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Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition |
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| Affiliation: | [1]School of Physics Science and Engineering, Tongji University, Shanghai 200092; [2]Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203; [3]Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190 |
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