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1.
Nanosecond (ns) laser ablation can provide a competitive solution for silicon micromachining in many applications. However, most of the previous studies focus on ns lasers at visible or ultraviolet (UV) wavelengths. The research is very limited for ns lasers at infrared (e.g., 1064 nm) wavelengths (which often have the advantage of much lower cost per unit average output power), and the research is even less if the ns laser also has a long pulse duration on the order of ∼100 ns. In this paper, time-resolved observation using an ICCD (intensified charge-coupled device) camera has been performed to understand the physical mechanism of silicon ablation by 200-ns and 1064-nm laser pulses. This kind of work has been rarely reported in the literature. The research shows that for the studied conditions, material removal in laser silicon ablation is realized through surface vaporization followed by liquid ejection that occurs at a delay time of around 200-300 ns. The propagation speed is on the order of ∼1000 m/s for laser-induced plasma (ionized vapor) front, while it is on the order of ∼100 m/s or smaller for the front of ejected liquid. It has also been found that the liquid ejection is very unlikely due to phase explosion, and its exact underlying physical mechanism requires further investigations. 相似文献
2.
The multiply charged ions of C q + (q ≤ 4), O q + (q ≤ 6) were produced when a furan cluster beam interacted with nanosecond 1064 and 532 nm lasers at intensities of 1010–1012 W/cm2. It is shown that O6+ and C4+ ions were the dominant multiply charged species at 1064 nm, while C2+, C3+, O2+, O3+ ions were the main multiply charged species at 532 nm. By varying the electric field in the extraction region of the time of flight mass spectrometer (TOFMS), two types of ions were extracted, one of which had large kinetic energy and narrow space distribution, and the other had small kinetic energy and broad space distribution. The formation channels for He-like ions of C4+ and O6+ are discussed. 相似文献
3.
根据计算得到的双波长激光振荡的阈值条件,激光实验中对全反镜镀制1 319和1 338 nm的全反膜(其反射率大于99.73%,而对1 064 nm激光的反射率约为7%);输出镜采用对1 064 nm强谱线95%的高透过率,而对1 319和1 338 nm谱线的透过率分别为34.7%,32.5%,有效抑制了强线1 064 nm振荡,成功实现了1 319和1 338 nm Nd:YAG同时双波长激光脉冲输出。当输入能量为125 J时,1 319和1 338 nm脉冲双波长激光的单脉冲总输出能量为0.89 J,电-光转换效率为0.71%,斜率效率为0.89%。输出的双波长激光的中心波长分别在1 318.8和1 338.2 nm处,谱线宽度(FWHM)分别为0.35和0.48 nm,强度之比为36:44。 相似文献
4.
通过化学气相沉积法制备,并转移到基片得到1~3层石墨烯样品。利用霍尔效应及微区拉曼光谱测量,结合光学显微镜观察,分析了不同层数石墨烯在1064 nm纳秒激光辐照下的损伤特性。实验发现1~3层石墨烯的激光损伤阈值依次降低,分别为:单层0.45 J/cm2,2层0.34 J/cm2,3层0.23 J/cm2。激光强度超过阈值时,石墨烯薄膜电阻增大,载流子迁移率降低。通过光学显微镜观察发现局部区域破损,破损区域的拉曼光谱中1580 cm-1左右的G峰和2700 cm-1左右的2D峰高度比发生变化。实验结果表明1064 nm纳秒激光辐照石墨烯主要为剥离作用。 相似文献
5.
利用Nd:YAG纳秒激光(波长为1064 nm)在不同气氛(空气、N2,真空)中对单晶硅进行累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,与532和355 nm纳秒脉冲激光在硅表面诱导出波纹结构不同,1064 nm脉冲激光诱导出了微孔结构和折断线结构,并且硅的晶面取向不同,相应的折断线结构也不同.对于Si(111)面,两条折线交角为120°或60°,形成网状;而对于Si(100)面,两条折断线正交,从而将表面分成了15—20 μm的矩形块.结果表明,微孔结构的生长过程主要与相爆炸有关,而折断线的形成主要是热应力作用的结果.不同气氛对微结构形成的影响表明,刻蚀率和生长率与微结构的形成有密切的关系.
关键词:
纳秒激光
硅的微结构
相爆炸
热应力 相似文献
6.
