Ar+, He+，S+离子轰击n-InP单晶表面的机理研究

通过X射线光电子能谱和低能电子衍射实验研究了10～180 eV的Ar⁺、 He⁺、S⁺离子轰击n-InP(100)表面, 发现S⁺离子轰击可以产生In-S组分,减轻离子轰击对表面的物理损伤.对于Ar⁺离子轰击后的表面,经过S⁺离子处理和加热过程以后,表面损伤得到了修复,最终得到了2×2的InP表面,进一步验证了S⁺离子对InP表面的修复作用.     

Preferential sputtering of TIC under keV Ar+ ion bombardment: Simultaneous sputtering-ISS measurement with He+ and Ar+ ions

The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5–3 keV He⁺ and He⁺ + Ar⁺ ions has been measured by ion scattering spectroscopy with He⁺ ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He⁺ and Ar⁺ ion bombardment, however the preferred sputtering is more pronounced for Ar⁺ ions than for He⁺ ions. The ion bombardment with He⁺ ions at elevated sample temperatures hardly results in any change in surface composition below ～800°C, while Ar⁺ ion bombardment results in C enrichment for elevated temperatures as reported so far.     

Radiation damage of material surfaces under prolonged irradiation with He+ and Ar+ ions with broad energy spectra

The results of studying the redistribution of Be, Al, Ti, Fe, Cu, Zr, Mo, and W atoms incorporated in polycrystalline metal samples under irradiation with He⁺, (He⁺ + Ar⁺), and Ar⁺ ion beams with a broad energy spectrum and an average energy of 10 keV at irradiation doses of 1 × 10²¹ ion/cm² are studied. It is discovered that irradiation at doses exceeding 1 × 10¹⁹ ion/cm² results in local small-crystal formations being produced in a near-surface substrate layer. Their typical dimensions are less than 1–5 μm, and their the density is up to 1–100. They contain incorporated atoms and impurity atoms with a concentration of 0.1–10 at %. Subsequent irradiation at a dose of 1 × 10²⁰ ions/cm² or more leads to disappearance of these formations, mainly because of sputtering processes.     

Wear resistance of the ion-modified surface of zirconium-alloy tubes irradiated by He+ and Ar+ ion beams with wide energy spectra

The results of investigating the wear resistance of E110 alloy samples irradiated by a He⁺ + Ar⁺ beam with a wide energy spectrum are presented. Surface modification under irradiation by an Ar⁺ beam at doses higher than 2 × 10¹⁸ ion/cm² is shown to cause substantial enhancement of the wear resistance of samples because the structural homogeneity of near surface layers increases, the surface roughness decreases, and its microhardness increases. The application of a mechanical-geometrical wear model based on the experimental wear characteristics determined during accelerated tests indicates that the thinning of an alloy cladding can reach rates of 10⁻⁶–10⁻³ mm/s, which agree satisfactorily with data obtained in other simulation experiments. The presence of an oxide film changes a wear process characterized by an abrasive component.     

ISS measurement of surface composition of AuCu alloys by simultaneous ion bombardments with Ar+ and He + ions

Surface composition of Au-Cu(43 at%) alloy under 1.5–5 keV argon ion bombardment has been investigated by ion scattering spectroscopy (ISS). In this experiment, we adopted a specific technique to use mixed He⁺ and Ar⁺ ions as primary beam in order to perform sputtering (Ar⁺) and ISS measurement (He⁺) simultaneously. The outermost atom layer of Au-Cu alloys under Ar⁺ ion bombardment is Au-rich leading to the conclusion that Ar⁺ ion bombardment of AuCu alloys causes the preferential sputtering of Cu atoms, resulting in a Au-rich outermost atom layer and a depletion layer of Au atoms beneath the outermost atom layer due to ion-beam-enhanced surface segregation. This result explains the experimental results obtained by AES as well.     

