Experimental Studies on Low-Pressure Plane-Parallel Hollow Cathode Discharges

Hollow cathode discharge (HCD) is widely used in material processing and plasma emission spectroscopy due to several advantages over other plasma sources. Basically, the HCD consists of a cathode with a hollow structure (cavity, hole, or parallel faces) and an anode of arbitrary shape. In this investigation, experimental studies on low-pressure plane-parallel HCD operated at different process conditions are reported. Herein, we investigate the dependence of the discharge current on the product of the gas pressure and inter-cathode distance (pD). In addition, the electron temperature and density were inferred from the current-voltage characteristics of a single cylindrical Langmuir probe positioned between the cathodes, on the discharge axis. The measurements were carried out at different gas pressures, magnetic field intensities, working gases, inter-cathode distances, cathode materials, and discharge voltages. The results showed that, at different gas pressures, the maximum discharge current (I_d,max) is not only a function of the product pD, but also of the pressure itself. Application of a uniform longitudinal magnetic field improved plasma confinement between cathodes, leading to a substantial increase in I_d,max in most of the situations considered in this study. However, for oxygen discharge, a strong discharge current reduction after the application of the magnetic field was observed. In relation to the Langmuir probe studies, it was observed that the uniform longitudinal magnetic field reduced the electron temperature, but this behavior depends strictly on pD. The typical values of electron density and electron temperature in the case of the nitrogen discharge were n_e?=?10¹⁷ m^?3 and T_e?=?2.5 eV, respectively. Finally, our experiments showed that the pD range for hollow cathode effects was between 0.2–5 Pa m.     

Linewidth studies on the Ar+ 476.5 nm and 480.6 nm lines excited in a helium-agron hollow cathode discharge

The spectral line shapes of the Ar⁺ 476.5 nm and 480.6 nm lines, excited in a He-Ar hollow cathode (HC) discharge, were measured using the Fabry-Perot technique. The collisional and Doppler linewidths were determined for the two lines. The collisional broadening constants are estimated to be (5±3) MHz/mbar and (6±3) MHz/mbar, respectively. The temperature obtained from the two Ar ion transitions was found to be 260 K higher than that expected for the rest of the gas mixture from earlier measurements. The possibility is discussed, that this excess temperature is caused by Ar ions partially created in the HC discharge by charge transfer collisions with He ₂ ⁺ molecules.     

Characteristics of DC discharge in a wire-cylinder configuration at high ambient temperatures

In the present work, the characteristics of direct-current (DC) discharge in a wire-cylinder configuration at an ambient temperature range of 350–850 °C were studied by analyzing photographs of the discharging process and the corresponding V–I characteristics, with the aim of facilitating the application of plasma technology in the fields of energy and the environment. The influences of the ambient temperature, the inter-electrode gap, the gas medium and the cathode material on the DC discharge were investigated. The corona-onset threshold voltage (COTV) and the spark-breakdown threshold voltage (SBTV) decrease as the ambient temperature increases, and the SBTV decreases more rapidly. Increasing the inter-electrode gap enlarges the difference between the SBTV and the COTV. After spark breakdown, in an air atmosphere, glow discharge is more likely to take place under conditions of high ambient temperatures or small inter-electrode gaps. The values of the SBTV in different atmospheres have the following relation: air ≈ O₂ > CO₂. At an ambient temperature range of 350–850 °C and in an atmosphere of N₂, glow discharge and arc discharge occur successively as the output voltage of the power supply is increased, while in an atmosphere of O₂ and CO₂, only corona and arc discharge are successively observed. In an air atmosphere, when the inter-electrode gap is 29 mm, corona, glow and arc discharge occur successively with increasing output voltage when the ambient temperature is 850 °C, while only corona and arc discharge appear when the temperature is 350–750 °C. When the inter-electrode gap is 5 mm in an air atmosphere, corona, glow and arc discharge occur successively in an ambient temperature range of 350–850 °C. The cathode material has a minor influence on the COTV and a more significant influence on the SBTV. In a device using a cathode with a low work function, the SBTV is low, and the power to maintain arc discharge is small.     

