| 配合参数对单晶炉驱动系统的影响分析 |
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| 引用本文： | 黄鸣,王维.配合参数对单晶炉驱动系统的影响分析[J].人工晶体学报,2022,51(4):594-599. |
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| 作者姓名： | 黄鸣 王维 |
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| 作者单位： | 北京北方华创真空技术有限公司,北京 100015 |
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| 摘 要： | 光伏产业的发展使得对硅材料的需求日益增加,同时硅单晶生产行业竞争也日趋激烈。作为生产硅单晶的重要装备,单晶炉的稳定性和可靠性关系到硅单晶生产效率的提升和成本的下降,因此其驱动系统的设计和优化成为装备制造的关键环节。本文以NVT-HG2000-V1型硅单晶生长炉的驱动系统为研究对象,用SolidWorks三维建模实现虚拟装配,采用ADAMS建立其动力学仿真模型,并对驱动系统的运动过程进行仿真模拟。采用控制变量法定量分析了铜套与升降轴的配合间隙及丝杠参数对驱动力和驱动力矩的影响规律,进而在提高硅单晶生长炉装备稳定性和可靠性方面给出合理的技术建议。结果表明,铜套与升降轴的配合间隙达到0.071 mm后能有效降低驱动系统运行所需驱动力矩,丝杠倾斜度、螺纹螺距与螺纹间摩擦系数的增大均会导致驱动系统运行所需力矩大幅增加。
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| 关 键 词： | 硅单晶 单晶炉 驱动系统 配合间隙 丝杠 仿真模拟 |
| 收稿时间： | 2022-01-26 |
Influence of Fit Parameters on Driving System of Single Crystal Furnace |
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| HUANG Ming,WANG Wei.Influence of Fit Parameters on Driving System of Single Crystal Furnace[J].Journal of Synthetic Crystals,2022,51(4):594-599. |
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| Authors: | HUANG Ming WANG Wei |
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| Affiliation: | Beijing NAURA Vacuum Technology Co., Ltd., Beijing 100015, China |
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| Abstract: | With the development of photovoltaic industry, the demand for silicon materials increases, and the competition in monocrystalline silicon manufacturing is becoming increasingly fierce. To improve efficiency and reduce cost, single crystal furnace operating under a driving system with high stability and reliability is of importance. This paper aims to design and optimize the driving system of the single crystal furnace. The driving system of NVT-HG2000-V1 silicon single crystal growth furnace was taken as the research object. The virtual assembly with SolidWorks 3D modeling was realized, and its dynamic simulation model with ADAMS was established. Then the motion process of the driving system was simulated. Using single variable method, the influence of the fit clearance between copper sleeve and lifting shaft as well as the screw parameters on the driving force and torque was quantitatively analyzed. The results show that when the fit clearance between copper sleeve and lifting shaft reaches 0.071 mm, the driving torque required for the operation of the driving system can effectively reduces. The increase of lead screw inclination, thread pitch and friction coefficient between threads will lead to a significant increase in the torque required for the operation of the driving system. Reasonable technical suggestions have been proposed based on the research. |
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| Keywords: | monocrystalline silicon single crystal furnace drive system fit clearance screw simulation |
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