Yields of H+ and He+ at the energy for elastic scattering from H2+3He+ incident on Ag and Pd

Yields, Y, of H⁺ and He⁺ emerging specularly with the energy for single binary elastic collisions have been measured from polycrystalline Ag and Pd surfaces bombarded with mixed monoenergetic (300 < E₀ < 2600 eV) beams of H₂⁺³He⁺ impinging at an angle of 45° from the surface normal. The surfaces were exposed to H₂⁺ at a dynamic pressure of 8 × 10^?3 Pa (6 × 10^?5 Torr) during the measurements. The He⁺ yields from Pd are slightly larger than from Ag, and the H⁺ yields from Pd are 10 to 40 times as large as those from Ag. These results suggest that differences between Pd and Ag in the amount of hydrogen adsorbed and in the character of the hydrogen-metal bond may be responsible for the yield differences through shadowing by, and possibly the sputtering of, adsorbed hydrogen. The Y versus E₀ curves for all four systems have qualitatively the same singly peaked shape which implies that reactive and noble gas ions undergo similar neutralization processes during elastic surface collisions. The ratios of the yields from Ag and Pd do not exhibit the theoretically expected exponential dependence on collision time over the entire range studied, but at the lowest energies the ratios lead to estimates of the difference of neutralization constants which do agree with theory. The potential utility of the large difference in proton yields from Ag and Pd for studying the Ag-Pd alloy system is noted.     

Sputtering of Ta2O5 by Ar+ ions at energies below 1 keV

The sputtering of anodically formed Ta₂O₅ layers of about 3500 Å thickness has been studied by Sputtered Neutral Mass Spectroscopy (SNMS). For perpendicular bombardment with Ar⁺ ions up to 900 eV the flux of ejected neutral particles is found to consist almost exclusively of metal atoms Ta and Oxide specific molecules TaO and TaO₂ with intensity ratios in the order 1 : 1 : 10^?1. From depth profiling measurements with SNMS, and from the intensity ratios in the SNMS spectra the total sputtering yield of Ta₂O₅ and the partial yields of Ta, TaO and of oxygen have been determined for normally incident Ar⁺ ions of 100 to 600 eV. After an initial increase the TaO intensity in the SNMS spectra remains constant during the sputter removal of the whole layer. A simple model is derived by which the preferred emission of TaO molecules, and the initial increase of the TaO intensity is referred to ion induced variations of the surface stoichiometry of Ta₂O₅. For optimum TaO production the model predicts equal atomic surface concentrations of Ta and O.     

Ion survival probabilities for 3 keV He+, Ne+, and Ar+ scattering from La and adsorbate covered La surfaces

TOF spectra of scattered neutrals and ions for 3 keV He⁺, Ne⁺, and Ar⁺ bombardment of La and adsorbate covered La surfaces show that the scattered ion fractions are 21.1% and 10.7% for Ar⁺ on clean and adsorbate covered La, respectively, and < 1% for all of the other systems. These results are consistent with a model in which Auger and resonant neutralization (AN and RN) transitions govern the ion survival probability.     

Dechannelling of 2 MeV He+ at a circular Frank dislocation loop in gold

The dechannelling cross section of a circular Frank dislocation loop of radius 19 Å, and of Burgers vector (a/3)(111) in gold crystal is calculated for (001) channeling of 2 MeV He⁺. The calculated value σ_c = 210 ± 10 Ų is satisfactory compared with the experimental value σ_e = 235 Ų by Merkel et al.     

Sodium halide sputtering by H+, He+, Ar+ ions

Sputtering experiments were performed with 70 to 300 keV H⁺, He⁺ and Ar⁺ ions impinging on KC1, KBr and Kl. The alkali halide samples are prepared as polycrystalline layers of about 2500 Å thickness, deposited on carbon-aluminium backings. During the ion bombardment the targets are kept at elevated temperatures between 50 and 300°C, in order to study the temperature dependence of sputtering. During the irradiation the removal of halogen and sodium is simultaneously observed by Rutherford backscattering.

The present results are (i) preferential sputtering of the halogen atoms, (ii) temperature dependent sputtering yields with 0.2 eV activation energy, (iii) sputtering yields proportional to the electronic stopping power, rather than the nuclear stopping power, and (iv) sputtering yields orders of magnitude higher than estimated by elastic collision cascade theories. These findings can be interpreted by a Pooley process with subsequent migration of the interstitial halogen atom to the surface.     

