垂直腔面发射半导体微腔激光器

评述了垂直腔面发射半导体激光器研究的最新进展,就其结构特点、应变量子阱结构、超晶格镜面和微腔效应作了简要的论述,探讨了进一步降低半导体激光器阈值的途径,介绍了新型的氧化约束型垂直腔面发射半导体激光器,并对微腔激光器中自发辐射增强效应和三维封闭腔的特性给出了描述,同时展望了该器件的应用及发展前景。     

半导体垂直腔面发射激光器的微腔效应

应用腔量子电动力学和半导体物理学讨论了半导体垂直腔面发射激光器的微腔效应,得到了实际腔结构和注入载流子下的半导体生趣腔面发射激光器的自发发射谱,计算结果表明,半导体分布布拉格反射垂直腔激光器的单方向自发发射可以境强约２００倍。     

用速率方程分析垂直腔面发射激光器的噪声

采用一种合理的噪声模拟方法，用速率方程对垂直腔面发射激光器的噪声特性进行了数值分析，在单模情况下计算了器件的自发辐射因子、输出功率、注入电流、阈值电流等参数与相对强度噪声、频率噪声以及线宽等特性的关系，计算结果与实验基本相符，对优化垂直腔面发射激光器的结构设计和应用条件有所裨益. 关键词：     

纵向耦合对垂直腔面发射激光器的影响

考虑到垂直腔面发射激光器中的光子与载流子的纵向耦合,在行波速率方程中引入了纵向耦合因子。利用这个速率方程,讨论了阀值电流与量子阱数目的关系,计算结果表明光子与载流子的纵向耦合是不容忽视的。给出了阀值电流表达式,它表明纵向耦合因子越大,阀值电流越低。     

新型垂直腔面发射半导体激光器阵列

设计出四次质子注入工艺制备垂直腔面发射激光器(VCSEL)阵列的方法,实现了对阵列中单元器件间的隔离以及对单元器件注入电流限制的分别作用。一方面通过对VCSEL外延片上分布布拉格反射镜(DBR)两次较浅的质子注入形成高电阻区域实现对阵列中单元器件间的隔离,另一方面通过再次的两次较深度的可以达到有源区上表面的质子注入形成高电阻区域实现对单元器件注入电流的限制。由瞬态热传导方程对阵列中单元器件间的热相互作用进行了理论分析。采用四次质子注入工艺实现了2×2、3×3简单的二维GaAs/AlGaAs量子阱VCSEL阵列,并对器件的激射近场、光谱特性及功率等进行了测量。     

径向桥电极高功率垂直腔面发射激光器

为改善高功率垂直腔面发射半导体激光器的热特性,提高它的输出功率,研制了新型径向桥电极高功率垂直腔面发射半导体激光器器件,对新型半导体激光器的结构模型进行理论分析表明,采用径向桥式电极可以降低器件P型DBR电阻,减小焦耳热;降低热阻,提高器件的散热能力。实验制备了出光孔径同为200μm的径向桥电极与常规电极的高功率垂直腔面发射半导体激光器,并对器件的性能进行了实验对比测试。结果表明径向桥电极高功率垂直腔面发射半导体激光器器件的微分电阻为0.43Ω;室温下最大输出功率可达340 mW,是常规电极垂直腔面发射半导体激光器的1.7倍;器件的热阻为0.095℃/mW,在80℃时,仍能正常激射,具有良好的热特性,径向桥电极高功率垂直腔面发射半导体激光器的光电特性与温度特性要远好于常规电极的高功率垂直腔面发射半导体激光器器件。     

分布反射面发射垂直微腔半导体激光器的微腔效应

从理论上分析了作为垂直腔面发射半导体激光器反馈面的异质多层结构对光腔中激光传输振荡过程的影响．指出其相位匹配和等效反射面位置对改善激光器性能的重要作用．说明目前这种被认为很有希望的微腔结构，实际上难以观察到微腔效应的物理根源，并指出其改进的途径． 关键词：     

