gas mixtures of CH₄/Ar/C₂H₆/CO₂ were studied with calibration phase measurements made of the pure gases for a univariate analysis and of 40 multi-component mixtures for a multivariate approach. To evaluate calibrations, test set spectra of a CH₄/Ar/C₂H₆/CO₂ gas mixture were recorded bi-weekly over a period of 12 months. As part of the strategy a standard of pure argon was measured during both calibration and test phases so that correction factors could be calculated for each measurement day. It was shown that in the absence of a calibration transfer strategy quantifications of test set spectra could be inaccurate by more than an order of magnitude over 12 months. Furthermore, due to the effects of drift in the sensitivity over the 6 days required to record the training set in the calibration phase it was found that the multivariate analysis quantified test spectra less accurately than the univariate analysis. However, by applying the calibration transfer strategy across all measurements (both calibration and test phases) it was shown that the errors in prediction using the multivariate analysis previously seen after 2 weeks were not observed until approximately 12 months later.     

Effect of Ar/H2 and Kr/H2 mixtures as discharge gas on the ion intensity in dc glow discharge mass spectrometry

 In dc glow discharge mass spectrometry, the addition of small amounts of H₂ to pure Ar as discharge gas has greatly increased the ion intensities of elements compared with the conventional method using pure Ar. This phenomenon was also observed for the addition of H₂ to pure Kr. The reason for the increase of the ion intensities of elements was studied by using a Kr gas mixture containing 0.2% (v/v) H₂. The ion intensities of the elements P, Se and As (whose first ionization potentials are higher than the energy levels of the excited state of Kr) did not increase even if the Kr/H₂ gas mixture was used. The results show that the addition of H₂ significantly contributed to increasing the number of metastable argon or krypton atoms (Penning ionization). Received: 4 November 1995/Revised: 5 January 1996/Accepted: 10 January 1996     

Effect of Ar/H2 and Kr/H2 mixtures as discharge gas on the ion intensity in dc glow discharge mass spectrometry

 In dc glow discharge mass spectrometry, the addition of small amounts of H₂ to pure Ar as discharge gas has greatly increased the ion intensities of elements compared with the conventional method using pure Ar. This phenomenon was also observed for the addition of H₂ to pure Kr. The reason for the increase of the ion intensities of elements was studied by using a Kr gas mixture containing 0.2% (v/v) H₂. The ion intensities of the elements P, Se and As (whose first ionization potentials are higher than the energy levels of the excited state of Kr) did not increase even if the Kr/H₂ gas mixture was used. The results show that the addition of H₂ significantly contributed to increasing the number of metastable argon or krypton atoms (Penning ionization). Received: 4 November 1995/Revised: 5 January 1996/Accepted: 10 January 1996     

Phase equilibria for the binary mixtures containing hydrogen fluoride and non-polar compound

Isothermal vapor–liquid equilibria for propane+hydrogen fluoride have been measured. The experimental data are correlated with the association model proposed by Lencka and Anderko for the mixtures containing hydrogen fluoride and the relevant parameters are presented. The recalculated parameters of the association model for pure hydrogen fluoride are presented. The problems occurred in the applications of the association model for the mixtures containing hydrogen fluoride are discussed. The correlation was found to be in good agreement with the experimental data. However, the calculated equilibrium pressures at very diluted compositions of hydrogen fluoride below about 0.01 were shown rather higher than the experimental values.     

Isotopic abundance measurements on solid nuclear-type samples by glow discharge mass spectrometry

A double-focusing Glow Discharge Mass Spectrometer (GDMS) installed in a glovebox for nuclear sample screening has been employed for isotopic measurements. Isotopic compositions of zirconium, silicon, lithium, boron, uranium and plutonium which are elements of nuclear concern have been determined. Interferences arising from the matrix sample and the discharge gas (Ar) for each of these elements are discussed. The GDMS results are compared with those from Thermal Ionization Mass Spectrometry (TIMS). For boron and lithium at microg/g-ng/g levels, the two methods gave results in good agreement. In samples containing uranium the isotopic composition obtained by GDMS was in agreement with those from TIMS independently of the enrichment. Attempts for the determination of plutonium isotopic composition were also made. In this case, due to the interferences of uranium at mass 238 and americium at mass 241, the GDMS raw data are complementary with those values obtained from physical non-destructive techniques.     