为研究激光烧蚀靶产生冲量过程和机理, 建立了一个复杂的一维热传导和流体动力学模型. 以空间碎片常见材料Al为例, 用建立的模型数值计算了纳秒脉宽激光烧蚀靶产生的冲量及冲量耦合系数随时间变化情况. 数值结果和已有的实验数据符合的较好. 数值计算表明: 激光脉冲时间内, 靶获得的冲量随时间迅速增加, 在脉冲时间结束后, 冲量变化随时间趋于稳定; 在冲量耦合过程中, 烧蚀等离子体向真空膨胀, 羽流尺度逐渐增大, 同时吸收入射激光能量, 导致激光与靶耦合的能量降低.
关键词:
激光烧蚀
冲量耦合
等离子体 相似文献
7.
A gold target has been irradiated with a Q-switched Nd:Yag laser having 1064\,\hbox{nm} wavelength, 9\,\hbox{ns} pulse width, 900\,\hbox{mJ} maximum pulse energy and a maximum power density of the order of 10^{10}\,\hbox{W}/\hbox{cm}^2 . The laser-target interaction produces a strong gold etching with a production of a plasma in front of the target. The plasma contains neutrals and ions having high charge state. Time-of-flight measurements are presented for the analysis of the ion production and ion velocity. A cylindrical electrostatic deflection ion analyzer permits to measure the yield of the emitted ions, their charge state and their ion energy distribution. Measurements indicate that the ion charge state reaches 6^+ and 10^+ at a laser fluence of 100\,\rm{J/cm}^2 and 160\,\rm{J/cm}^2 , respectively. The maximum ion energy reaches about 2\,\hbox{keV} and 8\,\hbox{keV} at these low and at high laser fluence, respectively. Experimental ion energy distributions are given as a function of the ion charge state. Obtained results indicate that electrical fields, produced in the plume, along the normal to the plane of the target surface, exist in the unstable plasma. The electrical fields induce ion acceleration away from the target with a final velocity dependent on the ion charge state. The ion velocity distributions follow a "shifted Maxwellian distribution", which the authors have corrected for the Coulomb interactions occurring inside the plasma. 相似文献
8.
L. Torrisi A.M. Mezzasalma J. Badziak J. Wolowski G. Franco 《Applied Surface Science》2006,252(24):8533-8538
High energy laser plasma-produced Cu ions have been implanted in silicon substrates placed at different distances and angles with respect to the normal to the surface of the ablated target. The implanted samples have been produced using the iodine high power Prague Asterix Laser System (PALS) using 438 nm wavelength irradiating in vacuum a Cu target. The high laser pulse energy (up to 230 J) and the short pulse duration (400 ps) produced a non-equilibrium plasma expanding mainly along the normal to the Cu target surface. Time-of-flight (TOF) technique was employed, through an electrostatic ion energy analyzer (IEA) placed along the target normal, in order to measure the ion energy, the ion charge state, the energy distribution and the charge state distribution. Ions had a Boltzmann energy distributions with an energy increasing with the charge state. At a laser fluence of the order of 6 × 106 J/cm2, the maximum ion energy was about 600 keV and the maximum charge state was about 27+.In order to investigate the implantation processes, Cu depth profiles have been performed with Rutherford backscattering spectrometry (RBS) of 1.5 MeV helium ions, Auger electron spectroscopy (AES) with 3 keV electron beam and 1 keV Ar sputtering ions in combination with scanning electron microscopy (SEM). Surface analysis results indicate that Cu ions are implanted within the first surface layers and that the ion penetration ranges are in agreement with the ion energy measured with IEA analysis. 相似文献
9.
采用Nd:YAG纳秒脉冲激光对单晶硅在空气中进行辐照,研究了表面微结构在不同能量密度和扫描速度下的演化情况。扫描电子显微镜测量表明,激光在相对较低能量密度下辐照硅表面诱导出鱼鳞状波纹结构,激光能量密度相对较大时,诱导出絮状多孔的不规则微结构。光致荧光谱(PL)表明,激光扫描区域在710 nm附近有荧光发射。用氢氟酸腐蚀掉样品表面的SiOx后,荧光峰的强度显著降低,说明SiOx在光致发光增强上起重要作用。能量色散X射线谱(EDS)表明氧元素的含量随激光能量密度的增大而增加。研究表明:纳秒激光的能量密度和扫描速度对微结构形成起着决定性作用,改变了硅材料表面微结构尺寸,增大了光吸收面积; 氧元素在光致发光增强上起重要作用,微构造硅和SiOx对光致荧光的发射都有贡献。 相似文献
10.
