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Dynamic Behaviour of Nanoscale Electrostatic Actuators
作者姓名:林文惠  赵亚溥
作者单位:StateKeyLaboratoryofNonlinearMechanics,InstituteofMechanics,ChineseAcademyofSciences,Beijing100080
摘    要:The dynamic behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodic orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.

关 键 词:纳米尺度  静电激励器  动力学  微机电系统  稳定性分析
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