Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing |
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| Authors: | Xu Ying Diao Hong-Wei Hao Hui-Ying Zeng Xiang-Bo and Liao Xian-Bo |
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| Affiliation: | State Laboratory for Surface Physics, Institute of Semiconductors and Center for Condensed Matter Physics, Chinese Academy of Science, Beijing 100083, China; Beijing Solar Energy Research Institute, Beijing 100083, China |
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| Abstract: | In this paper, we use a pulsed rapid thermal processing (RTP) approach to
create an emitter layer of hetero-junction solar cell. The process
parameters and crystallization behaviour are studied. The structural,
optical and electric properties of the crystallized films are also
investigated. Both the depth of PN junction and the conductivity of the
emitter layer increase with the number of RTP pulses increasing. Simulation results
show that efficiencies of such solar cells can exceed 15% with a lower
interface recombination rate, but the highest efficiency is 11.65% in our
experiments. |
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| Keywords: | emitter rapid thermal processing (RTP) PECVD solar cell |
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