| 冷冻靶中硅冷却臂的温度场和力学分析 |
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| 引用本文： | 徐斌,刘景全,江水东,黄永华,杨斌,陈翔,杨春生.冷冻靶中硅冷却臂的温度场和力学分析[J].强激光与粒子束,2015,27(6):062009. |
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| 作者姓名： | 徐斌 刘景全 江水东 黄永华 杨斌 陈翔 杨春生 |
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| 作者单位： | 1.上海交通大学 微纳电子学系, 微米纳米加工技术国家级重点实验室, 上海 200240; |
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| 摘 要： | 冷冻靶是实现惯性约束聚变高能量增益的重要靶型。冷却臂是冷冻靶的重要部件之一,通过它将冷源与铝套筒相连接,用于获得靶丸内均匀氘氚冰层时所需的精确温度,同时冷却臂也用于均匀夹持铝套筒。首先测试分析了硅材料在深低温下的热传导系数,表明硅材料在该温区具有优异的热传导能力。研究了硅冷却臂结构参数对冷却臂温度场分布的影响。分析不同晶向硅冷却臂周向均匀夹持铝套筒的特性,提出基于(111)晶向硅片研制冷却臂。研究了冷却臂力臂夹持力和共振频率,并对硅冷却臂的热-结构耦合进行分析。最后设计具有16个夹持力臂的二级分叉结构的冷却臂。基于微电子机械系统技术研制了硅冷却臂样机,并测试了冷却臂的侧壁垂直度和力学特性。将研制的硅冷却臂与铝套筒进行装配,表明冷却臂中力臂的力学特性能够实现对套筒的夹持。
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| 关 键 词： | 惯性约束聚变 冷冻靶 冷却臂 温度场 力学分析 |
| 收稿时间： | 2014-12-27 |
Temperature field and mechanical properties of cooling arm for cryogenic target |
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| Affiliation: | 1.National Key Laboratory of Nano/Micro Fabrication Technology,Department of Microelectronics and Nanoscience,Shanghai Jiao Tong University,Shanghai 200240,China;2.Institute of Refrigeration and Cryogenies,School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;3.Jiangxi Province Key Laboratory of Precision Drive and Control,Department of Mechanical and Electrical Engineering,Nanchang Institute of Technology,Nanchang 330099,China |
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| Abstract: | The cryogenic target is an important target type to achieve high inertial confinement fusion energy gain. The cooling arm connected the cool source to the aluminum sleeve is an important part of the cryogenic target, which is used to obtain accurate temperature field for the deuterium-tritium ice pellet, and uniformly clamp the aluminum sleeve. First the thermal conductivity of silicon material was measured，and the experiment shows that the silicon material has excellent thermal conductivity under the cryogenic temperature. Then the influences of structural parameters of the silicon cooling arm on the temperature field were analyzed. The impacts of different crystal orientation silicon cooling arm were studied, and the (111)silicon was chosen to fabricate cooling arm for its unique circumferentially uniform clamping force. The analyses of the clamping force, resonance frequency and the thermal-structure coupling analysis of the cooling arm were given. After that, the structure design of the cooling arm with two-level branch structure and 16 clamping fingers was proposed. Then the process of the cooling arm was designed based on MEMS technology and the prototype of cooling arm was realized. The vertical sidewall and mechanical properties of the cooling arm were measured. Finally the assembly sample of cooling arm with an aluminum sleeve was given, which indicated that the cooling arm can be achieved on clamping the sleeve. |
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