A novel implantable multichannel silicon-based microelectrode |
| |
| Authors: | Sui Xiao-Hong Zhang Ruo-Xin Pei Wei-Hua and Chen Hong-Da |
| |
| Affiliation: | State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China |
| |
| Abstract: | Silicon-based microelectrodes have been confirmed to be helpful in
neural prostheses. The fabricated 7-channel silicon-based
microelectrode was feasible to be implanted into the brain cortex.
The manufacturing process by micro-electromechanical system (MEMS)
technology was detailed with four photolithographic masks. The
microscopic photographs and SEM images indicated that the probe
shank was 3mm long, 100\mum wide and 20\mu m thick with
the recording sites spaced 120\mu m apart for good signal
isolation. To facilitate the insertion and minimize the trauma, the
microelectrode is narrowed down gradually near the tip with the tip
taper angle of 6 degrees. Curve of the single recording site
impedance versus frequency was shown by test in vitro and the
impedance declined from 150.5k\Omega to 6.0k\Omega with
frequency changing from 10\,k to 10MHz. |
| |
| Keywords: | MEMS extracellular recording microelectrode |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理 B》浏览原始摘要信息 |
|
点击此处可从《中国物理 B》下载免费的PDF全文 |
|
