| 大尺寸YVO4晶体的自动控径提拉法生长 |
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| 引用本文： | 曾宪林,陈伟,张星,陈秋华.大尺寸YVO4晶体的自动控径提拉法生长[J].人工晶体学报,2021,50(2):248-252. |
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| 作者姓名： | 曾宪林 陈伟 张星 陈秋华 |
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| 作者单位： | 福建福晶科技股份有限公司,福州 350003 |
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| 摘 要： | 本文报道了在自动控制直径条件下大尺寸YVO4晶体的提拉法生长研究。利用改进的上称重法生长大尺寸YVO4晶体,在提拉法单晶生长过程中,晶体扩肩部分采用斜率积分模式,转肩部分采用斜率积分过渡到直径积分模式,等径部分采用直径积分模式,应用这种分段控制方式成功地实现了YVO4晶体的自动化生长。采用4台50型自动化生长炉对YVO4晶体自动化生长工艺进行了长达一年的可靠性验证,预设技术目标为晶体直径大于40 mm,等径部分长度大于30 mm,B级晶体质量达 80%以上,采用自动控制方法生长晶体毛坯共计138个,晶体直径达标率为99.3%,等径部分长度达标率为53.6%,晶体生长良品率为88.4%。本文还讨论了影响晶体等径部分长度达标率的若干工艺因素。
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| 关 键 词： | YVO4晶体 自动控制直径 改进的上称重提拉法 直径积分模式 斜率积分模式 提拉炉 可靠性验证 |
| 收稿时间： | 2020-11-04 |
Czochralski Growth of Large Size YVO4 Crystal with Autocontrolled Diameter |
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| ZENG Xianlin,CHEN Wei,ZHANG Xing,CHEN Qiuhua.Czochralski Growth of Large Size YVO4 Crystal with Autocontrolled Diameter[J].Journal of Synthetic Crystals,2021,50(2):248-252. |
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| Authors: | ZENG Xianlin CHEN Wei ZHANG Xing CHEN Qiuhua |
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| Affiliation: | Fujian CASTECH INC., Fuzhou 350003, China |
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| Abstract: | This paper presents a research on the Czochralski growth of large size YVO4 crystal with autocontrolled diameter. The large size YVO4 single crystal was successfully grown by the Czochralski process with modified up-weighing method. In the Czochralski growth process of large size YVO4 crystals, the slope integral mode was used in the shoulder expanding part, transition from slope integration to diameter integration mode was used in the shoulder turning part, and the diameter integral mode was used in the growth of the equal diameter part. The automatic growth of YVO4 crystal has been realized by the subsection controlling procedure described above. The reliability of the automatic growth process of YVO4 crystal was verified with four 50 mode automatic furnaces in a duration of one year. The technical goal of grown crystals was preset as follows: a crystal diameter of more than 40 mm, a length with the equal diameter part of more than 30 mm, and more than 80% production of B-grade quality crystals. A total of 138 crystal boules were grown by the Czochralski process with autocontrolling mode. The statistic data was summerized as 99.3% crystal boules with the standard diameter, 53.6% crystal boules with the standard length, and 88.4% yield of crystal growth. The technological factors concerning of the yield of crystal boules with the standard length of equal diameter part were also discussed. |
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| Keywords: | YVO4 crystal autocontrolled diameter modified up-weighing method diameter integral mode slope integral mode Czochralski furnace reliability verification |
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