Low-Frequency Relaxation Oscillations in Capacitive Discharge Processes |
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| Authors: | ZHOU Zhu-Wen M A LIEBERMAN Sungjin KIM JI Shi-Yin DENG Ming-Sen SUN Guang-Yu |
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| Affiliation: | [1]Department of Physics, Guizhou Educational College, Guiyang 550003 [2]Department of Electrical Engineering and Computer Sciences-1770, University of California, Berkeley CA 94720, USA |
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| Abstract: | Low-frequency (2.72--3.70Hz) relaxation oscillations at 100mTorr at higher absorbed power were observed from time-varying optical emission of the main discharge chamber and the periphery. We interpret the low frequencyoscillations using an electromagnetic model of the slot impedance with parallel connection variational peripheral capacitance, coupled to a circuit analysis of the system including the matching network. The model results are in general agreement with the experimental observations, and indicate a variety of behaviours dependent on the matching conditions. |
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| Keywords: | 52 35 52" target="_blank">-g')">52 35 -g |
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