High-resolution X-ray imaging—a powerful nondestructive technique for applications in semiconductor industry

The availability of high-brilliance X-ray sources, high-precision X-ray focusing optics and very efficient CCD area detectors has contributed essentially to the development of transmission X-ray microscopy (TXM) and X-ray computed tomography (XCT) with sub-50 nm resolution. Particularly, the fabrication of high aspect ratio Fresnel zone plates with zone widths approaching 15 nm has contributed to the enormous improvement in spatial resolution during the previous years. Currently, Fresnel zone plates give the ability to reach spatial resolutions of 15 to 20 nm in the soft and of about 30 to 50 nm in the hard X-ray energy range. X-ray microscopes with rotating anode X-ray sources that can be installed in an analytical lab next to a semiconductor fab have been developed recently. These unique TXM/XCT systems provide an important new capability of nondestructive 3D imaging of internal circuit structures without destructive sample preparation such as cross sectioning. These lab systems can be used for failure localization in micro- and nanoelectronic structures and devices, e.g., to visualize voids and residuals in on-chip metal interconnects without physical modification of the chip. Synchrotron radiation experiments have been used to study new processes and materials that have to be introduced into the semiconductor industry. The potential of TXM using synchrotron radiation in the soft X-ray energy range is shown for the nondestructive in situ imaging of void evolution in embedded on-chip copper interconnect structures during electromigration and for the imaging of different types of insulating thin films between the on-chip interconnects (spectromicroscopy).     

X射线同轴轮廓成像中影响成像质量的若干因素研究

采用数字模拟方法较为系统地研究了光子能量、样品直径和散射强度对成像质量的影响，克服了已有实验结果的局限性.研究得到成像质量随光子能量的变化关系，模拟结果与已有实验结果相符.研究发现，当其他成像参数不变时，同一样品存在多个光子能量可实现相近的成像质量，且成像质量都较好，这可用于定量相衬成像中多图重构时图像的选择，也为对辐射剂量有要求的样品提供理论依据.得到了不同直径样品在成像质量最佳时所对应的样品到探测器距离，发现这一距离随样品直径的增加而增加.研究了样品厚度或折射率变化导致的散射X射线对成像质量的影响，发 关键词： X射线同轴轮廓成像 成像质量 X射线散射     

Facility Update: The Center for Advanced Microstructures and Devices: A Status Report

The progress in the field of high resolution X-ray microscopy is caused in particular by the rapid developments of synchrotron radiation sources and X-ray optical elements, by the extension of the energy range, improved designs of X-ray microscopes and scanning X-ray microscopes, the use of CCD detectors with high detective quantum efficiency, the introduction of new imaging techniques, and the development of new fields of application.     

邻苯二甲酸氢钾(KAP)的同步辐射截面形貌术

本文叙述邻苯二甲酸氢钾(KAP)晶体内部不完整性(滑移位错等)的同步辐射截面形貌图的衬度研究工作。有关缺陷象衬度随波长增加而提高的实验事实同引用均匀畸变动力学的理论所引入的平均应变梯度参数β和βt_eff的理论计算结果,相当符合,它为应用同步辐射源来清晰显示单晶中有关缺陷,提供一个波长选择的依据。 关键词：     

Advances in synchrotron hard X-ray based imaging

Modern synchrotron radiation (SR) sources have dramatically fostered the use of SR-based X-ray imaging. The relevant information such as density, chemical composition, chemical states, structure, and crystallographic perfection is mapped in two, or, increasingly, in three dimensions. The development of nano-science requires pushing spatial resolution down towards the nanoscale.The present article describes a selection of hard X-ray imaging and microanalysis techniques that emerged over the last few years, by taking advantage of the flux and coherence of the SR beams, as well as exploiting the advances in X-ray optics and detectors, and the increased possibilities of computers (memory, speed). Examples are given to illustrate the opportunities associated with the use of these techniques, and a number of recent references are provided. To cite this article: J. Baruchel et al., C. R. Physique 9 (2008).     

