| Structural and Optical Characterization of Zn1—xCdxO Thin Films Deposited by dc Reactive Magnetron Sputtering |
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| 作者姓名： | MADe-Wei YEZhi-Zhen HUANGJing-Yun ZHAOBing-Hui WANShou-Ke SUNXue-Hao WANGZhan-Guo |
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| 作者单位： | [1]StateKeyLaboratoryofSiliconMaterials,ZhejiangUniversity,Hangzhou310027 [2]InstituteofSemiconductor,ChineseAcademyofSciences,Beijing100083 |
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| 摘 要： | Zn1-xCdxO crystal thin films with different compositions were prepared on silicon and sapphire substrates by the dc reactive magnetron supttering technique. X-ray diffraction measurements show that the Zn1-xCdxO films are of completely (002)-preferred orientation for x≤0.6. For x=0.8, the film is a mixture of ZnO hexagonal wurtzite crystals and CdO cubic crystals. For pure CdO, it is highly (200) preferential-oriented. Photoluminescence spectrum measurement shows that the Zn1-xCdxO(x=0.2) thin film has a redshift of 0.14eV from that of ZnO reported previously.
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| 关 键 词： | Zn1－xCdxO薄膜 磁控溅射沉积 结构 光学性质 X射线衍射分析 氧化锌 氧化镉 半导体薄膜 |
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