Surface cleaning of metals by pulsed-laser irradiation in air

The surface-cleaning effect of metals was investigated using KrF-excimer-laser irradiation of metal surfaces in air. The laser-induced cleaning of copper, stainless steel and aluminum surfaces was studied. It is found that laser cleaning is an effective cleaning process for metals even if the metal surfaces are heavily contaminated. It is also found that short wavelength and pulse duration are necessary for laser surface-cleaning. The energy density of the laser pulse is an important parameter in the cleaning process. Low energy density results in a cleaner surface but a larger pulse number is required, whereas high energy density can achieve higher cleaning efficiency but the temperature rise can cause surface oxidation and secondary contamination. In contrast to the KrF-excimer-laser, the pulsed CO₂ laser is not effective in surface-cleaning. The mechanisms of laser cleaning may include laser photodecomposition, laser ablation and surface vibration due to the impact of the laser pulse. Laser cleaning provides a new dry process to clean different substrate surfaces and can replace the conventional wet cleaning processes such as ultrasonic cleaning with CFC and other organic solvents.     

Characteristics and application of laser-generated acoustic shock waves in air

When a high-power laser beam is focused at a point, the air at the focal point is heated to temperatures of thousands of degrees within several nanoseconds and breaks down. This generates a spark that, in turn, is accompanied by an acoustic shock wave. The acoustic shock waves generated by focussing the beam from a pulsed laser with a 1064 nm wavelength and a power of 800 mJ per pulse have been measured using 1/4″ and 1/8″ B&K microphones. Nonlinear sound levels are observed up to 1.5 m from the laser-induced sparks. Beyond a certain region close to the source, levels are found to decrease in a manner consistent with spherical spreading plus nonlinear hydrodynamic losses. Analysis of the waveforms shows that the acoustic pulses associated with the laser-induced sparks are more repeatable and have higher intensity than those from an electrical spark source. Laser-generated acoustic shock waves are ideal for simulating a blast wave or a sonic boom in the laboratory and for studying the associated propagation effects. To illustrate this application, the propagation of the laser generated shock waves over a series of different hard, rough surfaces has been investigated. The results show the distinctive influences of ground roughness on the propagation of the shock wave.     

Visualization of particle trajectories in the laser shock cleaning process

The laser shock cleaning (LSC) method has recently attracted substantial attention since it can remove micro/nano-scale contaminant particles from a solid surface without direct exposure of the surface to laser irradiation. However, despite the importance of the particle detachment and redeposition mechanisms in the LSC process, the behavior of the particles during the cleaning process has never been analyzed experimentally. In this work, the motion of the micrometer-scale particles detached by a laser-induced plasma/shock wave is visualized by a photoluminescence imaging technique. The technique yields time-resolved particle trajectories under typical conditions of the LSC process, with and without a gas jet blowing. Discussions are made on the behavior of the detached particles and redeposition mechanisms.     

激光等离子体去除微纳颗粒的热力学研究

微杂质污染一直是影响精密器件制造质量和使用寿命的关键因素之一.对于微纳米杂质颗粒用传统的清洗方式(超声清洗等)难以去除,而激光等离子体冲击波具有高压特性,可以实现纳米量级杂质颗粒的去除,具有很大的应用潜力.本文主要研究了激光等离子体去除微纳米颗粒过程中的热力学效应:实验研究了激光等离子体在不同脉冲数下对Si基底上Al颗粒去除后的颗粒形貌变化,发现大颗粒会发生破碎而转变成小颗粒,一些颗粒达到熔点后发生相变形成光滑球体,这源于等离子体的热力学效应共同作用的结果.为了研究微粒物态转化过程,基于冲击波传播理论研究,得到冲击波压强与温度特性的演化规律;同时,利用有限元模拟方式研究激光等离子冲击波压强和温度对微粒作用规律,得到了颗粒内随时间变化的应力分布和温度分布,并在此基础上得到等离子体对颗粒的热力学作用机制.     