Nonlinear plasma spectroscopy of the hydrogen balmer-α line

The plasma line broadening of H_α fine-structure lines is investigated with Doppler-free saturation and polarization spectroscopy in He-H gas and are discharges at plasma densities of 10⁸ cm^?3 <N?1.4×10¹⁴ cm^?3. With a single-mode laser, the shift and broadening of four resolved H_α fs lines are measured in a low pressure discharge forN<10¹¹ cm^?3. With an intense, broadband multi-mode laser the plasma effects of H_α are investigated up toN=1.4×10¹⁴ cm^?3 in a hollow cathode are. Calculations in the classical phase shift and impact approximations can explain the experimental data and peculiarities of the low-density plasma effects and show that the ions are the dominant perturbers. Ion dynamical effects, perturber mass and temperature dependence, are observed and interpreted. Applications of the nonlinear techniques to other H and D lines, other atoms, and for H and D plasma diagnostics are discussed.     

Optical Emission Spectroscopy of Carbon Clusters Produced in a Hollow Cathode Sputter Source

A hollow cathode sputter source is developed to trace the production of carbon clusters and study the influence of discharge current and argon gas pressure on cluster production using an optical emission spectroscopic technique. Optical emission spectra from the hollow cathode source reveal the production of the C₂ Swan band. The sputter source is optimized for the maximum carbon cluster yield. The vibrational temperature analysis of the C₂ cluster is carried out using the Boltzmann plot method. The dependence of vibrational temperature on argon gas pressure is discussed and the dominant method for C-C association in the glow discharge is suggested.     

Spectroscopy of the regenerative soot

The mechanisms and processes of the formation of the regenerative soot in a graphite hollow cathode discharge that produces and emits carbon clusters are presented. Mass spectrometry with a specially designed E×B velocity filter analyzes the entire range of the charged clusters from C ₁ to ∼C ₄₃₀₀. The state of the carbon vapour within the source is evaluated by using the characteristic line emissions from the carbonaceous discharge whose formative mechanisms depend upon the kinetic and potential sputtering of the sooted cathode. The carbonaceous discharge generates atomic and ionic C and its clusters C _m (m≥ 2), noble gas metastable atoms and ions, energetic electrons and photons in the cavity of the graphite hollow cathode. The parameters of soot formation and its recycling depend critically on the discharge parameters, the geometry of the hollow cathode and 3D profile of the cusp magnetic field contours. Received 2nd July 2001 and Received in final form 10 September 2001     

Density of fast electrons on the Axis of a Zylindrical Hollow-Cathode Discharge

Fast electrons leaving a hollow cathode discharge axially through the orifice of a hole probe undergo ionizing collisions with the discharge gas in and behind the orifice. Ar⁺⁺ ions produced in this way are used as a monitor for the density of fast electrons, N_ef, on the axis of the negative glow of a cylindrical hollow cathode discharge. Data on N_ef as dependent on the pressure of the Ar discharge gas and on the discharge current are obtained and an analytical expression for these dependences is found and discussed.     

Optical investigation of ErFeO3

The absorption spectrum of single crystals of ErFeO₃ has been investigated in the red and near infrared spectral region in the temperature range between 1.2 °K and 4.2 °K and at 20 °K and 77 °K. Between 77 °K and 4.2 °K a constant splitting of the absorption lines is observed. Below the Néel-temperature of the erbium sublattice at 4.5 °K the splitting of the absorption lines increases; the saturation value extrapolated to 0 °K of the splitting of the lowest crystal field level of the⁴ I _15/2 groundterm is (6.08±0.30) cm^?1. By measuring the Zeeman effect the groundstate magnetic moment is determined asμ=(6.6±0.2)μ _B. The measured temperature dependence of the splitting of the lowest crystalfield level of the⁴I_15/2 groundterm is compared with that calculated by a Monte Carlo method.     

Current analysis of DC negative corona discharge in a wire-cylinder configuration at high ambient temperatures

To study the characteristics of DC negative corona discharge in a wire-cylinder configuration at an ambient temperature range of 350–850 °C, the I–V characteristics and the current composition are analyzed under different conditions. A simple method is proposed to determine the DC corona onset threshold voltage. At high ambient temperatures, in the DC negative corona discharge gap, some electrons are not attached to the electronegative gas molecules and move to the anode tube. Thus, these electrons form an electron current, which may account for most of the total discharging current. The ratio of the electron current to the total discharging current increases with increasing temperature. In a mixture of O₂ and N₂ and a mixture of CO₂ and N₂, the ratio of electron current increases with increasing N₂ content in the mixtures. The cathode material has little influence on the corona discharge characteristics at high ambient temperatures.     