The dependence of multiply charged ions on laser ellipticity in methyl iodide clusters with 532 nm nanosecond laser was measured using a time-of-flight mass spectrometer. The intensities of multiply charged ions Iq+(q = 2–4) with circularly polarised laser pulse were clearly higher than those with linearly polarised laser pulse but the intensity of single charged ions I+ was inverse. And the dependences of ions on the optical polarisation state were investigated and a flower petal and square distribution for single charged ions (I+, C+) and multiply charged ions (I2+, I3+, I4+, C2+) were observed, respectively. A theoretical calculation was also proposed to simulate the distributions of ions and theoretical results fitted well with the experimental ones. It indicated that the high multiphoton ionisation probability in the initial stage would result in the disintegration of big clusters into small ones and suppress the production of multiply charged ions. 相似文献
11.
1 064 nm与532 nm激光对电子束蒸发制备的HfO2/SiO2高反膜损伤比较 总被引:2,自引:0,他引:2
研究了电子束蒸发制备的HfO2/SiO2高反膜在1 064 nm与532 nm激光辐照下的损伤行为。基频激光辐照时损伤形貌主要为节瘤缺陷喷溅留下的锥形坑,当能量密度较大时出现分层剥落;二倍频激光损伤主要是由电子缺陷引起的平底坑,辐照脉冲能量密度稍高时也会产生吸收性缺陷引起的锥形坑,但电子缺陷的损伤阈值更低;随着辐照脉冲能量密度的增大分层剥落逐渐成为主要的损伤形貌。分析认为,辐照激光波长的变化,引起吸收机制的变化从而导致了损伤阈值及损伤机制的差异。 相似文献
12.
For many applications, optical multimode fibers are used for the transmission of powerful laser radiation. High light throughput and damage resistance are desirable. Laser-induced breakdown at the end faces of fibers can limit their performance. Therefore, the determination of laser-induced damage thresholds (LIDT) at the surface of fibers is essential.Nanosecond (1064 nm and 532 nm wavelength) single-shot LIDT were measured according to the relevant standard on SiO2 glass preforms (Suprasil F300) as basic materials of the corresponding fibers. For 10 kinds of fused silica fibers (FiberTech) with core diameters between 180 μm and 600 μm, an illumination approach utilizing a stepwise increase of the laser fluence on a single spot was used. For both wavelengths, the LIDT values (0% damage probability) obtained by means of the two methods were compared. The influence of surface preparation (polishing) on damage resistance was investigated. For equal surface finishing, a correlation between drawing speed of the fibers and their surface LIDT values was found. In addition to the surface measurements, bulk LIDT were determined for the preform material. 相似文献
13.
The production of nanoparticles via femtosecond laser ablation of gold and copper is investigated experimentally involving measurements of the ablated mass, plasma diagnostics, and analysis of the nanoparticle size distribution. The targets were irradiated under vacuum with a spot of uniform energy distribution. Only a few laser pulses were applied to each irradiation site to make sure that the plume expansion dynamics were not altered by the depth of the laser-produced crater. Under these conditions, the size distribution of nanoparticles does not exhibit a maximum and the particle abundance monotonously decreases with size. Furthermore, the results indicate that two populations of nanoparticles exist within the plume: small clusters that are more abundant in the fast frontal plume component and larger particles that are located mostly at the back. It is shown that the ablation efficiency is strongly related to the presence of nanoparticles in the plume. 相似文献
14.
F. Kokai Y. Koga Y. Kakudate M. Kawaguchi S. Fujiwara M. Kubota K. Fukuda 《Applied Physics A: Materials Science & Processing》1994,59(3):299-304
Laser-ionization Time-Of-Flight (TOF) mass-spectrometric studies have been carried out on the 532 nm and 1064 nm laser ablation products from a nitrogen-rich polymer. The polymer used had an elemental composition of C6.0N8.9H3.4 and consisted of C=N, C-N, and N-H chemical bonds. The TOF mass spectra observed were composed of various peaks (150 amu) depending on the ablation laser wavelength. The primary peaks were assigned to C+, CN+, CHnN+
2 (n=1–3) and C2H2N+
3 for 532 nm ablation, and C+, C+
3, HCN+, HCCN+, CH2NH+, HNCN+, H3NCN+, and C4H4N+
7 for 1064 nm ablation. The flight velocity distributions with peak velocities ranging from 8.6×103 cm/s to 3.8×104 cm/s were measured for these products. The distinct velocity distributions observed between small and large products indicate the presence of two origins in the fragment ejection process from the polymer for both 532 nm and 1064 nm ablation. Furthermore, we suggest an importance of the translational energy of the fragments for the product generation in the laser plume. 相似文献
15.