垂直腔面发射激光器中顶层相位对模式特性的影响

研究了垂直腔面发射激光器中不同的顶层厚度对激光器模式特性的影响。结果表明空气界面反射与分布布拉格反射器（ＤＢＲ）的反射率反相时,将导致阈值增益增加几倍,而且模式光场强度在出射端面有反常的增强,但对光场进入分布布拉格反射器的等效厚度影响不大。精确腐蚀顶层厚度可供替调节分布布拉格反射器周期数,以改善器件特性。     

利用垂直腔表面发射激光器注入锁定实现上变频

提出了一种基于垂直腔表面发射激光器(VCSEL)的无本振光子微波上变频方案。该方案将相对低速的伪随机基带信号注入VCSEL中,利用注入信号的高次谐波注入锁定VCSEL。被锁定激光器波长与原注入光信号在谐振腔中相干差拍,产生上变频调幅微波信号。实验中利用2.5Gb/s非归零码强度调制信号注入锁定VCSEL,无需本振,实现了载波频率为14.3GHz的光子微波上变频,10kHz偏移处载波相位噪声达-81dBc/Hz。通过调节注入光信号的波长和功率,进一步实现载波频率在7.5~23GHz之间的调谐,验证了该方案的可行性,并对系统性能进行了误码分析,系统代价为1.4dB。结果证明该方案无需微波本振,仅需采用价格低廉的VCSEL即可实现光子微波上变频,从而为无线光混合接入网中光子微波信号产生技术提供了一种低成本的解决思路。     

高功率垂直腔面发射激光器的光束准直特性

基于高斯光束的准直原理,针对不同结构参数的大功率垂直腔面发射激光器光束特征,通过选用合适参数的透镜,研究了不同连续和脉冲电流条件激励下光束的准直特性.对于出光口径为200 μm的器件,通过f=3.1 mm,NA =0.68的透镜,连续工作条件下,准直后的最小发散角达到1°;在电流为40A、脉宽60 ns、重复频率1 k...     

980 nm大功率垂直腔面发射激光器偏振特性

大功率垂直腔面发射激光器单管器件出光口径大、横向模式多。随着注入电流和工作温度的改变出射光偏振态在两个正交偏振基态上转换。为分析输出光偏振特性,采用500μm出光口径980nm底发射器件,通过控制器件热沉温度,利用偏振分光镜分离正交偏振基态为透射波和反射波,半导体综合参数测试仪测量其功率、中心波长等参量。分析得出:两个偏振态的光功率温度特性与未加偏振分光镜时的总输出光的温度特性基本一致,中心波长差随温度升高缓慢增加。在温度低于328K时,随着注入电流的增大,反射波首先达到阈值,形成激射。但透射光波形成激射后其斜效率大于反射波。因此在达到某个电流后两个偏振态的功率变化曲线出现交替。当温度升高到328K以上时两个偏振态的功率曲线却没有明显的交替。根据对大尺寸VCSEL器件偏振特性的研究,提出通过外腔选频的方法来控制偏振的方案,分析计算后得出外腔腔长大约为0.45mm。     

高光束质量垂直腔面发射激光器同相耦合阵列

质子注入型面发射激光器相干耦合阵列能够实现同相模式的激射,但是由于制作过程中的工艺不均匀性引起单元间存在相位差,影响光束的质量。本文通过设计分离电极结构,使每个单元注入的电流得到分别的控制,实现了3单元三角排列阵列高光束质量同相耦合模式的激射。阵列远场发散角仅为3.4°,大约有25.6%的全部能量聚集在中心光斑。激射光谱的线宽为0.24 nm,边模抑制比为27 dB。该方法能够有效提高相干耦合阵列的光束质量,弥补制作工艺中引入的单元不均匀性,提高器件的可靠性和实用性。质子注入方法简单、成本低,能够成为制作高光束质量相干耦合阵列的一个重要方法。     

Mode-Stabilized Operation in a Microlens-Integrated 980 nm Vertical-Cavity Surface-Emitting Laser

Microlens-integrated 980 nm vertical-cavity surface-emitting lasers (VCSELs) were fabricated and their mode-stabilized operations investigated. A stable single fundamental transverse mode operation in the microlens-integrated VCSEL was observed. Numerical modal calculations accurately explain the effects of the microlens on mode stabilization.     

