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Capillary Adhesion of Microbeams: Finite Deformation Analysis
引用本文:刘建林,冯西桥.Capillary Adhesion of Microbeams: Finite Deformation Analysis[J].中国物理快报,2007,24(8):2349-2352.
作者姓名:刘建林  冯西桥
作者单位:Department of Engineering Mechanics, Tsinghua University, Beijing 100084
基金项目:Supported by the National Natural Science Foundation of China under Grant Nos 10525210 and 10121202.
摘    要:Capillary force may cause adhesion of devices at micro- and nano-scales. Considering the fact that large deformation is often involved in adhesion of microbeams, we analysed the capillary adhesion of two beams using finite deformation elasticity theory. The critical adhesion condition can be obtained from the present method as a function of the bending stiffness, Young's contact angle, the spacing of the two beams as well as the surface tensions of the solid and liquid phases. The solution for the capillary adhesion of a beam with a rigid substrate is also given. The results from the finite deformation analysis are compared with that of infinitesimal deformation method in order to show the necessity of accounting for the nonlinear effect associated with large deflection. The method adopted in this study can also be used to solve other adhesion problems associated with van der Waals force or electrostatic force.

关 键 词:毛细作用  附着力  微光束  变形分析
收稿时间:2007-4-9
修稿时间:2007-04-09

Capillary Adhesion of Microbeams: Finite Deformation Analysis
LIU Jian-Lin,FENG Xi-Qiao.Capillary Adhesion of Microbeams: Finite Deformation Analysis[J].Chinese Physics Letters,2007,24(8):2349-2352.
Authors:LIU Jian-Lin  FENG Xi-Qiao
Affiliation:Department of Engineering Mechanics, Tsinghua University, Beijing 100084
Abstract:Capillary force may cause adhesion of devices at micro- and nano-scales.Considering the fact that large deformation is often involved in adhesion of microbeams, we analysed the capillary adhesion of two beams using finite deformation elasticity theory. The critical adhesion condition can be obtained from the present method as a function of the bending stiffness, Young's contact angle, the spacing of the two beams as well as the surface tensions of the solid and liquid phases. The solution for the capillary adhesion of a beam with a rigid substrate is also given. The results from the finite deformation analysis are compared with that of infinitesimal deformation method in order to show the necessity of accounting for the nonlinear effect associated with large deflection. The method adopted in this study can also be used to solve other adhesion problems associated with van der Waals force or electrostatic force.
Keywords:68  03  Cd  68  35  Np
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