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新型双阈值高g值MEMS惯性开关(英)
引用本文:周织建,聂伟荣,席占稳,王晓锋,罗乔.新型双阈值高g值MEMS惯性开关(英)[J].强激光与粒子束,2016,28(6):064105.
作者姓名:周织建  聂伟荣  席占稳  王晓锋  罗乔
作者单位:1.南京理工大学 机械工程学院,南京 21 0094
摘    要:在保证引信勤务安全性和正常发射可靠性前提下,为实现引信小型化而设计了一种新型无源双阈值高g值MEMS惯性开关,其主要包括能够识别两种典型加速度环境(载荷1:15 000g-300 ms,载荷2:3000g-3 ms)的环境识别模块M1和为后续电路可靠供电的通电模块M2。环境识别模块M1主要通过控制带有Z型齿的质量块与对应L型挡块之间的碰撞来确定质量块的运动位移,进而控制通电模块M2的工作情况。基于两种典型加速度环境对MEMS惯性开关进行了动力学仿真并优化,仿真结果表明所设计的开关在载荷1环境下保持断开,而在载荷2环境下可靠闭合。

关 键 词:高g值惯性开关    双阈值    Z型齿    环境识别    MEMS
收稿时间:2015-10-22

Novel high-g dual-threshold MEMS inertial switch
Affiliation:1.School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China
Abstract:To achieve intellectualization and miniaturization of fuze, a novel high-g dual-threshold MEMS (Micro-Electro-Mechanical Systems) inertial switch has been designed and simulated under the premise of ensuring its service safety and launching reliability. The MEMS inertial switch consists of two modules named recognition module M1 and energized module M2 respectively. It can recognize two typical loads (load 1: 15 000g-300 ms, load 2: 3000g-3 ms) by taking advantage of collisions between a mass and two baffles without power consumption. Planar Z-shaped tooth on the mass and two baffles are significant to recognize these two different loads and their parameters have been studied. Dynamic simulations have been taken to optimize the design. Corresponding simulation results show that when load 1 is applied on the switch in the sensing direction, it keeps disconnected, while load 2 is applied in the same direction, it is closed.
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