Z箍缩内爆的MARED程序数值模拟分析

MARED程序是模拟Z箍缩内爆过程的二维三温辐射磁流体力学程序,它适用于不同装置条件和不同负载参数.利用MARED程序对Z箍缩内爆进行模拟,结合丝阵Z箍缩实验分析表明:相同负载质量条件下,钨丝阵内爆产生的X射线辐射功率远大于铝丝阵产生的X射线功率;相同负载电流条件下,负载质量越大,计算得到的X射线功率越低;X射线功率随着负载电流增加而增加.MARED程序能够较好地反映Z箍缩内爆动力学过程,特别是不稳定性发展的二维图像,能够给出与不稳定性简化模型的理论分析及实验结果定性一致的演化规律.MARED程序模拟丝阵填充泡沫形成辐射场的初步计算得到了与Sandia实验室模拟Z装置上丝阵填充泡沫定性一致的结果.     

New directions in X-ray microscopy

The development of high brightness X-ray sources and high resolution X-ray optics has led to rapid advances in X-ray microscopy. Scanning microscopes and full-field instruments are in operation at synchrotron light sources worldwide, and provide spatial resolution routinely in the 25–50 nm range using zone plate focusing elements. X-ray microscopes can provide elemental maps and/or chemical sensitivity in samples that are too thick for electron microscopy. Lensless techniques, such as diffraction microscopy, holography and ptychography are also being developed. In high resolution imaging of radiation-sensitive material the effects of radiation damage needs to be carefully considered. This article is designed to provide an introduction to the current state and future prospects of X-ray microscopy for the non-expert.     

“阳”加速器钛丝X箍缩光源辐射特性实验研究

为了利用X箍缩产生的点光源作为背光光源对丝阵Z箍缩内爆早期的负 载内部结构进行背光照相, 在"阳"加速器(电流峰值为500-800 kA, 上升时间约80 ns)上开展了钛丝(丝交叉角度为60°) X箍缩光源辐射特性的初步实验研究. 通过X射线二极管探测器、透射光栅谱仪、晶体谱仪和狭缝相机等诊断设备获取了箍缩点光源的辐射功率达到1.5 GW左右, 辐射能量约为1 J, 光子能量为keV量级的辐射能谱范围主要集中在1-4 keV能段, 点光源尺寸小于15 μm, 其时间尺度(辐射脉冲半高宽)达到了200 ps. 对光源特征信息进行了初步分析, 同时掌握了有效获取钛丝X箍缩单脉冲点光源的方法.     

The Use of Streak Photography,X-Ray Radiography,and Radiometric and Spectrometric Measurements to Study Plasma Bunches Generated under Gyroresonant Interactions

Results of experimental studies of relativistic plasma bunches obtained under gyromagnetic autoresonance (GA) and confined in a magnetic mirror trap are provided. The main attention is paid to observations of the radiation generated by plasma bunches at different stages of their lives in different spectral ranges using streak photography and X-ray imaging techniques. The original method of accounting for the instrument function in X-ray spectroscopic analysis and radiometric measurements is applied within the quantum energy range of 0.2–2 MeV to take account of considerable distortion caused by the Compton scattering in the detector.     

X-ray emission from aluminium under intense, ultrashort irradiation

We present studies of X-ray emission from aluminium under picosecond and femtosecond irradiation in the intensity range 10¹²-10¹⁵ W cm^-2. We use a new and simple method to measure spectrally resolved absolute X-ray yields. It is shown that the X-ray yields can be obtained for arbitrary levels of X-ray flux. We present details of the variation of the absolute yields as a function of wavelength, intensity, polarization and pulse duration of the incident laser radiation. Electron temperatures in the keV range are observed at 10¹⁵ W cm^-2 with femtosecond laser pulses. Received 12 August 1999 and Received in final form 29 November 1999     

第三代同步辐射光源X射线相干性测量研究

随着高性能第三代同步辐射光源的建成开放,基于X射线相干特性的实验方法得到了快速发展和广泛应用.作为一个典型的例子,X射线相位衬度成像已经成为常规的X射线实验方法并向用户开放.相干散射、相干衍射成像、光子关联谱等X射线实验方法正日益受到重视,在高空间分辨、时间分辨等研究领域已显示出其独特的优越性.因此,研究和测量第三代同步辐射的空间相干特性对进一步发展这些新的实验方法具有重要意义.基于Talbot自成像原理成功测量了上海光源X射线成像线站发射的X射线的空间相干长度,并进而测得了相应光源的空间尺度.光子能量为33.2 keV时,测得的X射线光束垂直方向空间相干长度为8.84μm,对应的光源尺寸为23μm,测量结果与理论分析相符.     