Application of RF GDMS for trace element analysis of nonconducting La0.65Sr0.3MnO3 ceramic layers

Radio-frequency glow discharge mass spectrometry (RF GDMS) has been applied to the determination of trace elements in ceramic perovskite layers (La_0.65Sr_0.3MnO₃) using synthetic standards. For the preparation of these standards high-purity powder of the basic material (La_0.65Sr_0.3MnO₃) was doped with trace elements in concentrations from 20 to 500 μg/g and the mixture was pressed to compact samples. The resulting calibration curves and the calculated relative sensitivity factors (RSF) differed only from 0.4 to 2 for different elements. For nearly all elements the standard deviations in the determination of trace elements in La_0.65Sr_0.3MnO₃ were better than 15% and detection limits (using the 3σ-criterion) were below 10 μg/g. Changes of the discharge parameters (RF power, pressure of the discharge gas (Ar) in the RF glow discharge) have no significant influence on the sensitivity to elements.     

On-line coupling of ion chromatography and atomic spectrometry and use of direct graphite furnace atomic absorption spectrometry as new tools for ultra trace determinations in refractory metals

On-line coupling of inductively coupled plasma (ICP) techniques such as ICP-AES and ICP-MS with ion chromatography (IC) offers unique features for ultra-trace analysis. An on-line preconcentration procedure based on cation exchange enables sub-ng/g analysis in complex matrices like molybdenum and tungsten. The best dissolution reagent for these matrices is hydrogen peroxide, which can be cleaned to ultra high purity with the same metal free chromatography equipment used for the preconcentration. Preconcentration is possible for elements that show cationic reactions within acidic peroxide containing solutions. In this study 28 elements detrimental for microelectronics applications are observed. A comparison of the combinations IC-ICP-AES and IC-ICP-MS with glow discharge mass spectrometry (GDMS) for the analysis of today's purest tungsten samples shows the analytical power and accuracy of the coupled devices. Graphite furnace atomic absorption spectrometry (GFAAS) as an extremely sensitive analytical technique is applied with and without the same sample pretreatment as used for the on-line coupling. Direct GFAAS measurements of alkali metals are complementary to IC-ICP techniques. The data evaluated with these wet chemical techniques are compared to the usual manufacturers characterisation technique GDMS. With respect to the low concentrations present in these high purity materials (ng/g level in the solid) the discrepancies between all methods are acceptable. The sensitivity of IC-ICP-MS is in most cases far superior to IC-ICP-AES and for some elements also to GDMS. Furthermore the specific advantages of on-line coupling such as the elimination of isobaric interferences in ICP-MS or spectral interferences in ICP-AES are shown for ICP-AES and ICP-MS determinations.     

Modified microelectrodes and multivariate calibration for flow injection amperometric simultaneous determination of ascorbic acid, dopamine, epinephrine and dipyrone

Flow injection amperometric quantification of ascorbic acid (AA), dopamine (DA), epinephrine (EP) and dipyrone (DI) in mixtures (in the microgram g-1 range) was successfully performed by using an array of microelectrodes with units modified by the electrodeposition of different noble metals, together with multivariate calibration analysis. The four groups of microelectrodes utilized included a pure gold electrode and electrodes modified by electrodeposition of platinum, palladium or a mixture of platinum + palladium. The array of microelectrodes was inserted in a flow cell and the amperometric data acquisition was performed with a four-channel potentiostat. The analysis of the resulting signals was carried out by a multivariate calibration method, using a group of 16 standard mixtures selected by a two-level factorial design. The analysis of synthetic samples and pharmaceutical compounds containing AA and DI led to very similar values to those obtained by the classical iodimetric analysis. The average absolute errors (in microgram g-1) calculated for each analyte were 0.3, 0.2, 0.4 and 0.4 for AA, DA, EP and DI, respectively.     

Isotopic abundance measurements on solid nuclear-type samples by glow discharge mass spectrometry

A double-focusing Glow Discharge Mass Spectrometer (GDMS) installed in a glovebox for nuclear sample screening has been employed for isotopic measurements. Isotopic compositions of zirconium, silicon, lithium, boron, uranium and plutonium which are elements of nuclear concern have been determined. Interferences arising from the matrix sample and the discharge gas (Ar) for each of these elements are discussed. The GDMS results are compared with those from Thermal Ionization Mass Spectrometry (TIMS). For boron and lithium at g/g-ng/g levels, the two methods gave results in good agreement. In samples containing uranium the isotopic composition obtained by GDMS was in agreement with those from TIMS independently of the enrichment. Attempts for the determination of plutonium isotopic composition were also made. In this case, due to the interferences of uranium at mass 238 and americium at mass 241, the GDMS raw data are complementary with those values obtained from physical non-destructive techniques.     