Spectroscopic Study of a Hollow Cathode Discharge Operating at Direct and High Frequency Currents - Temperature Measurements

Spectra excited in a hollow cathode discharge operating at high frequency and direct currents have been studied. Samples (La₂O₃ and Y₂O₃) were placed in the copper hollow cathodes and argon was a carrier gas. The excitation temperatures of Ar I, Ar II, Cu I, Y I, Y II and La II in high frequency and direct current hollow cathode discharges have been determined and compared.     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

WO3 oxide film formation on tungsten in O2/H2 discharges

The features of tungsten oxidation in a flowing O₂ or O₂/H₂ mixture glow discharge with a hollow cathode are investigated in the cathode, plasma, and afterglow regions at T = 300–350 K. The structure and composition of the samples are analyzed via reflection high-energy electron diffraction, reflection X-ray diffraction, electron probe microanalysis, and X-ray photoelectron spectroscopy. The results of analysis show that the metal surface is covered by a thin film (5–10 nm thick) of amorphous porous hydrated tungsten oxide (WO₃) after its exposure to the discharge and storage in air. The study of the film composition using a time-of-flight mass spectrometer indicates that the WO₃ film contains (WO₃) _n (n = 1–6) clusters and water molecules adsorbed in the pores. After exposure of the polycrystals to the O₂/H₂ discharge, the selective intense oxidation of individual grains is detected in the cathode region; the surrounding areas are subjected to weaker oxidation. The thicknesses of the WO₃ films on neighbouring grains differ by more than tenfold. Such grains can be the source of tungsten dust in plasma installations.     

Line broadening studies in low energy plasma focus

Optical emission spectroscopic studies were carried out to characterise the plasma leading to the estimation of two plasma parameters, electron density and temperature. These experiments were conducted on a 2 kJ plasma device which is equipped with squirrel cage electrode configuration enclosed in a glass vacuum chamber filled with hydrogen at a pressure of 5 mbar. Spectral emissions obtained from each flash were photographed in the region of 4000–6000 Å using one metre Czerny-Turner spectrograph cum monochromator. Detailed examination of the observed features showed that theH _β andH _λ lines of hydrogen showed significant broadening of the order of 35 Å FWHM which is due to Stark effect expected in high density plasmas. Further several atomic lines of Cu and Zn from the electrode material (brass) showed broadening which was due to quadratic Stark effect. A comparative study of the broadening of lines obtained in DC arc, hollow cathode and plasma focus was made. Electron density from Stark broadened hydrogen lines and quadratic Stark Coefficient C₄ for the CuI and ZnI lines were evaluated. The excitation temperature was determined from the line intensity ratio method using CuI lines.     

Donor-acceptor pair recombination and phonon replica in GaSxSe1−x

The photoluminescence of a series of mixed crystals GaS_xSe_1?x, (0?x?1) has been determined as a function of excitation intensity, polarization, temperature between 4.2°K and 60°K, and delay between excitation pulse and detection. All the spectra at 4.2°K contain similar series of lines whose energy varies with the composition x like the indirect gap. The highest energy line in each spectrum is attributed to transitions between shallow and distant donors and acceptors forming pairs. The width of the line, its energy and its behaviour as a function of delay are interpreted. The other lines are interpreted as phonon replica of the highest energy line.     

Relative densities of hydrogen ion species in a hollow cathode glow discharge

Highly resolved Doppler shifted peaks of the hydrogen Balmer lines, resulting from charge exchange of H⁺, H₂⁺, and H₃⁺ with an H₂ gas target, were obtained without the need for a deconvolution procedure. This enabled the unambiguous determination of the chemistry of these hydrogen species in the units of mTorr pressure range. This was obtained from a gaseous discharge using a biconical hollow cathode that yielded a well collimated and monoenergetic beam.     

Formation of Films of Tungsten and its Oxides in a High-Frequency Capacitive Discharge in a D<Subscript>2</Subscript>-O<Subscript>2</Subscript> Mixture

A technique for tungsten-film deposition on different substrates in asymmetrical high-frequency (1.76 MHz) capacitive discharge in a D₂?6.5 mol % O₂ mixture under a total pressure of 15 Pa and at 60–130°C is considered. A circular W strip near the upper inner edge of a cylindrical hollow cathode with a radius of 4.2 cm and a height of 10 cm is the source of W particles. The smooth transition from sputtering of the inner surface to deposition occurs at a distance of about 4 cm from the upper boundary of the open part of the cathode. W, Mo, ZrO₂, Si, and Cu substrates are placed in the lower closed end (bottom) and on the inner lateral cathode surface. At the upper cathode edge the sputtering yield is (4–5) × 10^?2 at/ion. The mass rate of W deposition on the cathode bottom does not depend on the substrate type and is 40 μg/(cm² h). The peculiarities of the composition, morphology, and structure of W films obtained on the lateral surface and bottom of the hollow cathode are discussed.     