In-line X-ray lensless imaging with lithium fluoride film detectors

In this work, we present preliminary in-line X-ray lensless projection imaging results at a synchrotron facility by using novel solid-state detectors based on non-destructive readout of photoluminescent colour centres in lithium fluoride thin films. The peculiarities of LiF radiation detectors are high spatial resolution on a large field of view, wide dynamic range, versatility and simplicity of use. These properties offered the opportunity to test a broadband X-ray synchrotron source for lensless projection imaging experiments at the TopoTomo beamline of the ANKA synchrotron facility by using a white beam spectrum (3–40 keV). Edge-enhancement effects were observed for the first time on a test object; they are discussed and compared with simulations, on the basis of the colour centre photoluminescence linear response found in the investigated irradiation conditions.     

基于图像信噪比的X射线同轴相衬成像系统设计

通过对具有二维高斯型相位分布特征物体的X射线同轴相衬成像技术进行理论分析,提出了一种基于图像信噪比的成像系统优化设计方法。采用数值模拟的方式分别对亚微焦点源、激光驱动微焦点源和同步辐射源三种X射线源下的成像系统进行了优化设计,结果表明:相对于最大化衬度的系统优化设计方法,信噪比优化设计方法在较小降低衬度的前提下,可以较好地改善图像信噪比并得到更为合理的成像距离。     

Narrow band X-ray emission in the water-window spectral region from a laser heated gold copper mix-<Emphasis Type="Italic">Z</Emphasis> plasma

A laser plasma X-ray source of narrow spectral range in the water-window region, is reported using a 50–50 (atomic fraction) mixture of gold-copper mix-Z planar target. Plasma was produced using the second harmonic beam of an Nd:glass laser focused to an intensity ～10¹³ W/cm² on the target. The spectrum of the plasma radiation transmitted through a free-standing 0.4 μm aluminium/0.9 μm vanadium X-ray filter foil was measured to lie in the narrow-band of 24–26 Å. This provides a debris-free X-ray dose of 2–3 mJ/sr which can be used for single shot X-ray imaging of live biological samples.     

Synchrotron radiation interference in front of the silicon absorption edge for silicon-on-insulator structures

The synchrotron radiation (SR) interference phenomenon has been for the first time observed in a strained silicon nanolayer deposited on a dielectric SiO₂ layer (∼150 nm) on Si (100) single crystalline substrates (silicon-on-insulator (SOI) structures). Strong oscillations of spectra intensity depending on photon energy have been detected in the energy range preceding the elementary silicon Si L _2,3 absorption edge (≤100 eV) at grazing angles of SR smaller than 21° in the X-ray photoeffect quantum yield structure. The phase of the spectra oscillation structure is reversed for small variations of grazing angle in the 4°–21° range. The silicon nanolayer thickness (∼180 nm) has been estimated in the three-layer, Si nanolayer-SiO₂-Si substrate structure with the use of neighbor maxima positions of ultrasoft X-ray radiation interference in XANES (X-ray absorption near edge structure) spectra. A decrease in the crystal lattice parameter of a strained silicon layer along the normal to substrate has been determined by X-ray diffraction. An increase in the Si-Si interatomic distances in the strained silicon nanolayer lattice of SOI structure has been found using ultrasoft X-ray emission spectroscopy data.     

Femtosecond laser plasma in CaF<Subscript>2</Subscript> crystal microchannel and effective generation of characteristic X-ray radiation

The dependence of the characteristic X-ray radiation yield from CaF₂ crystal on the formed microchannel depth under highly intensive (I ∼ 3 × 10¹⁵ W/cm²) laser pulses with different contrast was obtained. The maximum of the characteristic X-ray radiation yield at these experimental conditions corresponded to the microchannel depth of 30–50 μm. The efficiency of the laser radiation conversion to the characteristic X-ray radiation increased from 6 × 10⁻⁸ for the surface up to 10⁻⁷ in the microchannel. The dependence of the characteristic X-ray radiation yield on the viewing angle showed that the source of X-ray radiation was located near the surface inside the microchannel.     

