复杂微力-电系统的细微尺度力学 |
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引用本文: | 余寿文.复杂微力-电系统的细微尺度力学[J].力学进展,1995,25(2):249-259. |
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作者姓名: | 余寿文 |
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作者单位: | 清华大学工程力学系 |
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摘 要: | 现代高新技术的崛起,提出了大量新的经典力学所不能完全包容的力学问题。这将是现代应用力学发展的巨大动力。微电子技术中微电子材料、器件、系统和微电子-机械系统(microelectro-mechanicalsystem,MEMS)所组成的复杂微力-电系统,是跨世纪发展的新科技方向,本文简要介绍了复杂微力,电系统的工业技术背景和发展;综述了这一领域存在的力学问题,主要讨论细微尺度下的结构力学与破坏力学。并评介与展望了这一新的力学领域的研究状况和发展趋势。
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关 键 词: | 多层叠合膜微结构 微电子-机械系统 细微尺度结构力学 细微尺度破坏力学 |
MESO-AND MICRO-SCOPIC MECHANICS FOR COMPLEX MICRO MECHANICAL-ELECTRICAL SYSTEMS |
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Abstract: | With the development of advanced technology,a lot of problems not covered completely by the classical mechanics have to be dealt with Which will be a great driving force for future development of applied mechanics,One of these important problems is the complex micro mechanical-electrical systems in cluding microelectric materials,components and systems and micro electrical- mechanical systems in microelectric technology,In the present paper,the in- dustry background and development of complex micro mechanic |
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Keywords: | multi-layer micro-structure microelectrical-mechanical system meso- and micro-scopic structural mechanics meso-and micro-scopic failure mechanics |
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