Sol-Gel Derived Barium-Strontium Titanate Films

Sol-gel techniques for the preparation of barium-strontium titanate (BST) films are discussed. The evolution of film microstructure during heat treatment, and the dielectric properties of BST films prepared from alkoxide solutions and from alkoxide solutions modified by 2-ethylhexanoic acid were studied. It is shown that the extent of the modification of the precursors by 2-ethylhexanoic acid changes the precursor molecular complexity governing the microstructure of the films and their electrical properties.     

Chemistry-Crystallization-Microstructure Relations of Sol-Gel Derived Lanthanum Modified Lead Titanate Thin Films

Lanthanum modified lead titanate thin films have been obtained by the deposition of sol-gel solutions onto platinized (100) silicon substrates. Crystallization of perovskite films was achieved by thermal treatments at 650°C with slow or rapid heatings. Lead oxide excesses were used in the precursor solutions to counterbalance the lead losses produced during the thermal treatment. Rapid heatings and large excesses of lead produce a preferred orientation of the films. These films have more homogeneous and denser microstructures than slow heated films without lead excess.     

Preparation and Ferroelectric Properties of YMnO3 Thin Films with c-Axis Preferred Orientation by the Sol-Gel Method

Hexagonal YMnO₃ has a ferroelectric property with an optimal remanent polarization along the c-axis. The c-axis oriented YMnO₃ thin films with a small leakage current were prepared by the sol-gel dipping method. The c-axis orientation of the films was promoted by the addition of diethanolamine to the Mn precursor solution. A heat treatment with multiple steps led to a dense film structure with fine grains. The dense structure resulted in the decrease of the leakage current. Furthermore, when the films were heat-treated in a vacuum, the leakage current became considerably small and the ferroelectricity of the YMnO₃ thin films was observed even at room temperature.     

Ferroelectric Properties of Modified Lead Titanate Thin Films Obtained by a Sol-Gel Method

Calcium substituted lead titanate thin films have been prepared by a sol-gel method, deposited by spin-coating, and thermally treated so as to obtain a perovskite structure. Two types of thermal treatments were given, differing in the heating rate, which in conventional treatments was of some 10°C/min, and in rapid treatments >500°C/min. With rapid heating, materials are obtained in which greater polarizations are commuted and bias fields are smaller. This, together with the fact that additional (undesired) phases are not observed by X-ray diffractometry when rapid treatments are used, shows that these are to be preferred over conventional treatments.     

Study by Rutherford Backscattering Spectroscopy of the Heterostructure of Lead Titanate Thin Films

A depth profile analysis of modified lead titanate thin films was performed by means of Rutherford Backscattering Spectroscopy (RBS). These films were deposited from sol-gel synthesized solutions onto platinized silicon substrates and crystallized by thermal treatments at temperatures of about 650°C. The chemistry of the solution and the thermal treatment for crystallization affect the heterostructure of the resulting films. Losses of lead and formation of substrate-film interfaces are produced during the crystallization of the films. These film characteristics determine their ferroelectric response.     

Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

Sol-gel derived Y2O3 thin films have been prepared on platinum coated silicon wafers and fired to temperatures ranging from 400°C to 750°C. Multiple coats were used to obtain films up to 0.5 m thick with an intermediate firing of 400°C between coatings. Top Pt electrodes were sputtered to form monolithic capacitors. These films exhibited a dielectric constant of 18 and a leakage current of 10–11–10–7 A/cm2, making them attractive candidates for high dielectric constant dielectric films in high density DRAMs.     

Properties and Photoelectrocatalytic Behaviour of Sol-Gel Derived TiO2 Thin Films

Titanium dioxide (TiO₂) thin films have been prepared on indium doped tin oxide (ITO) glass by sol-gel dip-coating method. Properties of the films were determined as a function of heat-treatment by X-ray diffraction, scanning electron microscopy and photoelectrochemical tests. The films heat-treated at higher temperatures show better crystallinity and photoresponse. The microscopic structure on the film after heat-treatment is attributed to the incorporation of organic polymer into the precursor solution. The performance of the electrodes treated at different temperature on photoelectrocatalytic degradation of methyl orange was investigated. The effect of applied potential and the ability of the electrode to be repeatedly used in photoelectrocatalytic degradation were also evaluated.     

Elaboration of ZnO Thin Films with Preferential Orientation by a Soft Chemistry Route

Microcrystalline ZnO films presenting well-defined and tunable orientation were obtained by spin coating of alcoholic sols by two different approaches, based on controlled hydrolysis-condensation of Zn-ethanolamine complexes. As-deposited films are formed by amorphous zinc oxide-acetate submicronic particles, which are transformed into oriented ZnO after thermal treatment. The orientation of ZnO depends on the synthesis method, and the solvent. While in ethanol and [Zn] = 0.05 mol·L^–1, films consist of rectangular platelets oriented with the (100) planes parallel to the substrate (a//n), the orientation of the particles changes to (c//n) for systems in 2-methoxyethanol (2-ME) and [Zn] = 0.75 mol·L^–1. A study of chemical factors that influence the orientation (precursor, solvent, MEA/Zn ratio, concentration, coating parameters, heat treatment) is presented.     

