Enhanced optical absorption in nanopatterned silicon thin films with a nano-cone-hole structure for photovoltaic applications

In this paper, the optical properties of the silicon nano-cone-hole (NCH) structure array are studied. The ultimate efficiency of the optimized NCH array is enhanced by 23.11% compared to an optimized nanohole array of the same thickness. The absorptance enhancement of the NCH arrays is attributed to its lowered reflectance, more supported resonant modes, and enhanced mode interaction. The angular dependence of ultimate efficiency is also investigated.     

SERS activity of Au nanoparticles coated on an array of carbon nanotube nested into silicon nanoporous pillar

A novel composite structure, Au nanoparticles coated on a nest-shaped array of carbon nanotube nested into a silicon nanoporous pillar array (Au/NACNT/Si-NPA), was fabricated for surface-enhanced Raman scattering (SERS). The morphology of the Au/NACNT/Si-NPA composite structure was characterized with the aid of scanning electron microscopy, X-ray diffraction instrumentation and Transmission electron microscopy. Compared with SERS of rhodamine 6G (R6G) adsorbed on SERS-active Au substrate reported, the SERS signals of R6G adsorbed on these gold nanoparticles were obviously improved. This was attributed to the enlarged specific surface area for adsorption of target molecules brought by the nest-shaped CNTs structure.     

硅薄膜太阳电池表面纳米线阵列光学设计

陷光结构的优化是增加硅薄膜太阳电池光吸收进而提高其效率的关键技术之一. 以硅纳米线阵列为代表的光子晶体微纳陷光结构具有突破传统陷光结构Yablonovith极限的巨大潜力. 通常硅纳米线阵列可以用作太阳电池的增透减反层、轴向p-n结、径向p-n结. 针对以上三种应用, 本文运用有限时域差分(FDTD)法系统研究了硅纳米线阵列在 300-1100 nm 波段的光学特性. 结果表明, 当硅纳米线作为太阳电池的减反层时, 周期P=300 nm, 高度H=1.5 μm, 填充率(FR)为0.282条件下时, 反射率最低为7.9%. 当硅纳米线作为轴向p-n结电池时, P=500 nm, H=1.5 μm, FR=0.55条件下纳米线阵列的吸收效率高达22.3%. 硅纳米线作为径向p-n结电池时, 其光吸收主要依靠纳米线, 硅纳米线P=300 nm, H=6 μm, FR= 0.349 条件下其吸收效率高达32.4%, 进一步提高其高度吸收效率变化不再明显. 此外, 本文还分析了非周期性硅纳米线阵列的光学性质, 与周期性硅纳米线阵列相比, 直径随机分布和位置随机分布的硅纳米线阵列都可以使吸收效率进一步提高, 相比于周期性硅纳米线阵列, 优化后直径随机分布的硅纳米线阵列吸收效率提高了39%, 吸收效率为27.8%. 本文运用FDTD法对硅纳米线阵列的光学特性进行设计与优化, 为硅纳米线阵列在太阳电池中的应用提供了理论支持.     

A hybrid substrate for surface‐enhanced Raman scattering spectroscopy: coupling metal nanoparticles to strong localised fields on a micro‐structured surface

Electromagnetic coupling between localised plasmons on metal nanoparticles and the strong localised fields on a micro‐structured surface is demonstrated as a means to increase the enhancement factor in surface‐enhanced Raman scattering (SERS) spectroscopy. Au nanoparticles of diameter 20 nm were deposited on a micro‐structured Au surface consisting of a periodic array of square‐based pyramidal pits (Klarite). The spectra of 4‐aminothiophenol (4‐ATP) were compared before and after deposition of Au nanoparticles on the micro‐structured surface. The addition of Au nanoparticles is shown to provide significantly higher signal intensities, with improvements of the order of ∼10³ per molecule compared with spectra obtained from the micro‐structured substrate alone. This hybrid approach offers promise for combining nanoparticles with micro‐ and nano‐structured surfaces in order to design SERS substrates with higher sensitivities. Copyright © 2011 John Wiley & Sons, Ltd.     

Design optimization of highly sensitive LSPR enhanced surface plasmon resonance biosensors with nanoholes

For breaking through the sensitivity limitation of conventional surface plasmon resonance (SPR) biosensors, novel highly sensitive SPR biosensors with Au nanoparticles and nanogratings enhancement have been proposed recently.But in practice, these structures have obvious disadvantages.In this study, a nanohole based sensitivity enhancement SPR biosensor is proposed and the influence of different structural parameters on the performance is investigated by using rigorous coupled wave analysis (RCWA).Electromagnetic field distributions around the nanohole are also given out to directly explain the performance difference for various structural parameters.The results indicate that significant sensitivity increase is associated with localized surface plasmons (LSPs) excitation mediated by nanoholes.Except to outcome the weakness of other LSP based biosensors, larger resonance angle shift, reflectance amplitude, and sharper SPR curves' width are obtained simultaneously under optimized structural parameters.     