Optical diagnostics for particle-cleaning process utilizing laser-induced shockwave

The dynamics of laser-induced plasma/shockwave and the interaction with a surface in the laser shock cleaning process are analyzed by optical diagnostics. Shockwaves are generated by a Q-switched Nd:YAG laser in air or with N₂, Ar, and He injection into the focal spot. The shock velocity is measured by monitoring the photoacoustic probe–beam deflection signal under different conditions. In addition, nanosecond time-resolved images of shockwave propagation and interaction with the substrate are obtained by the laser-flash shadowgraphy. The results reveal the effect of various operation parameters of the laser shock cleaning process on shockwave intensity, energy-conversion efficiency, and flow characteristics. Discussions are made on the cleaning mechanisms based on the experimental observations. PACS 81.65.Cf; 42.62.-b; 47.40.Nm     

强脉冲CO2激光对红外材料的破坏现象

实验表明强激光对红外材料的破坏分为两种类型:烧蚀和冲击破坏。在空气中,光功率密度低于大气的光学击穿阈值时,以烧蚀为主。超过击穿阈值时,冲击破坏是主要的。在我们的实验条件下,用强激光辐照红外脆性材料的靶,靶极易产生微裂纹或粉碎性破坏,其破坏效果与激光的脉冲能量、功率密度、脉冲宽度,以及着靶面积有关。为了直观,文中给出了不少辐照损伤的照片。 关键词：     

激光除锈过程的实时监测技术研究

对激光除锈过程中的实时监测技术进行了实验研究,结果表明:除锈过程中产生的声波强度会随着表面清洁度的变化而发生明显的变化,声波信号包含了除锈过程中的大量信息,可作为激光除锈实时监测的基本信号.     

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning

Changes in the cavitation intensity of gases dissolved in water, including H₂, N₂, and Ar, have been established in studies of acoustic bubble growth rates under ultrasonic fields. Variations in the acoustic properties of dissolved gases in water affect the cavitation intensity at a high frequency (0.83 MHz) due to changes in the rectified diffusion and bubble coalescence rate. It has been proposed that acoustic bubble growth rates rapidly increase when water contains a gas, such as hydrogen faster single bubble growth due to rectified diffusion, and a higher rate of coalescence under Bjerknes forces. The change of acoustic bubble growth rate in rectified diffusion has an effect on the damping constant and diffusivity of gas at the acoustic bubble and liquid interface. It has been suggested that the coalescence reaction of bubbles under Bjerknes forces is a reaction determined by the compressibility and density of dissolved gas in water associated with sound velocity and density in acoustic bubbles. High acoustic bubble growth rates also contribute to enhanced cavitation effects in terms of dissolved gas in water. On the other hand, when Ar gas dissolves into water under ultrasound field, cavitation behavior was reduced remarkably due to its lower acoustic bubble growth rate. It is shown that change of cavitation intensity in various dissolved gases were verified through cleaning experiments in the single type of cleaning tool such as particle removal and pattern damage based on numerically calculated acoustic bubble growth rates.     

Acoustic substrate expansion in modelling dry laser cleaning of low absorbing substrates

Acoustic expressions have been derived for the thermal expansion of substrate surfaces due to irradiation by an exponential laser pulse. The result of acoustic effects on three substrates (silicon, glass and silica) with different absorptions has been calculated.It has been shown that for substrates having relatively low absorptions, like silica and glass, acoustic considerations substantially reduce thermal expansion of the substrate caused by irradiation by nanosecond laser pulses relative to a quasi-static expansion model. In particular, the expansion of the substrate occurs over a much longer time frame than when the quasi-static approximation holds. Consequently, acceleration of the substrate surface is greatly reduced and laser cleaning threshold fluences for particle removal are increased.The predictions of the model of Arnold et al. when developed for acoustic considerations give reasonable agreement with experimentally found threshold fluences for alumina particles on silica and glass substrates although it underestimates the ratio of the threshold cleaning fluences of silica and glass. This could be due to the model underestimating the contribution of surface expansion to the laser cleaning process. The influence of multiple reflections in the substrate and departure from one dimensionality in the heat conduction on the threshold fluence was found to be insignificant. Thermal contact between the particle and the substrate was also found to have little effect on laser cleaning threshold fluences. Another mechanism that may enhance surface expansion is the 3D focussing of radiation by the particles. PACS 42.62.Cf; 81.65.Cf; 42.55.Lt     

