| 单晶硅晶格间距的测量技术进展及应用 |
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| 引用本文： | 李伟,施玉书,李琪,黄鹭,李适,高思田.单晶硅晶格间距的测量技术进展及应用[J].人工晶体学报,2021,50(1):151-157. |
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| 作者姓名： | 李伟 施玉书 李琪 黄鹭 李适 高思田 |
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| 作者单位： | 中国计量科学研究院,北京 100029 |
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| 基金项目： | 国家重点研发计划(2016YFF0200404);国家自然科学基金(11975259) |
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| 摘 要： | 单晶硅晶格间距是许多重要物理常数测量的基础。本文介绍了硅晶格间距测量技术的发展历程,包括X射线干涉仪直接测量和晶格比较仪间接测量两种方法,以及影响测量结果不确定度的关键因素。得益于晶格间距测量的进展,在纳米尺度,硅晶格间距被国际计量局(BIPM)批准成为新的米定义复现形式。最后介绍了硅晶格在计量学中的应用,以及基于硅晶格实现纳米几何量测量的溯源体系的研究趋势。
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| 关 键 词： | 单晶硅 晶格间距 X射线干涉仪 晶格比较仪 纳米计量 |
| 收稿时间： | 2020-09-24 |
Progress and Application on the Measurement Technique of Single Crystal Silicon Lattice Spacing |
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| LI Wei,SHI Yushu,LI Qi,HUANG Lu,LI Shi,GAO Sitian.Progress and Application on the Measurement Technique of Single Crystal Silicon Lattice Spacing[J].Journal of Synthetic Crystals,2021,50(1):151-157. |
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| Authors: | LI Wei SHI Yushu LI Qi HUANG Lu LI Shi GAO Sitian |
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| Affiliation: | National Institute of Metrology, Beijing 100029, China |
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| Abstract: | Lattice spacing of single crystal silicon is the fundamental of measurement of some physical constants. In this paper, the progress of the silicon lattice spacing measurement technique is introduced, including X-ray interferometer for direct measurement and lattice comparator for indirect measurement, and the key factor affecting the uncertainty of lattice spacing measurement are discussed. Due to the development of silicon lattice spacing measurement, the Si lattice spacing is used as a secondary realization of the definition of the metre at nanoscale, approved by BIPM. At last, the application of lattice measurement in metrology and research trends of the traceability system for nano dimension metrology based on the lattice are introduced. |
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| Keywords: | single crystal silicon lattice spacing X-ray interferometer lattice comparator nano metrology |
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