| 压力对纳米金刚石膜生长的影响 |
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| 引用本文： | 胡东平,丰杰.压力对纳米金刚石膜生长的影响[J].强激光与粒子束,2015,27(2):024137. |
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| 作者姓名： | 胡东平 丰杰 |
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| 作者单位： | 1.中国工程物理研究院 总体工程研究所, 四川 绵阳 621 900 |
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| 摘 要： | 纳米金刚石膜具有高耐磨能力和低摩擦系数，在多个领域有广阔的应用前景。纳米金刚石膜可通过热丝化学气相沉积方法进行制备。其中，系统压力是关键的参数，适当的压力下可生长纳米金刚石膜，而改变压力则金刚石膜的表面形态将发生变化。实验通过不同压力下制备金刚石膜，采用扫描电镜进行形貌观察，并通过拉曼光谱确定纳米金刚石结构。实验表明，金刚石膜形态随压力变化而改变，一定压力下生长出纳米金刚石膜，降低压力则晶体颗粒变粗。分析其原因是与氢原子的运动密切相关。
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| 关 键 词： | 纳米金刚石 压力 化学气相沉积 金刚石膜 |
| 收稿时间： | 2014-09-16 |
Influence of pressure on growth of nanocrystalline diamond film |
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| Affiliation: | 1.Institute of System Engineering,CAEP,P.O.Box 919-405,Mianyang 621900,China |
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| Abstract: | Nanocrystalline diamond films depict superior tribological properties indicated from low friction coefficient and high wear resistance. The system pressure is one of the important processing parameters to prepare nanocrystalline diamond films. In this paper, diamond films were deposited at different pressures, and the sample was analyzed by scanning electron microscopy(SEM) and Raman spectrum. By the hot-filament chemical vapor deposition technique, when the methane was superfluous, the nanocrystalline diamond films could be deposited at right pressure. Higher system pressure would hamper the nuclei and the growth of nanodiamond films, and lower system pressure would cause diamond films grains coarse. The mechanism by which system pressures have the effect on the growth of diamond films is that the movement of atom H changes at different pressure. |
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