The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film

The interactions between femtosecond (fs) laser pulses and a thin Au film deposited on a silica glass substrate were systematically investigated based on experimental data. Different structures, including microholes, nanoholes, and nanobumps, are obtained when pulses with different energies are incident on the surface of a gold film. The experimental results are discussed according to specific experimental parameters. Two physical models were constructed in order to explain the experimental results. The formation of nanoholes in a silica substrate is attributed to etching by higher order harmonic generations (HHG) when the femtosecond laser pulse interacts with the generated plasma layer, while the formation of nanobumps on the surface of an Au film is attributed to the elastic and plastic characteristics of the metal film under laser pulse irradiation.     

Gold nanoparticle-coated silicon cone array for surface-enhanced Raman spectroscopy

ABSTRACT

We demonstrate a silicon cone array substrate coated with gold nanoparticles and which was highly sensitive, homogeneous, and provided a large area for surface-enhanced Raman spectroscopy (SERS). A deep reactive ion-etching process was used to fabricate the high-density silicon cone array, and gold nanoparticles were formed on the silicon cone surface by magnetron sputtering. The substrate was tested with 10^?6 M rhodamine 6 G solution. Enhancement of the substrate was about 60-fold greater than that of flat substrate. Moreover, SERS signals obtained from 24 random areas on the substrate showed good homogeneity with an average standard deviation of 3.9%.     

The formation of sub-10 nm nanohole array on block copolymer thin films on gold surface using surface neutralization based on O2 plasma treatment and self-assembled monolayer

Blockcopolymer (BCP) lithography is an emerging nanolithography technique for fabrications of various nanoscale devices and materials. In this study, self-assembled BCP thin films having cylindrical nanoholes were prepared on gold by surface neutralization using self-assembled monolayer (SAM). Oxygen plasma treatment was investigated as a way to enhance the functionality of Au surface toward SAM formation. After surface neutralization, well-ordered nanoholes with 9 to 20 nm diameters were formed inside BCP thin films on Au surfaces through microphase separation. The effects of oxygen plasma treatment on the formation of BCP nanopattern were investigated using surface analysis techniques including X-ray photoelectron spectroscopy (XPS) and water contact angle measurement. Au nanodot arrays were fabricated on gold film by utilizing the BCP nanotemplate and investigated by atomic force microscopy (AFM).     

金纳米颗粒阵列基底的化学置换制备及其表面增强拉曼散射特性研究

表面增强拉曼(SERS)作为一种分析手段,具有高灵敏度、高选择性、高重复性、非破坏性等优点,在过去的几十年中,被广泛应用在成分检测、环境科学、生物医药及传感器等领域。其中以金、银等贵金属纳米颗粒薄膜在表面增强拉曼(SERS)活性基底方面得到了更为广泛的应用。SERS技术一个关键的因素是如何制设计并备具有大面积、高增强能力及高重复性、可循环使用的SERS基底。通常,贵金属纳米颗粒规则阵列结构的单元颗粒电磁增强特性及其颗粒间的电磁耦合增强特性的综合作用可大力提升SERS基底的探测性能。然而,利用传统微纳米加工方法如光刻、电子束光刻等方法制备得到的贵金属纳米阵列结构的表面粗糙度不够理想。结合光刻与化学置换方法制备金纳米颗粒四方点阵列孔洞结构,并研究其作为SERS基底的电磁增强特性。具体研究利用光刻法在硅衬底上制备了规则排列的四方点阵列孔洞结构,用磁控溅射在其表面镀上金属铁膜;接着在衬底上旋涂浓度为1.893 8 mol·L-1的氯金酸液膜,在孔洞内铁和氯金酸发生置换反应,进而孔洞生成金纳米颗粒,最终得到金纳米颗粒四方点阵SERS活性基底。采用罗丹明6G(R6G)分子作为探测分子测试不同金纳米颗粒阵列结构基底的SERS谱。实验结果表明,随着化学置换反应时间的延长,金纳米颗粒排列更加紧凑有序,SERS谱增强性能更好。     