Simultaneous cw laser oscillation on transitions of Cd+ and I+ in a hollow-cathode He-CdI2 discharge

Continuous-wave laser oscillation has been obtained on four transitions of Cd⁺ and eleven transitions of I⁺ using a hollow-cathode He-CdI₂ discharge as active medium. Laser output characteristics are similar for both Cd⁺ and I⁺ transitions, and simultaneous cw oscillation has been achieved at wavelengths ranging from blue (4416 Å Cd⁺) through green $\text{(}\text{5337}\text{5378}$ Å Cd⁺, 5407 Å I⁺), yellow $\text{(}\text{5678}\text{5761}$ Å I⁺) and orange (6127 Å I⁺) to red (6585 Å I⁺).     

Intensity measurement of laser-excited fluorescence in the B3Πu(0+)-X1Σg+ system of diatomic lodine

Fluorescence was excited in the B³Π_u(0⁺)-X¹Σ_g⁺ system of diatomic iodine by means of the 5145-Å line of an Ar⁺ laser and the 6328-Å line of a HeNe laser. The resulting spectrum was recorded on a SPEX double monochromator and a quantitative measurement of the intensities was carried out. The variation of the electronic transition moment $\text{M(}\text{R}\text{)}$ with R centroid observed by us shows a behavior similar to what has been reported earlier.     

The spectrum of HeAr+

Two band groups near 1450 Å, first observed by Tanaka, Yoshino, and Freeman (J. Chem. Phys.62, 4484–4496 (1975)) in discharges through mixtures of helium and argon and assigned by them to the HeAr⁺ ion, were studied under high resolution. Like the similar spectrum of HeNe⁺ previously investigated, the spectrum of HeAr⁺ is a charge transfer spectrum. The upper state B²Σ⁺ of both band groups is derived from $\text{He}{}^{\mathrm{+}}\text{(}{}^2\text{S) +}\text{Ar}\text{(}{}^1\text{S)}$ while the two lower states $\text{A}{}_2{}^2\text{Π}{}_{\mathrm{<mtext>1</mtext><mtext>2</mtext>}}$ and X²Σ⁺ are derived from $\text{He}\text{(}{}^1\text{S) +}\text{Ar}{}^{\mathrm{+}}\text{(}{}^2\text{P)}$. All three states are very weakly bound, the two lower states even more weakly than the upper state. Unlike HeNe⁺ most of the HeAr⁺ bands are violet shaded. In the longward band group each band shows only three branches while in the shortward group there are four. The former observation shows that the $\text{A}{}_2{}^2\text{Π}{}_{\mathrm{<mtext>1</mtext><mtext>2</mtext>}}$ state behaves like a ²Σ^? state with γ_v ≈ 0. The B, D, γ, p, and ΔG values of all states were evaluated. While the B_v values of upper and lower states are nearly equal, the D_v values are quite different and this difference accounts for the violet shading of most of the bands even when B′_v is slightly smaller than B″_v; it also accounts for some of the extraheads and linelike features in the rotational structure. As in HeNe⁺ the ${}^2\text{Π}{}_{\mathrm{<mtext>3</mtext><mtext>2</mtext>}}$ component of ²Π was not observed.     

Charge exchange in He++Li collisions

A two-state model, based on atomic wave functions and allowing for momentum transfer factors, is employed to calculate cross sections for the formation of excited states of He⁺ in collisions of He⁺⁺ ions with Li in the ground state, for energies in the range 5–64 keV. It is shown that the selective capture into the n=3 levels of He⁺, predicted at low energies by Shipsey et al., persists up to energies of ≈30 keV.     

