| Abstract: | This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by
using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy,
Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic
ellipsometer, surface profiler and micro-tribometer were employed to study the
structure and tribological properties of DLC/Ti and DLC films. The results show that
DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76{\%} sp$^{3}$ content
calculated by Raman spectroscopy, uniform chemical composition along depth
direction, 98 at{\%} content of carbon, hardness 8.2 GPa and Young's modulus 110.5
GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08,
and critical load 95mN, exhibits excellent mechanical and tribological properties. |
