| Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films Prepared by Electron Beam Evaporation |
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| 作者姓名： | 谭天亚 张大伟 占美琼 邵建达 范正修 |
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| 作者单位： | [1]R＆DCenterforOpticalThinFilmCoatings,ShanghaiInstituteofOpticsandFineMechanics,ChineseAcademyofSciences,Shanghai201800 [3]R＆DCenterforOpticalThinFilmCoatings,ShanghaiInstituteofOpticsandFineMechanics,ChineseAcademyofSciences,Shanghai201800／／GraduateSchooloftheChineseAcademyofSciences,Beijing100039 |
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| 摘 要： | ZrO2 thin films were deposited by using an electron beam evaporation technique on three kinds of lithium triborate (LIB3O5 or LBO) substrates with the surfaces at specified crystalline orientations. The influences of the LBO structure on the structural and optical properties of ZrO2 thin films are studied by spectrophotometer and x-ray diffraction. The results indicate that the substrate structure has obvious effects on the structural and optical properties of the film: namely, the ZrO2 thin film deposited on the X-LBO, Y-LBO and Z-LBO orients to m(-212), rn(021) and o(130) directions. It is also found that the ZrO2 thin film with m(021) has the highest refractive index and the least lattice misfit.
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| 关 键 词： | 微观结构 光学性质 ZrO2薄膜 电子束蒸发 |
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