Dynamic Behaviour of Nanoscale Electrostatic Actuators |
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作者姓名: | 林文惠 赵亚溥 |
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作者单位: | StateKeyLaboratoryofNonlinearMechanics,InstituteofMechanics,ChineseAcademyofSciences,Beijing100080 |
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摘 要: | The dynamic behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodic orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.
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关 键 词: | 纳米尺度 静电激励器 动力学 微机电系统 稳定性分析 |
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