| Photoluminescence of amorphous carbon films fabricated by layer—by—layer hydrogen plasma chemical annealing method |
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| 引用本文： | 徐骏,黄晓辉,李伟,王立,陈坤基.Photoluminescence of amorphous carbon films fabricated by layer—by—layer hydrogen plasma chemical annealing method[J].中国物理 B,2002,11(5):502-505. |
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| 作者姓名： | 徐骏 黄晓辉 李伟 王立 陈坤基 |
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| 作者单位： | State Key Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant No 59802004), and the Natural Science Foundation of Jiangsu Province, China (Grant No BK99047). |
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| 摘 要： | A method in which nanometre-thick film deposition was alternated with hydrogen plasma annealing (layer-by-layer method) was applied to fabricate hydrogenated amorphous carbon films in a conventional plasma-enhanced chemical vapour deposition system.It was found that the hydrogen plasma treatment could decrease the hydrogen concentration in the films and change the sp^2/sp^3 ratio to some extent by chemical etching.Blue photoluminescence was observed at room temperature,as a result of the reduction of sp^2 clusters in the films.
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| 关 键 词： | 碳薄膜 离子化学热处理 光致发光 |
| 收稿时间： | 2001-09-27 |
Photoluminescence of amorphous carbon films fabricated by layer-by-layer hydrogen plasma chemical annealing method |
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| Xu Jun,Huang Xiao-Hui,Li Wei,Wang Li and Chen Kun-Ji.Photoluminescence of amorphous carbon films fabricated by layer-by-layer hydrogen plasma chemical annealing method[J].Chinese Physics B,2002,11(5):502-505. |
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| Authors: | Xu Jun Huang Xiao-Hui Li Wei Wang Li and Chen Kun-Ji |
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| Affiliation: | State Key Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China |
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| Abstract: | A method in which nanometre-thick film deposition was alternated with hydrogen plasma annealing (layer-by-layer method) was applied to fabricate hydrogenated amorphous carbon films in a conventional plasma-enhanced chemical vapour deposition system. It was found that the hydrogen plasma treatment could decrease the hydrogen concentration in the films and change the sp2/sp3 ratio to some extent by chemical etching. Blue photoluminescence was observed at room temperature, as a result of the reduction of sp2 clusters in the films. |
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| Keywords: | hydrogen plasma annealing amorphous carbon photoluminescence |
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