有序金纳米颗粒阵列的制备及光吸收特性研究

采用纳米球刻蚀技术中漂移法在玻璃基片上制备较大 面积不同直径的聚苯乙烯小球掩模板, 采用磁控溅射技术在掩模板上沉积不同厚度的金薄膜, 去除聚苯乙烯小球后, 通过扫描电子显微镜观察到周期排列的三角状金纳米颗粒点阵. 通过紫外-可见分光光度计测试所制备样品的光吸收特性, 发现表面等离子体共振峰随粒径增大发生红移, 随金纳米颗粒高度增加发生蓝移. 基于Mie理论, 利用Matlab软件编程对不同粒径的金阵列光吸收特性进行理论模拟, 并与实验结果进行对比. 关键词： 纳米球刻蚀 金纳米颗粒阵列 表面等离子体共振     

硫氰根在金银复合基底上的表面增强拉曼光谱研究

采用自组装技术在硅基底卜进行金银纳米粒子的复合组装,通过控制组装溶液中金溶胶和银溶胶的体积比进而控制基底上金银纳米粒子的密度.采用紫外可见漫反射和SEM对复合基底进行了表征,结果显示硅基底上金银同时存在且呈亚单层均匀分布.以硫氰根为探针分子研究了纯金、纯银以及混合组装时复合基底的SERS效应.通过一系列的校正表明,在金银同时存在的复合基底上,硫氰根的三键伸缩振动频率和特征峰的形状相对于单组分基底而言都接近于在银基底上的特征谱峰.对实验结果进行分析后认为,当金银同时组装在基底上时,金和银之间有一定的耦合作用,这种耦合作用最终导致金的SERS效应逐渐趋向于银.     

金银复合体系表面增强拉曼光谱分离

采用传统自组装技术在硅片表面进行金银纳米粒子的复合组装.以吡啶为探针分子,利用金银在不同激发光线下增强效应的不同,研究了不同波长的激发光下纯金、银以及复合组装时体系的SERS效应.结果表明在金银同时组装时的增强效应强于金弱于银,同时还通过一系列校正以及差谱方法分离出金银共存时SERS中金的增强效应,并进行了相关分析,结果表明在金银同时组装的复合体系中,金银之间产生一定的耦合作用.     

A novel optical diagnostic technique for analyzing the recrystallization characteristics of polycrystalline silicon thin films following frontside and backside excimer laser irradiation

Excimer laser annealing (ELA) is a widely used technique for producing polycrystalline silicon (poly-Si) thin films. An optical inspection system with simple optical arrangements for rapid measurement of recrystallization results of poly-Si thin films is developed in this study. The recrystallization results after both frontside ELA and backside ELA can be easily visible from the profile of peak power density distribution using the optical inspection system developed with an optimized moving velocity of 0.312 mm/s of the specimen. The method of backside ELA is suggested for batch production of low-temperature polycrystalline silicon thin-film transistors due to higher laser beam utilization efficiency and lower surface roughness of poly-Si films.     

双金属/TiO2纳米管复合结构中增强的光电流

将传统半导体材料与金属微纳结构相结合,利用其表面等离激元共振效应,可有效地增强复合结构的光电转换效率,使其广泛地被用于光电化学和光电探测等领域.本文以氧化铝纳米管为模板,采用原子层沉积技术制备出高有序的TiO2纳米管,并通过电子束热蒸发技术在大孔径的纳米管薄膜中分别负载金、铝和双金属金/铝纳米颗粒,形成金属纳米颗粒/TiO2纳米管复合结构.研究结果表明,相对于纯TiO2纳米管,Au/TiO2复合纳米管在568 nm的可见光照射下,其光电流密度约有400%的提高;在365 nm紫外光照射下,Al/TiO2复合纳米管的光电流提高约50%;同时负载双金属Au和Al纳米颗粒的TiO2纳米管在整个紫外-可见光区域光电流均显著增强.     

Large area laser surface micro/nanopatterning by contact microsphere lens arrays

Laser surface micro/nanopatterning by particle lens arrays is a well-known technique. Enhanced optical fields can be achieved on a substrate when a laser beam passes through a self-assembled monolayer of silica microspheres placed on the substrate. This enhanced optical field is responsible for ablative material removal from the substrate resulting in a patterned surface. Because of the laser ablation, the microspheres are often ejected from the substrate during laser irradiation. This is a major issue impeding this technique to be used for large area texturing. We explored the possibility to retain the spheres on the substrate surface during laser irradiation. A picosecond laser system (wavelength of 515 nm, pulse duration 6.7 ps, repetition rate 400 kHz) was employed to write patterns through the lens array on a silicon substrate. In this experimental study, the pulse energy was found to be a key factor to realize surface patterning and retain the spheres during the process. When the laser pulse energy is set within the process window, the microspheres stay on the substrate during and after laser irradiation. Periodic patterns of nanoholes can be textured on the substrate surface. The spacing between the nanoholes is determined by the diameter of the microspheres. The depth of the nanoholes varies, depending on the number of laser pulses applied and pulse energy. Large area texturing can be made using overlapping pulses obtained through laser beam scanning.     