Harmonisation of coupled calibration curves to reduce correlated effects in the analysis of natural gas by gas chromatography

Quantitative analysis of natural gas depends on the calibration of a gas chromatograph with certified gas mixtures and the determination of a response relationship for each species by regression analysis. The uncertainty in this calibration is dominated by variations in the amount of the sample used for each analysis that are strongly correlated for all species measured in the same run. The "harmonisation" method described here minimises the influence of these correlations on the calculated calibration curves and leads to a reduction in the root-mean-square residual deviations from the fitted curve of a factor between 2 and 5. Consequently, it removes the requirement for each run in the calibration procedure to be carried out under the same external conditions, and opens the possibility that new data, measured under different environmental or instrumental conditions, can be appended to an existing calibration database.     

Enhancement of intensities in glow discharge mass spectrometry by using mixtures of argon and helium as plasma gases

Glow discharge mass spectrometry (GD-MS) is an excellent technique for fast multi-element analysis of pure metals. In addition to metallic impurities, non-metals also can be determined. However, the sensitivity for these elements can be limited due to their high first ionization potentials. Elements with a first ionization potential close to or higher than that of argon, which is commonly used as discharge gas in GD-MS analysis, are ionized with small efficiency only. To improve the sensitivity of GD-MS for such elements, the influence of different glow-discharge parameters on the peak intensity of carbon, chlorine, fluorine, nitrogen, phosphorus, oxygen, and sulfur in pure copper samples was investigated with an Element GD (Thermo Fisher Scientific) GD-MS. Discharge current, discharge gas flow, and discharge gas composition, the last of which turned out to have the greatest effect on the measured intensities, were varied. Argon–helium mixtures were used because of the very high potential of He to ionize other elements, especially in terms of the high energy level of its metastable states. The effect of different Ar–He compositions on the peak intensity of various impurities in pure copper was studied. With Ar–He mixtures, excellent signal enhancements were achieved in comparison with use of pure Ar as discharge gas. In this way, traceable linear calibration curves for phosphorus and sulfur down to the μg kg⁻¹ range could be established with high sensitivity and very good linearity using pressed powder samples for calibration. This was not possible when pure argon alone was used as discharge gas. This contribution is based on a presentation given at the Colloquium for Analytical Atomic Spectroscopy (CANAS ’07) held March 18–21, 2007 in Constance, Germany.     

Construction of an automated gas chromatography/mass spectrometry system for the analysis of ambient volatile organic compounds with on-line internal standard calibration

An automated sampling and enrichment apparatus coupled with a gas chromatography/mass spectrometry (GC/MS) technique was constructed for the analysis of ambient volatile organic compounds (VOCs). A sorbent trap was built within the system to perform on-line enrichment and thermal desorption of VOCs onto GC/MS. In order to improve analytical precision, calibration accuracy, and to safe-guard the long-term stability of this system, a mechanism to allow on-line internal standard (I.S.) addition to the air sample stream was configured within the sampling and enrichment apparatus. A sub-ppm (v/v) level standard gas mixture containing 1,4-fluorobenzene, chloropentafluorobenzene, 1-bromo-4-fluorobenzene was prepared from their pure forms. A minute amount of this I.S. gas was volumetrically mixed into the sample stream at the time of on-line enrichment of the air sample to compensate for measurement uncertainties. To assess the performance of this VOC GC/MS system, a gas mixture containing numerous VOCs at sub-ppb (v/v) level served as the ambient air sample. Various internal standard methods based on total ion count (TIC) and selective ion monitoring (SIM) modes were attempted to assess the improvement in analytical precision and accuracy. Precision was improved from 7-8% RSD without I.S. to 2-3% with I.S. for the 14 target VOCs. Uncertainties in the calibration curves were also improved with the adoption of I.S. by reducing the relative standard deviation of the slope (Sm%) by an average a factor of 4, and intercept (Sb%) by a factor of 2 for the 14 target VOCs.     

Photon interaction cross sections for some amino acids in the range 30–385 keV

Total attenuation cross sections for several amino acids have been measured for Ba¹³³ photons in a narrow beam good geometry setup, using a hyper pure germanium detector. These values are compared with the values calculated using the mixture rule based on the data of Hubbell for the individual elements and found to be in good agreement.