Effect of heptamethyldisilazane on the electrochemical performance of LiMn2O4/Li

The effect of heptamethyldisilazane as an electrolyte stabilizer on the cycling performance of a LiMn₂O₄/Li cell at different rates at 30 °C and the storage performance at 60 °C is investigated systematically based on conductivity test, linear sweep voltage, electrochemical impedance spectroscopy, scanning electron microscopy, X-ray diffraction, and charge–discharge measurements. The results show that heptamethyldisilazane added into the LiPF₆-based electrolyte can increase the stability of the original electrolyte; coulomb efficiency, the initial discharge capacity, and cycling performance at different rates in a sense, meanwhile, improve the storage performance at elevated temperature, although the C-rate performance of the cell is a little worse than that without heptamethyldisilazane in the electrolyte. When the LiMn₂O₄/Li cell with heptamethyldisilazane in the LiPF₆-based electrolyte stored at 60 °C for a week cycles 300 times, the capacity retention is up to 91.18 %, which is much higher than that (87.18 %) without the additive in the electrolyte. This is mainly due to the lower solid electrolyte interface resistance (R _f) in the cell, followed by the better morphology and structure of the cathode after storage at 60 °C for a week compared with the LiMn₂O₄/Li cell without heptamethyldisilazane.     

Surface condition and electron emission from cold cathodes in vacuum and in noble gas glow discharge

An optogalvanic method is used to measure photoemission coefficient γ_ph in a gas discharge exposed to the resonant radiation of helium atoms. The range of working current j/P _He ² (j is the current density, and P _He is the gas pressure) extends from 2 to 1000 μA/(cm² Torr), and field strength E/N at the cathode varies from 0.45 to 13 kTd. Up to j/P _He ² = 10 μA/(cm²Torr²), photoemission coefficient γ_ph grows and then tends toward saturation at a level of γ_ph = 0.30 ± 0.01. Under the no-discharge conditions, γ_ph = 0.35 ± 0.05. It is concluded that the emissivity of cold cathodes in a gas discharge is governed by adsorption of the working gas on the cathode surface and its implantation into the cathode. With allowance for this factor, the contribution of photoemission to the discharge current is reconsidered. It is shown that, for cathodes with diameter d _c ? l _c (l _c is the length of the cathode layer), a normal or weakly abnormal glow discharge in noble gases is largely of a photoelectron character. In light noble gases, the photoelectron character of the discharge persists even for a strongly abnormal discharge. The energy dependences of coefficients γ of kinetic and potential emission in helium are calculated with allowance for implantation of helium atoms into the cathode and compared with published data. The influence of particle implantation on γ in a vacuum is estimated.     

Radial Inhomogeneities in Excitation and Profile of Copper Lines in Hollow Cathode Discharge

By interferometric investigation data for radial inhomogeneities in excitation and profile of some copper lines and for the population of 4p²p° level of CuI in hollow cathode discharge are obtained. Observed dependence of the line profile width on the radial location of the emitting volume is interpreted through the varying ratio of Lorentz and Gauss components in the line profile emitted from various discharge volumes. The maximum population of 4p²p° level of CuI in the region of applied pressure and discharge current is observed when the copper line is emitted along the cathode axis.     

Zur Ausbreitung der Entladung in selbstlöschenden Zählrohren. IV

Measurements with a Geiger counter with inserted grid between wire and cathode solved the problem whether the discharge process is built up by the photoeffect in the gas or at the cathode of the counter. For negative voltagesU _g of the grid (cathode grounded) only the volume inside of the grid is sensitive to discharges. It was found, that within the limits of error, the threshold did not depend on the masking degree of the cathode. From this it follows that mainly the photoeffect in the gas contributes to the discharge process. But the distributions of time of the discharge spread along the wire atU _g<0,U _g>0 and in a counter with a massive cathode has shown that also the photoeffect at the cathode contributes to the discharge process.