X射线光电子能谱法研究硅纳米线的能带结构

制备了氧辅助热分解法,以一氧化硅为原料,以氩气为载气,维持管内压强为1000Pa,在高温炉中于1250℃下反应5 h后得到硅纳米线。硅纳米线经5%氢氟酸水溶液处理5 min后,与1×10-3 mol·L-1的氯化金溶液中反应5 min,在硅纳米线的表面上修饰了金纳米粒子,用X射线粉末衍射表征了产物的结构,同时观察到单质硅和金的XRD图谱;用电子扫描和透射显微镜观察了产物的形貌,表明氧辅助方法可制得大量均匀的硅纳米线,修饰在硅纳米线上的金纳米点形状整齐,尺寸均匀,平均直径约8 nm;并用X射线光电子能谱分析了修饰过程中能带结构的变化。结果表明,金纳米粒子表面带负电,它在施主能级和受主能级上都有电子存在;由于氧杂质的存在,硅纳米线的费米能级移向价带顶。     

The surface plasmon resonance of metal-film nanohole arrays

In this paper we investigated the enhanced transmission and surface plasmon resonance through a thin gold film with a periodic array of subwavelength nanoholes. Both freestanding gold-film nanohole arrays and gold-film nanohole arrays deposited on a gallium arsenide (GaAs) substrate are considered. Periodic arrays of nanoholes exhibit two different surface plasmon resonance features: localized waveguide resonance and the well-recognized photonic crystal resonance. The tangential electric field component $Ey$ is nonzero only in the hole region for a freestanding gold-film nanohole array, but it can exist in the hole region and in the metallic region for a gold-film nanohole array deposited on a GaAs substrate.     

Improved surface-enhanced Raman scattering of patterned gold nanoparticles deposited on silicon nanoporous pillar arrays

Large-area silicon nanoporous pillar arrays (Si-NPA) uniformly coated with gold nanoparticles was synthesized, and surface-enhanced Raman scattering of rhodamine 6G adsorbed on these gold nanoparticles were studied and compared. It's found that Au/Si-NPA substrate has a significantly high Raman signal sensitivity and good homogeneity. These are attributed to gold nanoparticles with narrow particle-size distribution uniformly coated on the surface and to the enlarged specific surface area for adsorption of target molecules brought by the porous silicon pillars.     

Nanostructured Au/Si substrate for organic molecule SERS detection

Nanoparticles of noble metals, such as gold and silver, exhibit unique and tunable optical properties on account of their surface plasmon resonance. In particular, gold nanoparticles on silicon substrates are attractive for future nanoscale sensors and optical devices due to their resistance to oxidation and due to their electrical and optical properties. In this study, we developed a nanostructured gold/macroporous silicon (Au/PS) substrate capped with 11-mercaptoundecanoic acid (11-MUA) with ultra-sensitive detection properties achieved in characterization, an approach based on surface-enhanced Raman scattering (SERS). Surface-enhanced Raman scattering allows us to detect substances at a low concentration level and to observe structural details of a thiol molecule bonded to small film thicknesses. Raman measurements were carried out at 514 nm and 785 nm. In order to emphasize the effect of the Si microstructuration on the efficiency of this new substrate (Au/PS) proposed for SERS experiments, the same molecule (11-MUA) was adsorbed on it as well as on gold/atomically flat silicon (Au/Si) and on commercial Klarite (Mesophotonics) substrates. Systematic studies realized by Raman spectroscopy, electron microscopy, and X-ray spectroscopy show the influence of silicon substrate texturing and metallic deposition conditions, including time and temperature on the optical phenomena.     

两种纳米粒子的自组装及表面增强拉曼光谱研究

在氨基硅烷化的单晶硅片表面通过静电自组装技术组装上金和金核铂壳两种纳米粒子,通过改变基底浸泡在溶胶中的时间控制基底上纳米粒子的密度。用扫描电子显微镜(SEM)对基底表面上的形貌进行表征,结果表明纳米粒子呈亚单层二维阵列分布。以吡啶(Py)为探针分子,用波长为632.8 nm的激发光作为激发光源,研究纯金和金铂复合基底上的表面增强拉曼光谱(SERS)行为。数据显示在金纳米粒子之间引入金核铂壳纳米粒子后,Py的两个特征峰的频率没有明显变化,但谱峰的强度却变弱了,其SERS信号衰减最大可至原来的24%。这是由于引入的铂的d态电子使金的等离子体激发猝灭,从而破坏了电磁场增强,使金的SERS信号衰减。