| Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition |
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| 作者姓名： | 杨武保 王久丽 张谷令 范松华 刘赤子 杨思泽 |
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| 作者单位： | Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant No 50071068). |
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| 摘 要： | In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp^3 CH, sp^3 C—C, sp^2 C═C, C═N and C_{60}. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.
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| 关 键 词： | 电子回旋加速器 共振微波脉冲 化学气相沉积 类金刚石碳薄膜 AFM FTIR |
| 收稿时间： | 2003-02-28 |
| 修稿时间： | 6/3/2003 12:00:00 AM |
Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition |
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| Yang Wu-Bao,Wang Jiu-Li,Zhang Gu-Ling,Fan Song-Hu,Liu Chi-Zi and Yang Si-Ze.Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition[J].Chinese Physics B,2003,12(11):1257-1260. |
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| Authors: | Yang Wu-Bao Wang Jiu-Li Zhang Gu-Ling Fan Song-Hu Liu Chi-Zi and Yang Si-Ze |
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| Affiliation: | Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp^3 CH, sp^3 C—C, sp^2 C═C, C═N and C_{60}. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated. |
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| Keywords: | ECR microwave plasma diamond-like carbon films AFM FTIR |
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