| SiO2半波覆盖层对HfO2／SiO2高反射膜激光损伤的影响 |
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| 引用本文： | 胡建平,邱服民,付雄鹰,曾勋.SiO2半波覆盖层对HfO2／SiO2高反射膜激光损伤的影响[J].强激光与粒子束,2001,13(2):137-141. |
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| 作者姓名： | 胡建平 邱服民 付雄鹰 曾勋 |
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| 作者单位： | 成都精密光学工程研究中心, |
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| 基金项目： | 国家863惯性约束聚变领域基金(863-416-2-4.15)；中国工程物理研究院院科研基金(990225) |
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| 摘 要： | 研究了SiO2半波覆盖层对HfO2／SiO2高反射膜1064nm激光损伤的影响，分析薄膜的激光损伤特性及图貌得出-对于单脉冲(1-ON-1)激光损伤，SiO2半波覆盖层能提高HfO2／SiO2高反射膜的激光损伤厨值，可显著降低激光损伤程度，减小灾难性损伤发生的概率，可大幅度提高FIfO2／SiO2高反射膜的抗激光损伤能力。
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| 关 键 词： | SiO2半波覆盖层 激光损伤阈值 损伤图貌 高反射膜 |
| 文章编号： | 1001—4322(2001)02—0137—05 |
| 收稿时间： | 2000/9/18 |
| 修稿时间： | 2000年9月18日 |
Effect of |
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| HU Jian-ping,QIU Fu-min,FU Xiong-ying,ZENG Xun.Effect of[J].High Power Laser and Particle Beams,2001,13(2):137-141. |
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| Authors: | HU Jian-ping QIU Fu-min FU Xiong-ying ZENG Xun |
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| Abstract: | The laser damage of HfO2/SiO2 high reflecting coating with and without λ/2 silica overcoat was studied in detail respectively, the damage threshold and possibility was measured by using a 1064nm longitude mode, 10ns Nd:YAG laser, the laser damage size and morphology were observed and analyzed by using a Normaski microscope, main conclusions are as follows: （1) The λ/2 silica overcoat does affect laser damage threshold of HfO2/SiO2 high reflecting coating significantly，and increase the laser damage threshold of coating up to 1.5 times; （2) According to laser damage morphologies, λ/2 silica overcoat can reduce the serious damage of HfO2/SiO2 high reflecting coating, and prevent catastrophic damage of the hafnia top layer; （3) For multi-shot laser, λ/2 silica overcoat can greatly improve the stability of HfO2/SiO2 high reflector against the laser pulses after the first shot. |
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