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GaN layers with different polarities prepared by radio frequency molecular beam epitaxy and characterized by Raman scattering
Authors:Zhong Fei  Li Xin-Hu  Qiu Kai  Yin Zhi-Jun  Ji Chang-Jian  Cao Xian-Cun  Han Qi-Feng  Chen Jia-Rong and Wang Yu-Qi
Affiliation:Key Laboratory of Material Physics, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
Abstract:GaN layers with different polarities have been prepared by radio-frequency molecular beam epitaxy (RF-MBE) and characterized by Raman scattering. Polarity control are realized by controlling Al/N flux ratio during high temperature AlN buffer growth. The Raman results illustrate that the N-polarity GaN films have frequency shifts at $A_{1}$(LO) mode because of their high carrier density; the forbidden $A_{1}$(TO) mode occurs for mixed-polarity GaN films due to the destroyed translation symmetry by inversion domain boundaries (IDBS); Raman spectra for Ga-polarity GaN films show that they have neither frequency shifts mode nor forbidden mode. These results indicate that Ga-polarity GaN films have a better quality, and they are in good agreement with the results obtained from the room temperature Hall mobility. The best values of Ga-polarity GaN films are 1042 cm$^{2}$/Vs with a carrier density of 1.0$\times $10$^{17}$~cm$^{ - 3}$.
Keywords:polarity  gallium nitride  Raman scattering
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