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Comparative Study of Properties of ZnO/GaN/Al203 and ZnO/Al203 Films Grown by Low-Pressure Metal Organic Chemical Vapour Deposition
引用本文:张源涛,高仲民,王金忠,方秀军,刘大力,李万成,马燕,杨晓天,赵佰军,杨洪军,杜国同,缪国庆,杨天鹏,刘博阳.Comparative Study of Properties of ZnO/GaN/Al203 and ZnO/Al203 Films Grown by Low-Pressure Metal Organic Chemical Vapour Deposition[J].中国物理快报,2003,20(11):2045-2048.
作者姓名:张源涛  高仲民  王金忠  方秀军  刘大力  李万成  马燕  杨晓天  赵佰军  杨洪军  杜国同  缪国庆  杨天鹏  刘博阳
作者单位:[1]StateKeyLaboratoryofIntegratedOptoelectronics,CollegeofElectronicScienceandEngineering,JinlinUniversity,Changchun130023JinlinUniversity,Changchun130023 [2]StateKeyLaboratoryofInorganicSynthesisandPreparativeChemistry,CollegeofChemistry,JilinUniversity,Changchun130023JilinUniversity,Changchun130023 [3]不详,CollegeofChemistry,JilinUniversity,Changchun130023JilinUniversity,Changchun130023 [4]OpenLaboratoryofExcitedStateProcesses,ChangchunInstituteofOptics,FineMechanicsandPhysics,ChineseAcademyofSciences,Changchun130021ChineseAcademyofSciences,Changchun130021
摘    要:ZnO films were deposited by low-pressure metal organic chemical vapour deposition on epi-GaN/Al203 films and c-Al203 substrates. The structure and optical properties of the ZnO/GaN/Al203 and ZnO/Al203 films have been investigated to determine the differences between the two substrates. ZnO films on GaN/Al203 show very strong emission features associated with exciton transitions, just as ZnO films on Al2O3, while the crystalline structural qualities for ZnO films on GaN/Al2O3 are much better than those for ZnO films directly grown on Al203 substrates. Zn and O elements in the deposited ZnO/GaN/Al2O3 and ZnO/Al2O3 films are investigated and compared by x-ray photoelectron spectroscopy. According to the statistical results, the Zn/O ratio changes from Zn-rich for ZnO/Al2O3 films to O-rich for ZnO/GaN/Al2O3 films.

关 键 词:薄膜生长  低压金属有机化学蒸汽沉积  结构  光学性质  ZnO/Al203薄膜  ZnO/GaN/Al203薄膜  氧化锌薄膜
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