Solid-like ablation propulsion generation in nanosecond pulsed laser interaction with carbon-doped glycerol 下载免费PDF全文
A solid-like propellant of carbon-doped glycerol ablated by a nanosecond pulsed laser is investigated. The results show that the specific impulse increases with increasing carbon content, and a maximum value of 228s is obtained. The high specific impulse is attributed to the low ablated mass loss that occurs at high carbon content. More importantly, with increasing carbon content, the properties of the doped glycerol approach to those of a solid. These results indicate that propulsion at the required coupling coefficient and specific impulse can be realized by doping a liquid propellant with an absorber. 相似文献
16.
We present the optical emission characteristics of the sodium plasma produced at the surface of sodium nitrate (NaNO3) also known as Chile saltpeter. We used a Q-switched Nd:YAG (Quantel Brilliant) pulsed laser having a pulse duration of 5?ns and 10?Hz repetition rate which is capable of delivering 400?mJ at 1064?nm and 200?mJ at 532?nm. The target material was placed in front of laser beam in air (atmospheric pressure). The experimentally observed line profiles of neutral sodium have been used to extract the electron temperature using the Boltzmann plot method, whereas the electron number density has been determined from the Stark broadening. The electron temperature is calculated by varying the distance from the target surface along the line of propagation of the plasma plume and also by varying the laser irradiance. Besides, we have studied the variation of number density as a function of laser irradiance as well as its variation with the distance from the target surface. It is observed that electron temperature and electron number density increase as the laser irradiance is increased. 相似文献
17.
Pulsed digital holographic interferometry has been used to compare the laser ablation process of a Q-switched Nd-YAG laser pulse (wavelength 1064 nm, pulse duration 12 ns) on two different metals (Zn and Ti) under atmospheric air pressure. Digital holograms were recorded for different time delays using collimated laser light (532 nm) passed through the volume along the target. Numerical data of the integrated refractive index field were calculated and presented as phase maps. Intensity maps were calculated from the recorded digital holograms and are used to calculate the attenuation of the probing laser beam by the ablated plume. The different structures of the plume, namely streaks normal to the surface for Zn in contrast to absorbing regions for Ti, indicates that different mechanisms of laser ablation could happen for different metals for the same laser settings and surrounding gas. At a laser fluence of 5 J/cm2, phase explosion appears to be the ablation mechanism in case of Zn, while for Ti normal vaporization seems to be the dominant mechanism. 相似文献
18.
SO2在308nm的多光子电离飞行时间质谱研究 总被引:1,自引:1,他引:1
我们在超声分子束条件下,利用308nm波长的XeCl准分子激光对SO_2分子进行了多光子电离飞行时间质谱实验研究.实验中我们观测到了S~+、SO~+和SO_2~+的质谱信号,测量了各离子信号强度随激光强度的变化关系,并探讨了可能的多光子电离/解离机制. 相似文献
19.
Nadezhda M. Bulgakova Anton B. EvtushenkoYuri G. Shukhov Sergey I. KudryashovAlexander V. Bulgakov 《Applied Surface Science》2011,257(24):10876-10882
Radiative effects of the laser-induced ablative plasma on the heating and ablation dynamics of materials irradiated by nanosecond laser pulses are studied by the example of graphite ablation. On the basis of combined thermal and gas dynamic modeling, the laser-induced plasma plume is shown to be a controlling factor responsible for ultradeep laser drilling due to plasma radiation, both bremsstrahlung and recombinative. We demonstrate that plasma radiative heating of the target considerably deepens the molten layer, thus explaining the observed crater depths. 相似文献
20.
Experimental study has been performed on nanosecond (ns) laser ablation of silicon at 1064 nm, through which a so-called “multi-pulse enhancement effect” has been revealed, which has been rarely reported in literature. The major features of this effect are: (1) for multi-pulse laser ablation at the same spatial location, the ablation efficiency increases as the pulse number increases and the pulse-to-pulse temporal distance decreases; (2) for multi-pulse ablation performed sequentially at a group of locations, the ablation quality and efficiency starting from the second location can be significantly enhanced if the distance between adjacent locations is sufficiently small. Further study is needed to confirm and understand the underlying physical mechanism for the multi-pulse enhancement effect, which can be utilized to significantly improve the quality and efficiency of laser silicon micromachining using the low-cost and low-energy-consumption infrared ns lasers. This may decrease the cost and energy consumption of many relevant areas, such as the solar cell industry. 相似文献