| Blue-Green Light Emission from a-SiCx：H-Based Fabry-Perot Microcavities |
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| 引用本文： | 岳瑞峰,姚永昭,刘理天.Blue-Green Light Emission from a-SiCx：H-Based Fabry-Perot Microcavities[J].中国物理快报,2006,23(2):482-485. |
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| 作者姓名： | 岳瑞峰 姚永昭 刘理天 |
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| 作者单位： | Institute of Microelectronics, Tsinghua University, Beijing 100084 |
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| 基金项目： | Supported by the National Natural Science Foundation of China under Grant No 60176031. |
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| 摘 要： | A Si-based novel Fabry-Perot microcavity device that can emit blue-green light at room temperature is proposed and fabricated, One of its Bragg reflectors consists of periodically stacked a-SiO2/a-Si：H layers deposited on the glass by plasma enhanced chemical vapour deposition, The other reflector is a sputtered Al film, The active region between both the reflectors is constructed by a p-type a-SiCx：H/intrinsic-type a-SiCx ：H junction fromwhich the electroluminescence （EL） is originated. The EL spectra of this device are recorded by RENISHAW RM2000, a sharp and strong EL peak at 483nm with FWHM of 20nm is observed when the device is driven by dc voltages of 8 V, 12 V and 18 V at room temperature. The intensity of EL increases with the applied voltage while the luminescence wavelength keeps unchanged. Compared with the EL spectra from the sample without the Bragg reflector, the luminescence intensity is about 10 times enhanced and the peak is narrowed greatly. The luminescence mechanism is analysed in detail.
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| 关 键 词： | 蓝绿光发射 a-SiCx：H基极 微腔 等离子增强 反射面 发光机理 |
| 收稿时间： | 2005-10-22 |
| 修稿时间： | 2005-10-22 |
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