808 nm垂直腔面发射激光器列阵的温度特性分析

为了研究温度对808 nm InGaAlAs垂直腔面发射激光器（VCSEL）列阵输出特性的影响,通过变温塞耳迈耶尔方程计算了InGaAlAs量子阱VCSEL的温度漂移系数。采用非闭合环结构,制备了2×2 的808 nm垂直腔面发射激光器列阵,每个单元的出光口径为60 μm。通过热沉温度调节,对不同温度下的列阵激射波长、光功率以及阈值电流进行了测量。在温度为20 ℃、脉宽为50 μs、重复频率为100 Hz的脉冲条件下,列阵的最大输出功率达到56 mW,中心光谱值为808.38 nm,光谱半宽为2.5 nm,连续输出功率达到22 mW。通过变温测试,发现输出功率在50 ℃以上衰减剧烈,列阵的温漂系数为0.055 nm/℃。实验测得的温漂系数与理论值保持一致。     

Near-Field Analysis of Micro-Aperture Surface Emitting Laser for High Density Optical Data Storage

We present the design of a novel metal micro-aperture surface emitting laser for tera byte optical data storage. The field distribution near micro-aperture is calculated by 2-dimensional finite element method, and it is shown that a spot size as narrow as 100 nm beyond a diffraction limit is obtainable.     

Reflection Induced Voltage Change of Surface Emitting Laser for Optical Probing

We demonstrate a novel optical probing technique using the reflection-induced change in voltage of a GaAs vertical cavity surface emitting laser (VCSEL). We present the modeling and experiment of the VCSEL based probing. A two-dimensional image probing is successfully demonstrated.     

Wavelength Tuning Characteristics of a Vertival Cavity Surface Emitting Laser Diode with an External Short Cavity

The characteristics of a wavelength tunable vertical cavity surface emitting laser diode (VCSEL) with an external short cavity are analyzed, in which the oscillation wavelength can be changed over several tens of nanometers with a nearly constant optical power by slightly altering the external cavity length. Analysis is based on rate equations for the optical power and carrier density, taking the effect of carrier-induced refractive index change into consideration, together with the study of behaviors of a complex resonator. The reflection coefficient r₂ of a laser facet facing the external mirror is shown to affect notably the characteristics of wavelength tuning, optical power and carrier density for a change of the external cavity length. It is also noticed that the wavelength change for this length becomes slower with relatively larger r₂ due to an increasing contribution of the effect of carrier-induced refractive index change, within the optical gain spectrum of the laser diode.     

Polarization Switching Bistability and Dynamics in Vertical-Cavity Surface-Emitting Laser under Orthogonal Optical Injection

Bistability as well as dynamics associated to polarization switching in a vertical-cavity surface-emitting laser (VCSEL) submitted to orthogonal optical injection from an external master laser are investigated. Intensity-polarization switching bistability is studied by increasing and decreasing the intensity of the injected beam and for a fixed frequency detuning, i.e. the frequency offset between master and the free running VCSEL. Depending on the frequency detuning, bistable switching is experimentally found to occur with or without injection locking of the fundamental mode to the master laser frequency. For large positive detuning, injection locking of the first-order transverse mode with a strong depression of the fundamental mode has been observed. The case of frequency – polarization switching bistability, i.e. when the frequency detuning is first decreased and then increased for a fixed injected power, has also been theoretically analyzed. Qualitative comparison with previous experimental work is presented for the dependence of the width of the bistable switching region on the injection strength level. Finally we show an experimental result of complicated dynamics including period doubling route to chaos that accompany polarization switching and which motivates future theoretical investigations.