Sol-Gel Derived Ferroelectric Thin Films: Avenues for Control of Microstructural and Electric Properties

The paper presents short review of the works performed during the last few years in the field of the alkoxy-derived ferroelectric films. PZT films were prepared using titanium and zirconium alkoxides and Pb(CH₃COO)₂· 2H₂O as precursors. Different way of lead acetate dehydration and the impact of lead excess in the precursor solutions on the properties of the PZT films are discussed. Trimetallic alkoxide systems Bi(OR)₃-Ta(OR)₅-ROH (R = Me, Et or ⁱ Pr) were studied as precursors for preparation of SrBi₂Ta₂O₉ films. Films prepared from these solutions and annealed at the temperature between 700 and 750°C demonstrated the remanent polarization P_r* – P^{^} _r = 7–9 C/cm². Ba_1-xSr_xTiO₃ films we applied from modified alkoxide solutions. Decomposition of the organic phase in the course of thermal treatment of the films is studied by IR-spectroscopy. The dependence of the dielectric permittivity of the films via the annealing temperature is reported. Preparation of LiNbO₃, SrZr_0.2Ti_0.8O₃, Zr_0.8Sn_0.2TiO₄ is briefly discussed.     

Crystallization and Microstructure of (Sm, Pb)TiO3 Thin Films Prepared from Sol-Gel Synthesized Solutions

A sol-gel route is developed for the synthesis of samarium modified lead titanate precursor solutions. The solutions are used for the deposition of thin films. After thermal treatment of the films, two crystalline phases are observed by X-ray diffraction analysis: an undesirable pyrochlore phase and a ferroelectric perovskite. These two phases are clearly distinguished in the film microstructure, showing a fined grained fraction of pyrochlore anda-axis oriented rosette grains of perovskite. The development of these phases as well as the evolution of the perovskite/pyrochlore ratio in the films is related to the chemistry of the synthesized solutions and the thermal treatment used for crystallization.     

Orientation and Surface Properties of Sol-Gel Derived Y2O3 Films

The orientation, surface and optical properties of sol-gel derived Y₂O₃ films have been investigated. Transparent Y₂O₃ films were prepared on quartz glass substrates by sol-gel processes using YCl₃·6H₂O as a starting material. The water droplet contact angles of the films reached constant values between 79° and 90° after the films were left for 8 to 10 days in air at ambient temperature, indicating that the film surface exhibited hydrophobicity. When 2-(2-methoxyethoxy)ethanol (MEE) was added to the sol, yttria in the films crystallized to a strongly oriented cubic phase at firing temperatures between 400°C and 500°C. The intensity of the XRD peaks increased as the firing temperature was increased to 900°C. However, yttria crystallized to a non-oriented cubic phase when MEE was not used. The refractive index and packing density of the Y₂O₃ films increased from 1.55 to 1.68 and from 0.67 to 0.79, respectively, as the firing temperature was raised from 400°C to 900°C, indicating that sol-gel derived Y₂O₃ films are lower in density than evaporated ones.     

Low Dielectric Constant Organosilicate Films Prepared by Sol-Gel and Templating Methods

Low dielectric constant organosilicate films with controllable microstructure have been successfully synthesized by multiple-step sol-gel process and templating method, which are the two basic methods to establish porous network in the films. Ultra-low dielectric constant (k) of around 2.0 can be achieved for both films. The microstructure such as porosity, pore interconnection and pore size of the two types of the films have been studied and compared. It has been found that the sol-gel films have a higher level of porosity comparing to the templating films to obtain the same k value. The sol-gel film has a majority of closed pores with pore size around 5 nm. The templating film has a closed pore structure with pore size around 10 nm. Preliminary results present a very positive prospective for intermetal dielectric applications.     

Photocatalytic Activity and Characterization of the Sol-Gel Derived Pb-Doped TiO2 Thin Films

Photocatalytically active Pb-doped TiO₂ thin films were prepared on a soda-lime glass substrate by sol-gel dip-coating technique using TiO₂ sols containing lead(II) nitrate. The thin films were characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), UV-VIS spectroscopy and X-ray diffraction (XRD). A shift of the UV-VIS absorption towards longer wavelengths was observed, which indicated a decrease in the band-gap of TiO₂ upon Pb doping. XRD results showed both pure and Pb-doped TiO₂ thin films were polycrystalline, anatase type, and oriented predominantly to the (101) plane. A slight shift in the d-spacing for the Pb-doped film indicated the incorporation of Pb into the TiO₂ lattice to form Pb _x Ti_1–x O₂ solid solution. AFM results showed Pb-doped TiO₂ thin films were composed of larger TiO₂ particles and had rougher surface, compared with un-doped TiO₂ thin films. XPS results showed that except for the enrichment of Pb near the surface, Pb exists in the forms of Pb _x Ti_1–x O₂ and PbO. Dimethyl-2,2-dichlorovinyl phosphate (DDVP) was efficiently degraded in the presence of the Pb-doped TiO₂ thin films by exposing the insecticide solution to sunlight. The mechanism of photocatalytic activity enhancement of the Pb-doped TiO₂ thin films was discussed.     

