| 显微云纹技术在微电子器件力学测量中的应用 |
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| 引用本文： | 谢惠民,王怀喜,马少鹏,刘清珺,岸本哲.显微云纹技术在微电子器件力学测量中的应用[J].力学与实践,2009,31(3):1-8. |
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| 作者姓名： | 谢惠民 王怀喜 马少鹏 刘清珺 岸本哲 |
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| 作者单位： | 清华大学工程力学系 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)(2004CB619304,2007CB936803);;国家自然科学基金资助项目(10625209,10732080,10472050);;教育部新世纪优秀人才支持计划((KFJJ03-1);;北京市自然科学基金资助项目(3072007) |
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| 摘 要： | 电子工业的不断发展促进了电子器件的微小型化，作为新型产品设计基础的微电子器件可靠
性分析成为人们非常关注的问题. 力学参数的测量可以为可靠性评价提供有价值的实验依据.
概括总结了显微云纹技术的发展，主要介绍了云纹干涉法和扫描显微镜云纹方法及其在
微电子器件全场变形场测量中的应用.
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| 关 键 词： | 云纹法 微电子器件 |
| 收稿时间： | 2008-9-8 |
APPLICATION OF MICRO-MOIR\'{E} TECHNIQUE TO MECHANICS MEASUREMENT FOR MICRO-ELECTRONIC DEVICES |
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| XIE Huimin
,
WANG Huaixi
,
Ma Shaopeng
,
Liu Qingjun
,
Satoshi Kishimoto.APPLICATION OF MICRO-MOIR\'{E} TECHNIQUE TO MECHANICS MEASUREMENT FOR MICRO-ELECTRONIC DEVICES[J].Mechanics and Engineering,2009,31(3):1-8. |
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| Authors: | XIE Huimin WANG Huaixi Ma Shaopeng Liu Qingjun Satoshi Kishimoto |
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| Affiliation: | *;2;FML;Department of Engineering Mechanics;Tsinghua University;Beijing 100084;China;Visiting Researcher at FML;China |
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| Abstract: | The micro-miniature of electronic devices is
greatly promoted by the rapid development of electronics industry. The
study on the reliability of the micro-electronic devices is the foundation
of designing novel electronic products, and has drawn
much attention of researchers. The parameters of mechanical behavior
obtained from experiment are the basis of reliability analysis. In this study, the
development of micro-moir\'{e} methods is reviewed, covering moir\'{e}
interferometry, scanning electronic microscope moir\'{e} methods and their
applications to analysis of mechanical behavior of the micro-electronic
devices are discussed. |
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| Keywords: | moiré method micro-electronic devices mechanics behavior |
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