Acoustic laser cleaning of silicon surfaces

We investigate the detachment of small particles from silicon surfaces by means of acoustic waves generated by laser-induced plasma formation at the back side of the sample. It is demonstrated that sufficiently high acoustic intensities can be reached to detach particles in the submicron regime. In order to study this “acoustic laser cleaning” in more detail, we have developed an interference technique which allows one to determine the elongation and acceleration of the surface with high temporal resolution, the basis for an analysis of the nanomechanical detachment process, which takes place on a temporal scale of nanoseconds. We find that the velocity of the detaching particles is significantly higher than the maximum velocity of the substrate surface. This indicates that not only inertial forces, but also elastic deformations of the particles, resulting from the acoustic pulse, play an important role for the cleaning process. PACS 81.65.Cf; 68.35.Np     

Double-pulse laser ablation applied to reactive PLD method for synthesis of carbon nitride film: A second laser shot delay

Carbon nitride films were deposited using ablation of graphite target by second harmonic radiation of Nd:YAG laser in nitrogen atmosphere. To produce high hardness films, the deposited particles should have sufficient kinetic energy to provide their efficient diffusion on a substrate surface for formation of crystal structure. However, a shock wave is arisen in ambient gas as a consequence of laser plasma explosive formation. This shock wave reflected from the substrate interacts with plume particles produced by the first laser pulse and decreases their kinetic energy. This results in decrease of film crystallinity. To improve film quality, two successive laser pulses was proposed to be used. At adjusting time delay, the particles induced by the second pulse wilt serve as a piston, which will push forward both stopped particles ablated by the first pulse and arisen from chemical reactions in ambient gas. An X-ray photoelectron spectroscopy (XPS) analysis of deposited films has shown an increase of content of sp ³ carbon atoms corresponding to crystalline phase, if double-pulse configuration is employed. The luminescence of excited C₂ and CN molecules in laser plume at different distances from the target was studied to optimize the delay between laser pulses.     

Hydrogen and Deuterium Analysis Using Laser‐Induced Plasma Spectroscopy

Abstract

Hydrogen emission in laser plasma has been studied by focusing a TEA CO₂ laser and Nd‐YAG lasers on various types of samples, such as glass, quartz, and zircaloy pipes doped with hydrogen. It was found that H_α emission with a narrow spectral width occurs with high efficiency when the laser plasma is produced in low‐pressure host gas. In contrast, the conventional well‐known laser‐induced breakdown spectroscopy (LIBS), which operates at atmospheric air pressure, cannot be applied for the analysis of hydrogen as impurity. The specific characteristic of hydrogen emission in low‐pressure plasma is interpreted on the basis of our shock wave model, taking account of the fact that the hydrogen mass is extremely light compared to that of the host target. Another experimental study on gas analysis was conducted using an Nd‐YAG laser and helium host gas at atmospheric pressure on a sample of mixed water (H₂O) and heavy water (D₂O) in vapor form. It was shown that completely resolved hydrogen (H_α) and deuterium (D_α) emission lines that are separated by only 0.179 nm could be obtained at a properly delayed detection time when the charged particles responsible for the strong Stark broadening effect in the plasma have mostly disappeared. It is argued that a helium metastable excited state plays the important role in the hydrogen excitation process.     

大气环境下飞秒激光对铝靶烧蚀过程的研究

利用时间分辨的光阴影成像技术研究了在大气环境下飞秒激光烧蚀铝靶的动态过程. 在入射激光能量为4 mJ, 激光光斑超过1 mm时, 激光烧蚀区表面物质以近似平面冲击波形式向外喷射; 在同样激光能量下、激光光斑较小时(约0.6 mm), 激光烧蚀区以近似半球型冲击波形式向外喷射. 当激光能量比较大时(7 mJ), 发现空气的电离对于激光烧蚀靶材有着重要影响. 在光轴附近烧蚀产生的喷射物具有额外的柱状和半圆型的结构, 叠加在平面冲击波结构上.     

Rapid concentration of particle and bioparticle suspension based on surface acoustic wave

A method of rapid particle concentration in a droplet has been developed using surface acoustic wave (SAW) technology. A droplet was partially placed on a surface acoustic wave propagation path, and particles were concentrated at the center of the droplet due to the asymmetry. The device consists of two IDTs and two reflectors. The one IDT is used for generating SAW and the opposite IDT is used for detecting output voltage signal amplitude, and then for calculating acoustic power density of a droplet. To investigate concentration effect of the device, starch suspension and rabbit blood cells were used in this paper. Different acoustic power density was applied ranging from 6.13 mw mm⁻² to 210.9 mw mm⁻². The concentration process occurs within 15 s under appropriate acoustic power density put on the droplet, which is much faster than currently available particle concentration mechanisms, and the method is also efficient, which concentrating the particles into an aggregate about one-fifth the size of the original droplet. Additional, the concentration process is no damage to bioparticles. This concentration method can improve greatly SAW biosensor system sensitivity.     

