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Deposition of ZnO Films on Freestanding CVD Thick Diamond Films
作者姓名:孙剑  白亦真  杨天鹏  徐艺滨  王新胜  杜国同  吴汉华
作者单位:[1]State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024 [2]Department of Physlcs, Dalian University of Technology, Dalian 116024 [3]College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130023 [4]College of Physics, Jilin University, Changchun 130023
摘    要:For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.

关 键 词:氧化锌薄膜  独立式CVD厚金刚石薄膜  滤波器  多晶
收稿时间:2005-10-12
修稿时间:2005-10-12

Deposition of ZnO Films on Freestanding CVD Thick Diamond Films
SUN Jian, BAI Yi-Zhen, YANG Tian-Peng, XU Yi-Bin , WANG Xin-Sheng, DU Guo-Tong, WU Han-Hua.Deposition of ZnO Films on Freestanding CVD Thick Diamond Films[J].Chinese Physics Letters,2006,23(5):1321-1323.
Authors:SUN Jian  BAI Yi-Zhen  YANG Tian-Peng  XU Yi-Bin  WANG Xin-Sheng  DU Guo-Tong  WU Han-Hua
Affiliation:1 State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology Dalian 116024; 2 Department of Physlcs, Dalian University of Technology, Dalian 116024; 3 College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130023; 4 College of Physics, Jilin University, Changchun 130023
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