Sputter damage in Si surface by low energy Ar+ ion bombardment

The damage distributions in Si(1 0 0) surface after 1.0 and 0.5 keV Ar⁺ ion bombardment were studied using MEIS and Molecular dynamic (MD) simulation. The primary Ar⁺ ion beam direction was varied from surface normal to glancing angle. The MEIS results show that the damage thickness in 1.0 keV Ar ion bombardment is reduced from about 7.7 nm at surface normal incidence to 1.3 nm at the incident angle of 80°. However, the damage thickness in 0.5 keV Ar ion bombardment is reduced from 5.1 nm at surface normal incidence to 0.5 nm at the incident angle of 80°. The maximum atomic concentration of implanted Ar atoms after 1 keV ion bombardment is about 10.5 at% at the depth of 2.5 nm at surface normal incidence and about 2.0 at% at the depth of 1.2 nm at the incident angle of 80°. However, after 0.5 keV ion bombardments, it is 8.0 at% at the depth of 2.0 nm for surface normal incidence and the in-depth Ar distribution cannot be observable at the incident angle of 80°. MD simulation reproduced the damage distribution quantitatively.     

He+离子和Ar原子碰撞过程中激发态的研究

在He⁺离子和Ar原子碰撞过程中,同样存在着电子俘获激发和直接激发两种过程。本文把实验结果同He⁺离子和Ne原子碰撞体系进行了比较,发现:在入射离子速度较小时,实验所得到的Hel三重态发射截面要大得多;当入射离子He⁺的速度大于一个原子单位(2.2×10⁸cm/s)时,情况则相反。因此,在俘获电子过程中,势能亏损同He⁺离子的入射速度是两个非常重要的因素,而且它们之间存在一个竞争过程。入射离子He 关键词：     

Vibrational intensity distributions for the various electronic states of O2+, N2+ and CO+ produced by photoionization

The vibrational intensity distributions produced by the process of photoionization are tabulated as a function of wavelength between 745 and 304 Å for all major electronic states of O₂⁺, N₂⁺ and CO⁺. The technique of photoelectron spectroscopy was used with an electron energy analyzer of known luminosity.     

Neutron scattering study of NH4+ Motion in NH4+ β-alumina

Incoherent inelastic neutron scattering has been used to study the motion of NH₄⁺ ions in NH₄⁺ β-alumina. The results establish that jump reorientation of NH₄⁺ ions is rapid compared to translational diffusion: The data are consistent with thermally activated jumps between equivalent NH₄⁺ orientations with a proton jump frequency of $\text{~1.0 × 10}{}^{12}\text{sec}$ at room temperature.The data are inconsistent with either free rotation or unrestricted rotational diffusion. The residence time between translational diffusion jumps is >6 × 10^?11 sec at temperatures less than 473°K.     

Theoretical study of the AlO blue-green (B2∑+−X2∑+ band system

Two independent, extensive theoretical calculations are reported for the relative band strengths of the AlO (B²∑⁺?X²∑⁺) blue-green system and for the radiative lifetimes of the lowest few vibrational levels of the B²∑⁺ state. The theoretical lifetimes, which include a small (<0.5%) contribution from bound-bound transitions into the A²Π state, are in excellent agreement with laser fluorescence studies. The theoretical lifetimes increase monotonically and very slowly with increasing vibrational quantum number. The relative band strengths for the blue-green system derived from the two theoretical calculations are in excellent agreement, but differ systematically from the relative band strengths of Linton and Nicholls. Our results suggest that their self-absorption corrections are not large enough, resulting in relative intensities that are too large, especially for the weak bands with r centroids less than 1.5Å.     

kinetic energy reflection from polycrystals bombarded with Ar+, Kr+, and Xe+ ions

When the surface of a solid is bombarded with ions a fraction of the primary energy is reemitted by ion reflection and sputtering. The contribution of ion reflection or sputtering to energy reflection is determined by the mass ratio of the bombarding ions to the target atoms.^1,2 In the case of light ions the contribution of reflected ions is dominant. Results for He⁺ and Ne⁺ bombardment were described in a previous paper.³ The present paper deals with results for Ar⁺, Kr⁺, and Xe⁺ bombardment of the same targets as investigated before.³ The energies of the mass selected bombarding ions range from 9 to 16 keV. The measurements were carried out by means of the thermic detector described in a separate paper.⁴ For the given mass ratios most of the reemitted energy is related to sputtering.