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Fabrication of GaN Nanorods in a Large Scale on Si(111)Substrate by Ammoniating Technique
引用本文:艾玉杰,薛成山,孙莉莉,孙传伟,庄惠照,王福学,陈金华,李红.Fabrication of GaN Nanorods in a Large Scale on Si(111)Substrate by Ammoniating Technique[J].中国物理快报,2006,23(11):3052-3054.
作者姓名:艾玉杰  薛成山  孙莉莉  孙传伟  庄惠照  王福学  陈金华  李红
作者单位:[1]Institute of Semiconductors, Shandong Normal University, Jinan 250014 [2]School of Information Science and Engineering, Jinan University, Jinan 250022
基金项目:Supported by the National Natural Science Foundation of China under Grant Nos 90201025 and 90301002.
摘    要:GaN nanorods in a large scale have been synthesized on Si (111) substrates by ammoniating Ga2O3/Mg films under flowing ammonia atmosphere at the temperature of 1000℃ for 15 min. The as-synthesized GaN nanorods are characterized by scanning electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy, and highresolution transmission electron microscopy. The results demonstrate that these straight nanorods are hexagonal wurtzite GaN single crystals in diameters ranging from 200 nm to 600 nm.

关 键 词:硅衬底  氨化合技术  薄膜  氨气  电子显微术
收稿时间:2006-08-01
修稿时间:2006-08-01
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