| Picosecond Pulse Laser Microstructuring of silicon |
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| 作者姓名： | 赵明 尹钢 朱京涛 赵利 |
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| 作者单位： | SurfacePhysicsLaboratory,DepartmentofPhysics,FudanUniversity,Shanghai200433 |
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| 摘 要： | We report the experimental results of picosecond pulse laser microstructurlng (pulse duration 35 ps, wavelength 1.06μm, repetition rate 10 Hz) of silicon using the direct focusing technique. Arrays of sharp coldcal spikes located below the initial surface have been formed by cumulative picosecond pulsed laser irradiation of silicon in SF6. Irradiation of silicon surface in air, N2, or vacuum creates ripple-like patterns, but does not create the sharp conical spikes.
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| 关 键 词： | 飞秒脉冲激光 微观结构 硅 直接聚焦技术 Nd：YAG激光器 固体激光器 |
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