Self-Similar Solution of Spherical Shock Wave Propagation in a Mixture of a Gas and Small Solid Particles with Increasing Energy under the Influence of Gravitational Field and Monochromatic Radiation

Similarity solution for a spherical shock wave with or without gravitational field in a dusty gas is studied under the action of monochromatic radiation. It is supposed that dusty gas be a mixture of perfect gas and micro solid particles. Equilibrium flow condition is supposed to be maintained and energy is varying which is continuously supplied by inner expanding surface. It is found that similarity solution exists under the constant initial density. The comparison between the solutions obtained in gravitating and non-gravitating medium is done. It is found that the shock strength increases with an increase in gravitational parameter or ratio of the density of solid particles to the initial density of the gas, whereas an increase in the radiation parameter has decaying effect on the shock waves.     

Real time NDE of laser shock processing with time-of-flight of laser induced plasma shock wave in air by acoustic emission sensor

Acoustic emission sensor is used to research the time-of-flight of the shock wave induced by laser-plasma in air for real time nondestructive evaluation (NDE) of laser shock processing. The time-of-flight of the shock wave propagating from the source to the sensor declines nonlinearly and similarly at the different distances for different laser energies. The velocity of the shock wave at the distance of 30 mm increases faster than that of the distance of 35 mm. The relationship between the laser energy and the distance is almost linearly when the signal with distortion is measured by acoustic emission sensor. Finally, Taylor solution is used to analyze the experimental results, and the empirical formula between the energy of the shock wave and the laser energy is established, which will provide a theoretical basis for real time NDE of laser shock processing.     

Emission properties of laser ablation of SnO2: Sb transparent conducting film and KTiOPO4 crystal

Optical emission spectra of Nd:YAG laser ablation of KTiOPO₄ (KTP) crystal and SnO₂:Sb transparent conducting thin film were recorded and analyzed in vacuum and in air. The integral intensities of spectral lines from laser-ablated KTP crystal were obtained as functions of distance from the target surface and laser power density in vacuum and in air. The ambient gas effects on pulsed laser ablation of target were discussed. We also performed laser ablation of SnO₂:Sb transparent conducting thin film in air and the electron temperature and full-width at half-maximum (FWHM) of atomic and ionic spectral lines in the plasma were quantified using Boltzmann plot method and Lorentzian fit, respectively. Integral intensities of atomic and ionic Sn spectral lines were also obtained as functions of distance from the target surface and laser irradiance. The intensity ratio of ionic and atomic Sn spectral lines as a function of laser power density was got which gives some information about the variation of ionization ratio with laser irradiance in the plasma produced by high-power laser.     

激光等离子体的声学诊断研究

提出了利用激光等离子体声波对高功率激光与材料相互作用过程进行了诊断的方法。实际测量了波长０．５３μｍ激光与几种金属材料相互作用的过程，其结果与采用春它方法得到的结果基本吻合。     

Activation and cleaning of oxide surfaces by a cw CO2 laser

Silica, alumina, and zinc oxide surfaces have been dehydroxylated by a cw CO₂ laser. Three to seven W/cm² produce the same surfaces spectroscopically as does heating at 400–1000°C. Varying the laser power while keeping the total number of photons constant shows that this is not a linear photochemical process and may be purely thermal desorption. Laser heating has a number of practical advantages over traditional heating methods which have been used for surface cleaning and activation.     

Study of laser-induced plasma shock waves by the probe beam deflection technique

Laser probe beam deflection technique is used for the analysis of laser-induced plasma shock waves in air and distilled water. The temporal and spatial variations of the parameters on shock fronts are studied as functions of focal lens position and laser energy. The influences of the characteristics of media are investigated on the well-designed experimental setup. It is found that the shock wave in distilled water attenuates to an acoustic wave faster than in air under the same laser energy. Good agreement is obtained between our experimental results and those attained with other techniques. This technique is versatile, economic, and simple to implement, being a promising diagnostic tool for pulsed laser processing.