Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films |
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| Authors: | XIAO Xiu-Di DONG Guo-Ping QI Hong-Ji FAN Zheng-Xiu HE Hong-Bo SHAO Jian-Da |
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| Affiliation: | Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 201800Graduate School of the Chinese Academy of Science, Beijing 100049Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800 |
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| Abstract: | The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications. |
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| Keywords: | 68 37 Hk 81 07 Be 81 40 Ef |
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