The wideband attenuation of short radio waves on mid-latitude paths during X-ray flares in January 2005

We present the results of the ionosphere oblique chirp sounding on the Cyprus—Nizhny Novgorod, Cyprus—Rostov-on-Don, and Moscow—Rostov-on-Don mid-latitude paths during X-ray flares in January 17, 19, and 20, 2005. It is found that during strong flares the blackout of short radio waves was observed over the entire frequency range of chirp sounding on the Cyprus—Nizhny Novgorod and Cyprus—Rostov-on-Don paths. Modeling of the electron-density profiles in the lower ionosphere based on absorption of short radio waves on the Moscow—Rostov-on-Don path at different stages of the decay of the X-ray radiation intensity is carried out. It is shown that at the instant corresponding to the maximum value of the flare radiation flux, the electron density in the lower ionosphere at altitudes 60–80 km increased by a factor of about 10 and 100 for flares with radiation flux densities 5·10⁻² and 3·10⁻¹ erg/(cm ²·s) in the wavelength range 0.5–4.0 Å which took place in January 19 and 20, respectively. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 50, No. 1, pp. 1–8, January 2007.     

Monte Carlo modeling of gold nanoparticles detection limits of benchtop three-dimensional L- and K-shell X-ray fluorescence mapping systems

This study aims to investigate the detection limits of gold nanoparticle (GNP) concentrations by Monte Carlo (MC) modeling of benchtop polychromatic K- and L-shell X-ray fluorescence mapping system. In Monte Carlo N-Particle (MCNP version 6.1) simulations, a 0.25-cm-diameter cylinder containing GNPs of various concentrations (i.e., 0.005%–1.0% gold by weight, wt%) was assumed to be located at the center of a cylindrical water phantom of various diameters (1.0–10 cm). Two different sets of incident pencil beam X-rays and detectors were modeled to stimulate X-ray fluorescence (XRF) of GNPs: (1) 62 kVp and silicon drift detector for L-XRF, (2) 105 kVp and cadmium telluride detector for K-XRF. The detection limits were calculated for given radiation doses to the center of phantom (375–1500 mGy). When the diameter of the phantom was 1 cm, the detection limits for L-XRF and K-XRF were an order of 0.001 wt% and of 0.01 wt%, respectively. The detectability of K-XRF turned out to be superior to that of L-XRF for the phantoms greater than or equal to 3 cm in diameter. The MC results will provide a guide for developing an optimal benchtop XRF imaging system for in vivo preclinical imaging, depending on the sizes of GNP-loaded objects, GNP concentrations, and radiation doses.     

Resonant Inelastic X-ray Scattering: From band mapping to inter-orbital excitations

Resonant inelastic X-ray scattering (also known as resonant X-ray Raman spectroscopy when only valence and conduction states are involved in the final state excitation) has developed into a major tool for understanding the electronic properties of complex materials. Presently it provides access to electron excitations in the few hundred meV range with element and bulk selectivity. Recent progress in X-ray optics and synchrotron radiation engineering have opened up new perspectives for this powerful technique to improve resolving power and efficiency. We briefly present the basics of the method and illustrate its potential with examples chosen from the literature. To cite this article: J. Lüning, C.F. Hague, C. R. Physique 9 (2008).     

同步辐射X射线荧光光谱国内外研究进展

同步辐射光源是带电粒子在加速器储存环中以接近光速的速度运动时,沿轨道切线方向发射出的辐射,同步辐射X射线荧光分析(SR-XRF)是以同步辐射X射线作为激发光源的X荧光光谱分析技术.同步辐射X射线荧光分析包括了用于微区及微量元素分析的同步辐射XRF、用于表面及薄膜分析的同步辐射全反射X射线荧光(SR-TXRF)以及用于三...