Controlling Orientation and Functionalization in Thin Films of Block Copolymers

Functionalizing and controlling nanostructures resulting from block copolymer self‐assembly are key factors in defining their application. In this work, a simple but quite general route to achieve both goals simultaneously is discussed. In thin films of polystyrene‐block‐poly(vinyl pyridine) (PS‐b‐PVP) with small concentrations of a gold salt, the salt is found to complex with the PVP block which leads to an orientation of the microdomains normal to the surface after solvent annealing together with functionalization. By increasing the amount of gold salt, on the other hand, micelles are found to form in solutions leading to a range of different morphologies in the thin films.

     

Oxygen Metastable Defects in Calcium Titanate Thin Films

Metastable defects of oxygen in calcium titanate thin films with perovskite structure were studied. Thin films of calcium titanate were deposited by a magnetron sputtering method. The oxygen defects were evaluated, using the results of oxygen diffusion experiments. The thin film process had tendencies of creation of a large amount of oxygen point defects and the wide range of non equilibrium solid solution at room temperature. Thecrystal distortion was increasing with deviation from the stoichiometric composition. Although the metastable defects were decreasing due to the annealing, annealed samples had more oxygen defects in a few magnitude orders than single crystals. This revised version was published online in August 2006 with corrections to the Cover Date.     

Sol-Gel Derived Thin Films for Hydrogen Sulphide Gas Sensing

Utilizing the sol-gel fabrication route, we have successfully modified and tailored the optical absorption in the visible spectrum of thionine dye trapped in an MTMS gel-matrix to coincide with the emission of a red diode laser operating at 660 nm. These thionine-doped MTMS thin films coated onto transparent substrates have shown a remarkable change in optical absorption in the presence of gaseous hydrogen sulphide (H₂S) diluted in air and in the absence of any buffer gas. The rapid response, sensitivity, reversibility and durability shown by this material can be exploited in developing absorption-based optical H₂S sensors in either an integrated optics or all-optical fiber approach using a red diode laser source.     

Electrical Properties of Sol-Gel Processed Amorphous BaTiO3 Thin Films

BaTiO₃ thin films were prepared on single crystal silicon (1 0 0) and platinum substrates by sol-gel technique. Amorphous films with thickness uniformity were obtained by spinning the solution at 3000 rpm for 30 s and by post-deposition annealing at 400°C. The films exhibited good dielectric and insulating properties. The dielectric constant and dissipation factor at a frequency of 100 kHz were 17 and 0.20, respectively, for 1400 Å thick film on platinum substrate (MIM). The corresponding values were 16 and 0.015 for films on Si (MIS). Dielectric properties were also studied as functions of frequency and voltage. The C-V curve for MIS structure exhibited a hysteresis. The density of interface states recharged during the bias cycle in hysteresis measurement was estimated to be of the order of 2.10 × 10¹¹ cm^–2 and total oxide charge density was about 4.28 × 10¹¹ cm^–2. I-V measurements were performed on films of different thicknesses. The leakage current densities at 5 V for the films having thicknesses 1400 and 2800 Å were 0.86 and 0.11 A/cm² respectively. The conduction mechanism is found to be Poole-Frenkel and Schottky mechanisms at low and high fields, respectively.     

Sol-Gel Processing of PbZrO3 Thin Films

PbZrO₃ (PZ) thin films have been prepared by 2-methoxyethanol route from lead oxide or lead acetate and zirconium n-butoxide. The use of lead oxide as lead source and the seeding layer of TiO₂ on Pt/TiO₂/SiO₂/Si substrate facilitate the formation of the perovskite phase.     

Micropatterning of Sol-Gel Derived Thin Films Using Hydrophobic-Hydrophilic Patterned Surface

Formation process of convexly shaped oxide micropatterns using hydrophobic-hydrophilic patterned surface has been examined, and this technique was applied to several oxide thin films such as SnO₂, ZrO₂, TiO₂ and Al₂O₃. Hydrophobic-hydrophilic patterned surfaces were prepared on glass substrates by selective UV irradiation through a photomask on double-layered films of a very thin TiO₂ gel film as the underlayer and a hydrolyzed fluoroalkyltrimethoxysilane layer as the top layer. Precursor solutions were then spin-coated on the hydrophobic-hydrophilic patterns, and the coated substrates were dried at room temperature. The micropatterns of oxides were very difficult to be formed on the hydrophobic-hydrophilic patterned surfaces from metal-alkoxides as a precursor solution, but convexly shaped micropatterns were formed on the hydrophilic regions of the pattern when metal chlorides or oxychlorides were used as starting materials. This patterning technique potentially has a wide variety of applications such as fabrication of micro-optical components and finely patterned transparent electrodes.