| 空气耦合电容式微超声换能器设计 |
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| 引用本文： | 张慧,李志,郑冠儒,曾周末.空气耦合电容式微超声换能器设计[J].声学学报,2019,44(1):116-124. |
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| 作者姓名： | 张慧 李志 郑冠儒 曾周末 |
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| 作者单位： | 天津大学 精密测试技术及仪器国家重点实验室 天津 300072 |
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| 基金项目： | 国家自然科学基金项目(61201039,61771337)资助 |
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| 摘 要： | 建立了空气耦合电容式微超声换能器(CMUT)的理论方法,分析CMUT各个结构参数对其性能参数的影响。根据理论分析结果结合无损检测应用背景设计了一个由16个阵元构成的CMUT阵列,并采用SOI晶圆键合工艺制作。该阵列每个阵元包含16个圆形CMUT敏感单元,敏感单元的半径400μm,中心频率230 kHz。建立CMUT发射和接收瞬态仿真模型分别得到CMUT发射声压和接收灵敏度与激励电压的关系,并通过实验测试验证该仿真模型的准确性。最后通过实验对CMUT与商用压电空耦超声换能器的性能进行对比,实验结果表明CMUT的发射声压和接收灵敏度与商用换能器达到相同数量级,并且能够成功激发和接收铝合金板中A_0模态Lamb波。
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| 关 键 词： | 电容式微超声换能器(CMUT) 空气耦合 超声无损检测 阵列设计 SOI晶圆键合工艺 |
| 收稿时间： | 2017-05-19 |
Design of air-coupled capacitive micromachined ultrasonic transducer |
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| Affiliation: | State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University Tianjin 300072 |
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| Abstract: | The theoretical method of air-coupled capacitive micromachined ultrasonic transducer(CMUT) was established to analyze the influence of CMUT structure parameters on its performance parameters. A CMUT array composed of 16 elements was designed according to the theoretical analysis and the background of non-destructive testing. And it was fabricated by silicon on insulator(SOI) wafer bonding process. Each element of the array contains 16 circular CMUT sensitive cells with a radius of 400 μm and a center frequency of 230 kHz. The CMUT transmitting and receiving transient simulation model was established to obtain the transmitting sound pressure and the receiving sensitivity of the CMUT at the different excitation voltages. And the experimental results showed the accuracy of the simulation model.Finally, the performance of CMUT was compared with commercial piezoelectric air-coupled ultrasonic transducer by experiments. The experiment results showed that the transmitting sound pressure and receiving sensitivity of CMUT were the same order of magnitude as that of commercial transducer. And the CMUT can successfully stimulate and receive the A0 modal Lamb wave in the aluminum alloy plate. |
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