| Fabrication of Syringe-Shaped GaN Nanorods |
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| 作者姓名： | 薛成山 吴玉新 庄惠照 田德恒 刘亦安 何建廷 艾玉杰 孙莉莉 王福学 曹玉萍 |
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| 作者单位： | Institute of Semiconductors, College of Physics and Electronics, Shandong NormM University, Jinan 250014 |
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| 基金项目： | Supported by the Key Research Programme of the National Natural Science Foundation of China under No 90201025, and the National Natural Science Foundation of China under Grant No 90301002. |
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| 摘 要： | Syringe-shaped GaN nanorods are synthesized on Si（111） substrates by annealing sputtered Ga2O3/BN films under flowing ammonia at temperature of 950℃. Most of the nanorods consist of a main rod and a top needle, looking like a syringe. X-ray diffraction and selected-area electron diffraction confirm that the syringe-shaped nanorods are hexagonal wurtzite GaN. Scanning electron microscopy and high-resolution transmission electron microscopy reveal that these nanorods are as long as several micrometres, with diameters ranging from 100 to 300nm. In addition to the BN intermediate layer, the proper annealing temperature has been demonstrated to be a crucial factor for the growth of syringe-shaped nanorods by this method.
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| 关 键 词： | 注射成型 GaN 纳米工艺 X射线散射 区域电子衍射 半导体技术 |
| 收稿时间： | 2005-11-03 |
| 修稿时间： | 2005-11-03 |
Fabrication of Syringe-Shaped GaN Nanorods |
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| XUE Cheng-Shan, WU Yu-Xin, ZHUANG Hui-Zhao, TIAN De-Heng, LIU Yi-An, HE Jian-Ting, AI Yu-Jie, SUN Li-Li, WANG Fu-Xue, CAO Yu-Ping.Fabrication of Syringe-Shaped GaN Nanorods[J].Chinese Physics Letters,2006,23(3):686-688. |
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| Authors: | XUE Cheng-Shan WU Yu-Xin ZHUANG Hui-Zhao TIAN De-Heng LIU Yi-An HE Jian-Ting AI Yu-Jie SUN Li-Li WANG Fu-Xue CAO Yu-Ping |
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